DE3826024A1 - Schichtdickenmessgeraet zum messen duenner schichten - Google Patents

Schichtdickenmessgeraet zum messen duenner schichten

Info

Publication number
DE3826024A1
DE3826024A1 DE3826024A DE3826024A DE3826024A1 DE 3826024 A1 DE3826024 A1 DE 3826024A1 DE 3826024 A DE3826024 A DE 3826024A DE 3826024 A DE3826024 A DE 3826024A DE 3826024 A1 DE3826024 A1 DE 3826024A1
Authority
DE
Germany
Prior art keywords
measuring
differential
diode
layer thickness
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE3826024A
Other languages
German (de)
English (en)
Inventor
Guenter Wahl
Thomas Fritzsche
Gerthold Listner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBN GMBH DRESDEN, O-8020 DRESDEN, DE
Original Assignee
Nagema VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagema VEB filed Critical Nagema VEB
Publication of DE3826024A1 publication Critical patent/DE3826024A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE3826024A 1987-09-30 1988-07-30 Schichtdickenmessgeraet zum messen duenner schichten Withdrawn DE3826024A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD87307387A DD265223A1 (de) 1987-09-30 1987-09-30 Schichtdickenmessgeraet zum messen duenner schichten

Publications (1)

Publication Number Publication Date
DE3826024A1 true DE3826024A1 (de) 1989-04-13

Family

ID=5592619

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3826024A Withdrawn DE3826024A1 (de) 1987-09-30 1988-07-30 Schichtdickenmessgeraet zum messen duenner schichten

Country Status (4)

Country Link
CH (1) CH677027A5 (it)
DD (1) DD265223A1 (it)
DE (1) DE3826024A1 (it)
IT (1) IT1224538B (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995023093A1 (de) * 1994-02-28 1995-08-31 Krones Ag Hermann Kronseder Maschinenfabrik Etikettiermaschine für gegenstände
WO1999045339A1 (en) * 1998-03-06 1999-09-10 Ansaldo Ricerche S.R.L. A method and optical device for measuring the dimensions of a body, in particular of a turbine rotor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117433437B (zh) * 2023-12-20 2024-02-20 成都万唐科技有限责任公司 一种工件厚度均匀性检测装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995023093A1 (de) * 1994-02-28 1995-08-31 Krones Ag Hermann Kronseder Maschinenfabrik Etikettiermaschine für gegenstände
WO1999045339A1 (en) * 1998-03-06 1999-09-10 Ansaldo Ricerche S.R.L. A method and optical device for measuring the dimensions of a body, in particular of a turbine rotor

Also Published As

Publication number Publication date
IT1224538B (it) 1990-10-04
IT8848389A0 (it) 1988-09-28
DD265223A1 (de) 1989-02-22
CH677027A5 (it) 1991-03-28

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: NAGEMA AG DRESDEN, O-8045 DRESDEN, DE

8127 New person/name/address of the applicant

Owner name: IBN GMBH DRESDEN, O-8020 DRESDEN, DE

8141 Disposal/no request for examination