DE3820878C2 - - Google Patents
Info
- Publication number
- DE3820878C2 DE3820878C2 DE19883820878 DE3820878A DE3820878C2 DE 3820878 C2 DE3820878 C2 DE 3820878C2 DE 19883820878 DE19883820878 DE 19883820878 DE 3820878 A DE3820878 A DE 3820878A DE 3820878 C2 DE3820878 C2 DE 3820878C2
- Authority
- DE
- Germany
- Prior art keywords
- elastic element
- electrode
- electrode arrangement
- capacitive sensor
- main electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883820878 DE3820878A1 (de) | 1988-06-21 | 1988-06-21 | Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883820878 DE3820878A1 (de) | 1988-06-21 | 1988-06-21 | Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3820878A1 DE3820878A1 (de) | 1989-12-28 |
DE3820878C2 true DE3820878C2 (it) | 1990-09-13 |
Family
ID=6356891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19883820878 Granted DE3820878A1 (de) | 1988-06-21 | 1988-06-21 | Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3820878A1 (it) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005015160A1 (de) * | 2005-02-17 | 2006-08-31 | Continental Teves Ag & Co. Ohg | Drucksensor mit kapazitivem Messprinzip |
US8429978B2 (en) | 2010-03-30 | 2013-04-30 | Rosemount Inc. | Resonant frequency based pressure sensor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8234927B2 (en) * | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
CN103480197B (zh) * | 2013-10-12 | 2015-03-04 | 桂林宇辉信息科技有限责任公司 | 环境水样全自动过滤装置过滤膜工作状态智能检测器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3859575A (en) * | 1974-02-11 | 1975-01-07 | Lee Shih Ying | Variable capacitance sensor |
US4295376A (en) * | 1978-12-01 | 1981-10-20 | Besco Industries, Inc. | Force responsive transducer |
DE3037802A1 (de) * | 1980-10-07 | 1982-05-13 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver weg-frequenz-messgroessenwandler, insbesondere druck-frequenzwandler |
CH652823A5 (de) * | 1980-03-26 | 1985-11-29 | Bosch Gmbh Robert | Weg-frequenz-messgroessenwandler. |
-
1988
- 1988-06-21 DE DE19883820878 patent/DE3820878A1/de active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005015160A1 (de) * | 2005-02-17 | 2006-08-31 | Continental Teves Ag & Co. Ohg | Drucksensor mit kapazitivem Messprinzip |
US8429978B2 (en) | 2010-03-30 | 2013-04-30 | Rosemount Inc. | Resonant frequency based pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
DE3820878A1 (de) | 1989-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8363 | Opposition against the patent | ||
8339 | Ceased/non-payment of the annual fee | ||
8370 | Indication of lapse of patent is to be deleted | ||
8365 | Fully valid after opposition proceedings | ||
8339 | Ceased/non-payment of the annual fee |