DE3814054A1 - Auf die einwirkung einer kraft ansprechender sensor - Google Patents

Auf die einwirkung einer kraft ansprechender sensor

Info

Publication number
DE3814054A1
DE3814054A1 DE19883814054 DE3814054A DE3814054A1 DE 3814054 A1 DE3814054 A1 DE 3814054A1 DE 19883814054 DE19883814054 DE 19883814054 DE 3814054 A DE3814054 A DE 3814054A DE 3814054 A1 DE3814054 A1 DE 3814054A1
Authority
DE
Germany
Prior art keywords
force
semiconductor material
base body
monocrystalline semiconductor
side edges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19883814054
Other languages
German (de)
English (en)
Other versions
DE3814054C2 (enrdf_load_stackoverflow
Inventor
Vaclav F Vilimek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Deutschland GmbH
Original Assignee
Texas Instruments Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Deutschland GmbH filed Critical Texas Instruments Deutschland GmbH
Priority to DE19883814054 priority Critical patent/DE3814054A1/de
Publication of DE3814054A1 publication Critical patent/DE3814054A1/de
Application granted granted Critical
Publication of DE3814054C2 publication Critical patent/DE3814054C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE19883814054 1988-04-26 1988-04-26 Auf die einwirkung einer kraft ansprechender sensor Granted DE3814054A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883814054 DE3814054A1 (de) 1988-04-26 1988-04-26 Auf die einwirkung einer kraft ansprechender sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883814054 DE3814054A1 (de) 1988-04-26 1988-04-26 Auf die einwirkung einer kraft ansprechender sensor

Publications (2)

Publication Number Publication Date
DE3814054A1 true DE3814054A1 (de) 1989-11-09
DE3814054C2 DE3814054C2 (enrdf_load_stackoverflow) 1990-12-13

Family

ID=6352904

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883814054 Granted DE3814054A1 (de) 1988-04-26 1988-04-26 Auf die einwirkung einer kraft ansprechender sensor

Country Status (1)

Country Link
DE (1) DE3814054A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19921272A1 (de) * 1999-05-07 2000-11-09 Heidelberger Druckmasch Ag Piezokeramische Einspannüberwachung Vorrichtung zur Erfassung einer Druckplattenlage
US6691616B2 (en) 1999-05-07 2004-02-17 Heidelberger Druckmaschinen Ag Device for detecting the position of a printing plate on a cylinder of a rotary printing machine
CN103921171A (zh) * 2014-04-17 2014-07-16 西安交通大学 一种大量程压阻式高频响固定式四分量铣削力传感器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4334080C2 (de) * 1993-10-06 1996-05-02 Telefunken Microelectron Piezoresistive Sensorstruktur

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2841312A1 (de) * 1978-09-22 1980-04-03 Bosch Gmbh Robert Halbleiter-drucksensor mit piezoresistiven elementen und verfahren zu dessen herstellung
DE3429250C1 (de) * 1984-08-08 1986-03-27 Texas Instruments Deutschland Gmbh, 8050 Freising Auf die Einwirkung einer Kraft ansprechender Sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2841312A1 (de) * 1978-09-22 1980-04-03 Bosch Gmbh Robert Halbleiter-drucksensor mit piezoresistiven elementen und verfahren zu dessen herstellung
DE3429250C1 (de) * 1984-08-08 1986-03-27 Texas Instruments Deutschland Gmbh, 8050 Freising Auf die Einwirkung einer Kraft ansprechender Sensor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
IEEE Transactions on Electron Devices, Vol. ED-26, No. 12, December 1979, S. 1887-1917 *
Regelungstechnische Praxis 24. Jg., 1982, H. 7, S. 224-230 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19921272A1 (de) * 1999-05-07 2000-11-09 Heidelberger Druckmasch Ag Piezokeramische Einspannüberwachung Vorrichtung zur Erfassung einer Druckplattenlage
US6691616B2 (en) 1999-05-07 2004-02-17 Heidelberger Druckmaschinen Ag Device for detecting the position of a printing plate on a cylinder of a rotary printing machine
CN103921171A (zh) * 2014-04-17 2014-07-16 西安交通大学 一种大量程压阻式高频响固定式四分量铣削力传感器

Also Published As

Publication number Publication date
DE3814054C2 (enrdf_load_stackoverflow) 1990-12-13

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee