DE3805971A1 - Handhabungsgeraet - Google Patents

Handhabungsgeraet

Info

Publication number
DE3805971A1
DE3805971A1 DE3805971A DE3805971A DE3805971A1 DE 3805971 A1 DE3805971 A1 DE 3805971A1 DE 3805971 A DE3805971 A DE 3805971A DE 3805971 A DE3805971 A DE 3805971A DE 3805971 A1 DE3805971 A1 DE 3805971A1
Authority
DE
Germany
Prior art keywords
handling device
drive shaft
gripper
rack
working cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3805971A
Other languages
German (de)
English (en)
Other versions
DE3805971C2 (https=
Inventor
Josef Dipl Ing Gentischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE3805971A priority Critical patent/DE3805971A1/de
Publication of DE3805971A1 publication Critical patent/DE3805971A1/de
Application granted granted Critical
Publication of DE3805971C2 publication Critical patent/DE3805971C2/de
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Program-controlled manipulators
    • B25J9/10Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00Joints
    • B25J17/02Wrist joints
    • B25J17/0241One-dimensional joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Program-controlled manipulators
    • B25J9/10Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/101Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
DE3805971A 1988-02-25 1988-02-25 Handhabungsgeraet Granted DE3805971A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3805971A DE3805971A1 (de) 1988-02-25 1988-02-25 Handhabungsgeraet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3805971A DE3805971A1 (de) 1988-02-25 1988-02-25 Handhabungsgeraet

Publications (2)

Publication Number Publication Date
DE3805971A1 true DE3805971A1 (de) 1989-09-07
DE3805971C2 DE3805971C2 (https=) 1992-10-08

Family

ID=6348181

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3805971A Granted DE3805971A1 (de) 1988-02-25 1988-02-25 Handhabungsgeraet

Country Status (1)

Country Link
DE (1) DE3805971A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2664526A1 (fr) * 1990-07-16 1992-01-17 Villejuif Etudes Ind Systeme de manutention de tranche a protection contre les poussieres.
DE102008007510A1 (de) * 2008-02-05 2009-08-06 Chang, Doo-Bong, Dr. Dipl.-Ing. Vorrichtung zum Transportieren von Substraten mittels linearen Antrieben, mit Doppel-Vakuum-Kammer und mit mehrfach Greifersystemen
CN105666520A (zh) * 2016-04-01 2016-06-15 哈尔滨工业大学 一种基于齿轮传动的欠驱动机械臂手腕
CN112455523A (zh) * 2019-09-06 2021-03-09 珠海阳光儿童用品有限公司 一种婴儿车

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066014A1 (en) * 1981-06-03 1982-12-08 COMAU S.p.A. Manipulator with two opposing arms

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066014A1 (en) * 1981-06-03 1982-12-08 COMAU S.p.A. Manipulator with two opposing arms

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2664526A1 (fr) * 1990-07-16 1992-01-17 Villejuif Etudes Ind Systeme de manutention de tranche a protection contre les poussieres.
DE102008007510A1 (de) * 2008-02-05 2009-08-06 Chang, Doo-Bong, Dr. Dipl.-Ing. Vorrichtung zum Transportieren von Substraten mittels linearen Antrieben, mit Doppel-Vakuum-Kammer und mit mehrfach Greifersystemen
CN105666520A (zh) * 2016-04-01 2016-06-15 哈尔滨工业大学 一种基于齿轮传动的欠驱动机械臂手腕
CN112455523A (zh) * 2019-09-06 2021-03-09 珠海阳光儿童用品有限公司 一种婴儿车

Also Published As

Publication number Publication date
DE3805971C2 (https=) 1992-10-08

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee