DE3786139D1 - Automatisches fokussierungsverfahren fuer mittel zur untersuchung eines objekts. - Google Patents

Automatisches fokussierungsverfahren fuer mittel zur untersuchung eines objekts.

Info

Publication number
DE3786139D1
DE3786139D1 DE8787114611T DE3786139T DE3786139D1 DE 3786139 D1 DE3786139 D1 DE 3786139D1 DE 8787114611 T DE8787114611 T DE 8787114611T DE 3786139 T DE3786139 T DE 3786139T DE 3786139 D1 DE3786139 D1 DE 3786139D1
Authority
DE
Germany
Prior art keywords
examining
automatic focusing
focusing process
automatic
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787114611T
Other languages
English (en)
Other versions
DE3786139T2 (de
Inventor
Hiroshi C O Fujitsu Ltd Ikeda
Shuji C O Fujitsu Lt Takeshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE3786139D1 publication Critical patent/DE3786139D1/de
Application granted granted Critical
Publication of DE3786139T2 publication Critical patent/DE3786139T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/67—Focus control based on electronic image sensor signals
    • H04N23/671—Focus control based on electronic image sensor signals in combination with active ranging signals, e.g. using light or sound signals emitted toward objects

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Automatic Focus Adjustment (AREA)
DE8787114611T 1986-10-07 1987-10-07 Automatisches fokussierungsverfahren fuer mittel zur untersuchung eines objekts. Expired - Fee Related DE3786139T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61238801A JPH061288B2 (ja) 1986-10-07 1986-10-07 高さ補正による自動焦点合せ装置

Publications (2)

Publication Number Publication Date
DE3786139D1 true DE3786139D1 (de) 1993-07-15
DE3786139T2 DE3786139T2 (de) 1993-09-16

Family

ID=17035491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787114611T Expired - Fee Related DE3786139T2 (de) 1986-10-07 1987-10-07 Automatisches fokussierungsverfahren fuer mittel zur untersuchung eines objekts.

Country Status (5)

Country Link
US (1) US4851903A (de)
EP (1) EP0264057B1 (de)
JP (1) JPH061288B2 (de)
CA (1) CA1275330C (de)
DE (1) DE3786139T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02170279A (ja) * 1988-12-23 1990-07-02 Hitachi Ltd 被検査対象パターンの欠陥検出方法及びその装置
US5056046A (en) * 1989-06-20 1991-10-08 Combustion Engineering, Inc. Pneumatic operated valve data acquisitioner
DE3924989A1 (de) * 1989-07-28 1991-02-07 Roland Man Druckmasch Vorrichtung zur durchfuehrung einer umfassenden qualitaetskontrolle an druckbogen
DE4129510C1 (de) * 1991-09-05 1992-05-21 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De
US5204739A (en) * 1992-02-07 1993-04-20 Karl Suss America, Inc. Proximity mask alignment using a stored video image
US5673331A (en) * 1995-06-03 1997-09-30 United States Department Of Energy Method and apparatus for reading meters from a video image
JP5361517B2 (ja) * 2009-04-27 2013-12-04 オリンパス株式会社 内視鏡装置および計測方法
KR101158323B1 (ko) * 2010-10-14 2012-06-26 주식회사 고영테크놀러지 기판 검사방법
TWI585394B (zh) * 2015-12-09 2017-06-01 由田新技股份有限公司 動態式自動追焦系統
CN112595729B (zh) * 2021-03-03 2021-06-04 惠州高视科技有限公司 一种Mini-LED晶圆快速检测系统及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2386832A1 (fr) * 1977-04-05 1978-11-03 Commissariat Energie Atomique Procede de correction automatique de mise au point d'un microscope et un dispositif mettant en oeuvre ledit procede
DE2910875C2 (de) * 1979-03-20 1985-11-14 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zur automatischen Scharfeinstellung
JPS58162844A (ja) * 1982-03-23 1983-09-27 Toshiba Corp パタ−ン検査装置
GB8317407D0 (en) * 1983-06-27 1983-07-27 Rca Corp Image transform techniques
DE3341844A1 (de) * 1983-11-19 1985-05-30 Messerschmitt-Bölkow-Blohm GmbH, 2800 Bremen Messanordnung zur bestimmung von projektionsflaechen
JP2507988B2 (ja) * 1986-02-05 1996-06-19 オムロン株式会社 プリント基板検査装置
US4731864A (en) * 1986-02-21 1988-03-15 Rca Corporation Photographic camera simulation systems working from computer memory

Also Published As

Publication number Publication date
JPS6394139A (ja) 1988-04-25
EP0264057A2 (de) 1988-04-20
US4851903A (en) 1989-07-25
EP0264057B1 (de) 1993-06-09
JPH061288B2 (ja) 1994-01-05
CA1275330C (en) 1990-10-16
EP0264057A3 (en) 1990-12-12
DE3786139T2 (de) 1993-09-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee