DE3781781D1 - Verbundwerkstoff mit einer durch kathodenzerstaeubung aufgebrachten gleitschicht. - Google Patents

Verbundwerkstoff mit einer durch kathodenzerstaeubung aufgebrachten gleitschicht.

Info

Publication number
DE3781781D1
DE3781781D1 DE8787116871T DE3781781T DE3781781D1 DE 3781781 D1 DE3781781 D1 DE 3781781D1 DE 8787116871 T DE8787116871 T DE 8787116871T DE 3781781 T DE3781781 T DE 3781781T DE 3781781 D1 DE3781781 D1 DE 3781781D1
Authority
DE
Germany
Prior art keywords
gradients
slide layer
slide
layer applied
extend parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787116871T
Other languages
German (de)
English (en)
Inventor
Erich Dr Bergmann
Juergen Dipl Ing Braus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KS Gleitlager GmbH
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Application granted granted Critical
Publication of DE3781781D1 publication Critical patent/DE3781781D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/541Heating or cooling of the substrates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/14Special methods of manufacture; Running-in
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00Surface treatments; Hardening; Coating
    • F16C2223/30Coating surfaces
    • F16C2223/42Coating surfaces by spraying the coating material, e.g. plasma spraying
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S384/00Bearings
    • Y10S384/90Cooling or heating
    • Y10S384/91Powders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S384/00Bearings
    • Y10S384/90Cooling or heating
    • Y10S384/912Metallic
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12014All metal or with adjacent metals having metal particles
    • Y10T428/12021All metal or with adjacent metals having metal particles having composition or density gradient or differential porosity
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12014All metal or with adjacent metals having metal particles
    • Y10T428/12028Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • Y10T428/12063Nonparticulate metal component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12458All metal or with adjacent metals having composition, density, or hardness gradient
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12486Laterally noncoextensive components [e.g., embedded, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Sliding-Contact Bearings (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Lubricants (AREA)
  • Coating By Spraying Or Casting (AREA)
DE8787116871T 1986-12-23 1987-11-16 Verbundwerkstoff mit einer durch kathodenzerstaeubung aufgebrachten gleitschicht. Expired - Lifetime DE3781781D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH515786 1986-12-23

Publications (1)

Publication Number Publication Date
DE3781781D1 true DE3781781D1 (de) 1992-10-22

Family

ID=4288883

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787116871T Expired - Lifetime DE3781781D1 (de) 1986-12-23 1987-11-16 Verbundwerkstoff mit einer durch kathodenzerstaeubung aufgebrachten gleitschicht.

Country Status (9)

Country Link
US (1) US4889772A (pt)
EP (1) EP0272447B1 (pt)
JP (1) JP2511080B2 (pt)
KR (1) KR880007790A (pt)
AT (1) ATE80671T1 (pt)
AU (1) AU602180B2 (pt)
BR (1) BR8707027A (pt)
DE (1) DE3781781D1 (pt)
ES (1) ES2035016T3 (pt)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3813804A1 (de) * 1988-04-23 1989-11-09 Glyco Metall Werke Schichtwerkstoff oder schichtwerkstueck und verfahren zu seiner herstellung
DE3843927A1 (de) * 1988-12-24 1990-06-28 Kolbenschmidt Ag Verfahren zur herstellung von lagerungen
EP0452647B1 (de) * 1990-04-20 1994-06-08 Balzers Aktiengesellschaft Vorrichtung zur Halterung und Kühlung nebeneinander angeordneter Werkstücke and Träger für mehrere Vorrichtungen
US5087297A (en) * 1991-01-17 1992-02-11 Johnson Matthey Inc. Aluminum target for magnetron sputtering and method of making same
JP2535105B2 (ja) * 1991-04-30 1996-09-18 大同メタル工業株式会社 複合めっき皮膜を有するすべり軸受
JP2532790B2 (ja) * 1992-01-29 1996-09-11 大同メタル工業株式会社 オ―バ―レイを有する銅鉛合金軸受
DE4421144C2 (de) * 1993-07-21 2003-02-13 Unaxis Balzers Ag Beschichtetes Werkzeug mit erhöhter Standzeit
US5608766A (en) * 1993-10-29 1997-03-04 General Electric Company Co-deposition of palladium during oxide film growth in high-temperature water to mitigate stress corrosion cracking
US5687600A (en) * 1994-10-26 1997-11-18 Johnson Matthey Electronics, Inc. Metal sputtering target assembly
US5590389A (en) * 1994-12-23 1996-12-31 Johnson Matthey Electronics, Inc. Sputtering target with ultra-fine, oriented grains and method of making same
US5685797A (en) * 1995-05-17 1997-11-11 United Technologies Corporation Coated planet gear journal bearing and process of making same
US5863398A (en) * 1996-10-11 1999-01-26 Johnson Matthey Electonics, Inc. Hot pressed and sintered sputtering target assemblies and method for making same
US6274015B1 (en) 1996-12-13 2001-08-14 Honeywell International, Inc. Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same
US5803342A (en) * 1996-12-26 1998-09-08 Johnson Matthey Electronics, Inc. Method of making high purity copper sputtering targets
KR20010005546A (ko) 1997-03-19 2001-01-15 존슨매테이일렉트로닉스, 인코퍼레이티드 후면에 확산 니켈 플레이트된 타겟과 그의 생성방법
DE19824308C1 (de) * 1998-06-02 1999-09-09 Fraunhofer Ges Forschung Gleitlagerschale und Verfahren zu ihrer Herstellung
DE19824310C1 (de) * 1998-06-02 1999-08-12 Fraunhofer Ges Forschung Gleitlager und Verfahren zu seiner Herstellung
US6451185B2 (en) 1998-08-12 2002-09-17 Honeywell International Inc. Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same
US6321712B1 (en) * 2000-04-07 2001-11-27 Dana Corporation Racing engine having trimetal bearings with a thick overlay for high speed and/or high load applications
GB0308957D0 (en) 2003-04-17 2003-05-28 Lillishall Plastics And Engine Tolerance ring assembly
US7281853B2 (en) * 2003-12-01 2007-10-16 United Technologies Corporation Bearing material
US20050183797A1 (en) * 2004-02-23 2005-08-25 Ranjan Ray Fine grained sputtering targets of cobalt and nickel base alloys made via casting in metal molds followed by hot forging and annealing and methods of making same
DE102004029071B3 (de) * 2004-06-16 2006-02-16 Daimlerchrysler Ag Lagerschalen aus Hybridwerkstoffen und Verfahren zu deren Herstellung
AT502546B1 (de) 2005-09-16 2007-10-15 Miba Gleitlager Gmbh Lagerelement
US20070269151A1 (en) * 2006-05-18 2007-11-22 Hamilton Sundstrand Lubricated metal bearing material
DE102009002043B4 (de) * 2009-03-31 2013-01-03 Federal-Mogul Wiesbaden Gmbh Gleitlagerverbundwerkstoff
US8944690B2 (en) * 2009-08-28 2015-02-03 Saint-Gobain Performance Plastics Pampus Gmbh Corrosion resistant bushing
TWI487850B (zh) 2009-09-25 2015-06-11 Saint Gobain Performance Plast 用於滑移介面滑動力的公差環控制之系統、方法和裝置
EP4043204A1 (en) * 2014-09-02 2022-08-17 Saint-Gobain Performance Plastics Pampus GmbH Corrosion resistant bushing
AT517717B1 (de) * 2016-01-28 2017-04-15 Miba Gleitlager Austria Gmbh Verfahren zur Abscheidung einer Schicht auf einem Gleitlagerelementrohling
AT517383B1 (de) 2015-07-06 2017-03-15 Miba Gleitlager Austria Gmbh Gleitlagerelement
KR102399149B1 (ko) 2017-12-15 2022-05-19 생-고뱅 퍼포먼스 플라스틱스 렌콜 리미티드 구성 요소 변위 제어를 위한 환형 부재, 방법 및 어셈블리

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3467588A (en) * 1965-10-24 1969-09-16 Vitro Corp Of America Production of uniformly gradated coatings
JPS5327419B1 (pt) * 1970-10-27 1978-08-08
US3941903A (en) * 1972-11-17 1976-03-02 Union Carbide Corporation Wear-resistant bearing material and a process for making it
DE2853724C3 (de) * 1978-12-13 1981-07-16 Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden Schichtwerkstoff oder Schichtwerkstück sowie Verfahren zu dessen Herstellung
GB2040315B (en) * 1978-12-13 1983-05-11 Glyco Metall Werke Laminar material or element and a process for its manufacture
DE2914618C2 (de) * 1979-04-11 1983-09-29 Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden Schichtwerkstoff mit auf einer Trägerschicht im Drahtexplosionsverfahren oder Kathodenzerstäubung (Sputtering) aufgebrachter Gleit- oder Reibschicht, Verfahren zu seiner Herstellung und Target zur Durchführung des Verfahrens
JPS565967A (en) * 1979-06-28 1981-01-22 Toyota Motor Corp Sliding member
US4505987A (en) * 1981-11-10 1985-03-19 Oiles Industry Co., Ltd. Sliding member
JPS59100263A (ja) * 1982-11-29 1984-06-09 Teikoku Piston Ring Co Ltd 溶射ピストンリング
DE3404880A1 (de) * 1984-02-11 1985-08-14 Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken
US4732818A (en) * 1984-04-30 1988-03-22 Federal-Mogul Corporation Composite bearing material with polymer filled metal matrix interlayer of distinct metal particle sizes and method of making same
CH671239A5 (pt) * 1986-07-15 1989-08-15 Balzers Hochvakuum

Also Published As

Publication number Publication date
BR8707027A (pt) 1988-08-09
JP2511080B2 (ja) 1996-06-26
ES2035016T3 (es) 1993-04-16
AU602180B2 (en) 1990-10-04
EP0272447A3 (en) 1990-05-09
EP0272447A2 (de) 1988-06-29
ATE80671T1 (de) 1992-10-15
AU8295487A (en) 1988-06-23
EP0272447B1 (de) 1992-09-16
JPS63172017A (ja) 1988-07-15
KR880007790A (ko) 1988-08-29
US4889772A (en) 1989-12-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KOLBENSCHMIDT AG, 74172 NECKARSULM, DE

8327 Change in the person/name/address of the patent owner

Owner name: KS GLEITLAGER GMBH, 68789 ST LEON-ROT, DE