DE3773988D1 - Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen. - Google Patents

Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen.

Info

Publication number
DE3773988D1
DE3773988D1 DE8787105367T DE3773988T DE3773988D1 DE 3773988 D1 DE3773988 D1 DE 3773988D1 DE 8787105367 T DE8787105367 T DE 8787105367T DE 3773988 T DE3773988 T DE 3773988T DE 3773988 D1 DE3773988 D1 DE 3773988D1
Authority
DE
Germany
Prior art keywords
scaning
profile
thermal
surface structures
examining surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787105367T
Other languages
English (en)
Inventor
Hermantha Kumar Wickramasinghe
Clayton Covey Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3773988D1 publication Critical patent/DE3773988D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/867—Scanning thermal probe

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
DE8787105367T 1986-04-30 1987-04-10 Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen. Expired - Fee Related DE3773988D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/858,320 US4747698A (en) 1986-04-30 1986-04-30 Scanning thermal profiler

Publications (1)

Publication Number Publication Date
DE3773988D1 true DE3773988D1 (de) 1991-11-28

Family

ID=25328026

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787105367T Expired - Fee Related DE3773988D1 (de) 1986-04-30 1987-04-10 Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen.

Country Status (4)

Country Link
US (1) US4747698A (de)
EP (1) EP0245660B1 (de)
JP (1) JPH0781855B2 (de)
DE (1) DE3773988D1 (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3752099T2 (de) * 1986-12-24 1997-11-13 Canon Kk Aufzeichnungsgerät und Wiedergabegerät
DE3772563D1 (de) * 1987-06-22 1991-10-02 Ibm Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.
JPH0617923B2 (ja) * 1987-12-16 1994-03-09 株式会社フジクラ 光ファイバの加熱測定法
US4941753A (en) * 1989-04-07 1990-07-17 International Business Machines Corp. Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
DE3916047C2 (de) * 1989-05-17 1998-09-17 Ulrich Dr Fischer Stabförmige Sonde zur berührungslosen Untersuchung von Oberflächenstrukturen im Submikrometerbereich sowie Verfahren zur Herstellung dieser Sonde
JPH02311702A (ja) * 1989-05-29 1990-12-27 Olympus Optical Co Ltd 走査型トンネル顕微鏡装置
JP2880182B2 (ja) * 1989-06-09 1999-04-05 株式会社日立製作所 表面顕微鏡
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
US5003815A (en) * 1989-10-20 1991-04-02 International Business Machines Corporation Atomic photo-absorption force microscope
US4954704A (en) * 1989-12-04 1990-09-04 Digital Instruments, Inc. Method to increase the speed of a scanning probe microscope
US5289004A (en) * 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
US5065103A (en) * 1990-03-27 1991-11-12 International Business Machines Corporation Scanning capacitance - voltage microscopy
DE69123866T2 (de) * 1990-03-27 1997-06-26 Olympus Optical Co., Ltd., Tokio/Tokyo Rastertunnelmikroskop
US5166520A (en) * 1991-05-13 1992-11-24 The Regents Of The University Of California Universal, microfabricated probe for scanning probe microscopes
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5224775C2 (en) * 1992-03-02 2002-04-23 Ta Instr Inc Method and apparatus for modulated differential analysis
US5335993A (en) * 1992-03-02 1994-08-09 Ta Instruments, Inc. Method and apparatus for thermal conductivity measurements
US5248199A (en) * 1992-03-02 1993-09-28 Ta Instruments, Inc. Method and apparatus for spatially resolved modulated differential analysis
US5382336A (en) * 1992-04-16 1995-01-17 Board Of Regents, The University Of Texas System Tip position modulation and lock-in detection in scanning electrochemical microscopy
JP3010459B2 (ja) * 1992-08-03 2000-02-21 松下電器産業株式会社 温度分布測定装置および人体検知システム
CA2080557A1 (en) * 1992-10-14 1994-04-15 Joan F. Power Sensitive interferometric parallel thermal-wave imager
JP3270165B2 (ja) * 1993-01-22 2002-04-02 セイコーインスツルメンツ株式会社 表面分析及び加工装置
US5810477A (en) * 1993-04-30 1998-09-22 International Business Machines Corporation System for identifying surface conditions of a moving medium
US5527110A (en) * 1993-04-30 1996-06-18 International Business Machines Corporation Method and apparatus for detecting asperities on magnetic disks using thermal proximity imaging
US6088176A (en) * 1993-04-30 2000-07-11 International Business Machines Corporation Method and apparatus for separating magnetic and thermal components from an MR read signal
US5356218A (en) * 1993-05-04 1994-10-18 Motorola, Inc. Probe for providing surface images
US5441343A (en) * 1993-09-27 1995-08-15 Topometrix Corporation Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen
US5410910A (en) * 1993-12-22 1995-05-02 University Of Virginia Patent Foundation Cryogenic atomic force microscope
US5549387A (en) * 1994-06-01 1996-08-27 The Perkin-Elmer Corporation Apparatus and method for differential analysis using real and imaginary signal components
US5929438A (en) * 1994-08-12 1999-07-27 Nikon Corporation Cantilever and measuring apparatus using it
FR2728682B1 (fr) * 1994-12-26 1997-01-31 Commissariat Energie Atomique Dispositif d'essai d'un element d'optique soumis a un rayonnement
US5538898A (en) * 1995-03-16 1996-07-23 International Business Machines Corporation Method suitable for identifying a code sequence of a biomolecule
US5607568A (en) * 1995-03-16 1997-03-04 International Business Machines Corporation Assembly suitable for identifying a code sequence of a biomolecule in a free-solution embodiment
US5609744A (en) * 1995-03-16 1997-03-11 International Business Machines Corporation Assembly suitable for identifying a code sequence of a biomolecule in a gel embodiment
US5624845A (en) * 1995-03-16 1997-04-29 International Business Machines Corporation Assembly and a method suitable for identifying a code
IL113551A0 (en) * 1995-04-30 1995-07-31 Fish Galina Tapered structure suitable for microthermocouples microelectrodes field emission tips and micromagnetic sensors with force sensing capabilities
US5713667A (en) * 1995-06-07 1998-02-03 Advanced Micro Devices, Inc. Temperature sensing probe for microthermometry
DE69625292T2 (de) 1995-08-04 2003-09-04 International Business Machines Corp., Armonk Interferometrischer Nahfeldapparat und Verfahren
US5602820A (en) * 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5821545A (en) * 1995-11-07 1998-10-13 Molecular Imaging Corporation Heated stage for a scanning probe microscope
US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
US5872676A (en) * 1996-01-02 1999-02-16 International Business Machines Corporation Method and apparatus for positioning a dual element magnetoresistive head using thermal signals
US5751510A (en) * 1996-01-02 1998-05-12 International Business Machines Corporation Method and apparatus for restoring a thermal response signal of a magnetoresistive head
US5739972A (en) 1996-01-02 1998-04-14 Ibm Method and apparatus for positioning a magnetoresistive head using thermal response to servo information on the record medium
US5986261A (en) * 1996-04-29 1999-11-16 Nanoptics, Inc. Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities
US5945678A (en) * 1996-05-21 1999-08-31 Hamamatsu Photonics K.K. Ionizing analysis apparatus
FI102695B (fi) * 1996-06-11 1999-01-29 Nanoway Oy CB-Tunnelointiin perustuva lämpömittari
DE19635264C1 (de) * 1996-08-30 1998-04-16 Max Planck Gesellschaft Thermoelektrische Mikrosonde
FR2755224B1 (fr) * 1996-10-24 1998-12-04 Suisse Electronique Microtech Capteur a effet tunnel, notamment pour relever la topographie d'une surface
US5806978A (en) * 1996-11-21 1998-09-15 International Business Machines Corporation Calibration apparatus and methods for a thermal proximity sensor
US5753803A (en) * 1996-11-21 1998-05-19 International Business Machines Corporation Apparatus and methods for maintaining a substantially constant temperature in a thermal proximity sensor
US6249747B1 (en) * 1997-07-17 2001-06-19 International Business Machines Corporation Investigation and/or manipulation device
US6239936B1 (en) 1997-08-19 2001-05-29 International Business Machines Corporation Method and apparatus for calibrating a thermal response of a magnetoresistive element
US6065842A (en) * 1998-05-22 2000-05-23 Raytheon Company Heat maps for controlling deformations in optical components
US6744268B2 (en) * 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
US6198299B1 (en) 1998-08-27 2001-03-06 The Micromanipulator Company, Inc. High Resolution analytical probe station
US6174739B1 (en) * 1999-06-30 2001-01-16 Advanced Micro Devices, Inc. Method of monitoring via and trench profiles during manufacture
US6233206B1 (en) * 1999-10-26 2001-05-15 International Business Machines Corporation High density magnetic thermal recording and reproducing assembly
US6702186B1 (en) * 2000-02-24 2004-03-09 Hitachi Global Storage Technologies, Netherlands B.V. Assembly comprising a plurality of media probes for writing/reading high density magnetic data
US6884999B1 (en) * 2000-10-24 2005-04-26 Advanced Micro Devices, Inc. Use of scanning probe microscope for defect detection and repair
TW550622B (en) * 2000-11-03 2003-09-01 Ibm Data storage device and read/write component for data storage device
US20020067683A1 (en) * 2000-12-05 2002-06-06 Imation Corp. Temperature sensitive patterned media transducers
JP3925610B2 (ja) * 2001-02-13 2007-06-06 喜萬 中山 発熱プローブ及び発熱プローブ装置
JP3828030B2 (ja) * 2002-03-25 2006-09-27 エスアイアイ・ナノテクノロジー株式会社 温度測定プローブおよび温度測定装置
AU2003253213A1 (en) * 2002-08-29 2004-03-19 International Business Machines Corporation Thermal movement sensor
US7351996B2 (en) * 2002-11-27 2008-04-01 Borealis Technical Limited Method of increasing efficiency of thermotunnel devices
US8575597B2 (en) * 2002-11-27 2013-11-05 Borealis Technical Limited Liquid metal contact as possible element for thermotunneling
JP2004227842A (ja) * 2003-01-21 2004-08-12 Canon Inc プローブ保持装置、試料の取得装置、試料加工装置、試料加工方法、および試料評価方法
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7448798B1 (en) * 2003-06-18 2008-11-11 Veeco Instruments Inc. Scanning thermal probe microscope
US20060257286A1 (en) 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
CN100367017C (zh) * 2004-03-10 2008-02-06 李韫言 热运动传感指示器
US7759949B2 (en) * 2004-05-21 2010-07-20 Microprobe, Inc. Probes with self-cleaning blunt skates for contacting conductive pads
USRE43503E1 (en) 2006-06-29 2012-07-10 Microprobe, Inc. Probe skates for electrical testing of convex pad topologies
US7659739B2 (en) * 2006-09-14 2010-02-09 Micro Porbe, Inc. Knee probe having reduced thickness section for control of scrub motion
US9476911B2 (en) 2004-05-21 2016-10-25 Microprobe, Inc. Probes with high current carrying capability and laser machining methods
US9097740B2 (en) * 2004-05-21 2015-08-04 Formfactor, Inc. Layered probes with core
US7733101B2 (en) * 2004-05-21 2010-06-08 Microprobe, Inc. Knee probe having increased scrub motion
US8988091B2 (en) 2004-05-21 2015-03-24 Microprobe, Inc. Multiple contact probes
WO2006039506A2 (en) 2004-10-01 2006-04-13 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada, Reno Cantilevered probe detector with piezoelectric element
US8261662B1 (en) 2004-11-08 2012-09-11 Nanolnk, Inc. Active pen nanolithography
US7414250B1 (en) * 2004-11-30 2008-08-19 Northwestern University Cryogenic variable temperature vacuum scanning tunneling microscope
US7649367B2 (en) 2005-12-07 2010-01-19 Microprobe, Inc. Low profile probe having improved mechanical scrub and reduced contact inductance
US7312617B2 (en) 2006-03-20 2007-12-25 Microprobe, Inc. Space transformers employing wire bonds for interconnections with fine pitch contacts
US20080273572A1 (en) * 2006-06-02 2008-11-06 James Madison University Thermal detector for chemical or biological agents
US7786740B2 (en) * 2006-10-11 2010-08-31 Astria Semiconductor Holdings, Inc. Probe cards employing probes having retaining portions for potting in a potting region
US8907689B2 (en) * 2006-10-11 2014-12-09 Microprobe, Inc. Probe retention arrangement
US7514948B2 (en) 2007-04-10 2009-04-07 Microprobe, Inc. Vertical probe array arranged to provide space transformation
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
US7671610B2 (en) * 2007-10-19 2010-03-02 Microprobe, Inc. Vertical guided probe array providing sideways scrub motion
US8230593B2 (en) * 2008-05-29 2012-07-31 Microprobe, Inc. Probe bonding method having improved control of bonding material
US8073019B2 (en) * 2009-03-02 2011-12-06 Jian Liu 810 nm ultra-short pulsed fiber laser
US8384020B2 (en) * 2010-09-24 2013-02-26 Ut-Battelle, Llc Spatially resolved thermal desorption/ionization coupled with mass spectrometry
RU2498281C1 (ru) * 2012-04-23 2013-11-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский Томский политехнический университет" Термоэлектрический способ неразрушающего контроля качества поверхностного слоя металла
US9383386B2 (en) 2013-03-14 2016-07-05 Oxford Instruments Asylum Research, Inc. Optical beam positioning unit for atomic force microscope
US9804193B2 (en) 2014-03-12 2017-10-31 Oxford Instruments Asylum Research, Inc Metrological scanning probe microscope
US10705114B2 (en) 2014-03-12 2020-07-07 Oxford Instruments Asylum Research Inc Metrological scanning probe microscope
EP3268749B1 (de) * 2015-03-11 2021-09-08 Yeda Research and Development Co., Ltd. Supraleitender abtastsensor zur temperaturbildgebung im nanometerbereich
US12092518B2 (en) 2021-04-19 2024-09-17 The Johns Hopkins University High power laser profiler
TWI832501B (zh) * 2022-10-20 2024-02-11 汎銓科技股份有限公司 介電層之等效氧化層厚度取得方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2644851A (en) * 1950-05-04 1953-07-07 Bendix Aviat Corp Thermocouple
US2952725A (en) * 1958-06-27 1960-09-13 Olin Mathieson Thermocouple
US3154060A (en) * 1962-11-05 1964-10-27 Hundere Alf Reciprocating-piston gasoline engine fuel-air ratio control
US3343589A (en) * 1964-06-25 1967-09-26 San Fernando Lab Gaseous deposition method of making a thermocouple probe
US3400266A (en) * 1964-12-02 1968-09-03 Barnes Eng Co Infrared radiometric microscope
DE1573133A1 (de) * 1965-06-16 1971-03-25 Aga Ab Geraet zum optischen Abtasten eines Blickfeldes mittels infraroter Strahlen
US3433052A (en) * 1965-07-26 1969-03-18 Automation Ind Inc Material tester
US3435212A (en) * 1965-09-10 1969-03-25 Barnes Eng Co Radiometric microscope with means to produce a visual image
US3416373A (en) * 1966-04-01 1968-12-17 Ralph J. Havens Displacement detector
NL6813879A (de) * 1967-11-04 1969-05-06
US3810009A (en) * 1971-10-06 1974-05-07 Universal Oil Prod Co Apparatus for measuring material fouling of a test specimen
US3913378A (en) * 1974-04-08 1975-10-21 Universal Oil Prod Co Apparatus for measuring fouling on metal surfaces
US3973122A (en) * 1974-06-17 1976-08-03 Ixcon Inc. Measuring apparatus
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4510390A (en) * 1982-01-11 1985-04-09 Jan Rajchman Electronic method and apparatus for distance measurement through the use of equidistant thermal fiducial markings
US4522510A (en) * 1982-07-26 1985-06-11 Therma-Wave, Inc. Thin film thickness measurement with thermal waves
EP0112401B1 (de) * 1982-12-27 1987-04-22 International Business Machines Corporation Optisches Nahfeldabtastmikroskop

Also Published As

Publication number Publication date
JPH0781855B2 (ja) 1995-09-06
EP0245660A3 (en) 1989-11-15
EP0245660A2 (de) 1987-11-19
EP0245660B1 (de) 1991-10-23
US4747698A (en) 1988-05-31
JPS62261902A (ja) 1987-11-14

Similar Documents

Publication Publication Date Title
DE3773988D1 (de) Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen.
DE3784855D1 (de) Mischapparat und verfahren.
DE68919024D1 (de) Verfahren und Prozessor zur Abtastumsetzung.
DE3783337D1 (de) Geraete und verfahren zur bildverarbeitung.
DE3771003D1 (de) Scherkraftmesser, verfahren und geraet zur begrenzung der scherkraft waehrend einer embolectomie.
DE3673226D1 (de) Verfahren und vorrichtung zur untersuchung von oberflaechen.
DE3785890D1 (de) Verfahren und einrichtung zur abstimmung.
DE3781742D1 (de) Verfahren zur kosynthese von ethylenglykol und dimethylcarbonat.
DE59006693D1 (de) Verfahren und Vorrichtung zur Förderung und Synchronisierung der Bewegung von Gegenständen.
DE3781313D1 (de) Verfahren und vorrichtung.
DE59005106D1 (de) Verfahren und einrichtung zur zubereitung von speisen.
DE3784416D1 (de) Oberflaechenbehandeltes schwarzes stahlblech und verfahren zur herstellung desselben.
DE3750070D1 (de) Verfahren und empfangsgerät zur null-reduktion.
ES2016266B3 (es) Metodo de calcinacion y aparato para yeso o materiales similares.
DE68903992D1 (de) Verfahren zur aenderung der schattierung von bildern.
DE3578524D1 (de) Einrichtung und verfahren zur feinstbearbeitung von oberflaechen.
DE3776855D1 (de) Vliesstoffe und verfahren zur herstellung derselben.
DE69008623D1 (de) Verfahren und Vorrichtung zur Untersuchung von Oberflächenfehlern.
DE3778954D1 (de) Verfahren und geraet zur wellenformkombination.
DE3581240D1 (de) Verfahren zur abtastumsetzung und einheit zur abtastumsetzung nach diesem verfahren.
DE3762855D1 (de) Verfahren zur herstellung von hydroxyalkylaminen und hydroxyalkylpiperazinen.
DE69007418D1 (de) Octadienyläther und verfahren zur herstellung von octadienyläthern.
DE68926988D1 (de) Fluoralkyläther, oberflächenmodifizierende Zusammensetzung und Verfahren zur Modifikation von Oberflächen
DE3684511D1 (de) Verfahren zur herstellung von l-threonin und l-isoleucin.
DE3684922D1 (de) Verfahren zur herstellung von 2-phenylbenzotriazolen und 2-phenylbenzotriazol-n-oxyden.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee