DE3771945D1 - Verfahren und vorrichtung zur infrarotabsorptionsmessung der konzentration von mikrokristallinen fehlern in einem silizium-wafer zur herstellung eines halbleiterelementes. - Google Patents
Verfahren und vorrichtung zur infrarotabsorptionsmessung der konzentration von mikrokristallinen fehlern in einem silizium-wafer zur herstellung eines halbleiterelementes.Info
- Publication number
- DE3771945D1 DE3771945D1 DE8787102401T DE3771945T DE3771945D1 DE 3771945 D1 DE3771945 D1 DE 3771945D1 DE 8787102401 T DE8787102401 T DE 8787102401T DE 3771945 T DE3771945 T DE 3771945T DE 3771945 D1 DE3771945 D1 DE 3771945D1
- Authority
- DE
- Germany
- Prior art keywords
- microcristalline
- errors
- concentration
- producing
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 238000010521 absorption reaction Methods 0.000 title 1
- 238000005259 measurement Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
- G01N2021/3568—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor applied to semiconductors, e.g. Silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61038265A JPS62197743A (ja) | 1986-02-25 | 1986-02-25 | 赤外吸収測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3771945D1 true DE3771945D1 (de) | 1991-09-12 |
Family
ID=12520489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787102401T Expired - Lifetime DE3771945D1 (de) | 1986-02-25 | 1987-02-20 | Verfahren und vorrichtung zur infrarotabsorptionsmessung der konzentration von mikrokristallinen fehlern in einem silizium-wafer zur herstellung eines halbleiterelementes. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4862000A (de) |
EP (1) | EP0250707B1 (de) |
JP (1) | JPS62197743A (de) |
DE (1) | DE3771945D1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5066599A (en) * | 1989-07-27 | 1991-11-19 | Fujitsu Limited | Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (ftir) and semiconductor device fabrication method using the same |
US5096839A (en) * | 1989-09-20 | 1992-03-17 | Kabushiki Kaisha Toshiba | Silicon wafer with defined interstitial oxygen concentration |
US5702973A (en) * | 1990-04-05 | 1997-12-30 | Seh America, Inc. | Method for forming epitaxial semiconductor wafer for CMOS integrated circuits |
JPH07105424B2 (ja) * | 1991-07-23 | 1995-11-13 | 信越半導体株式会社 | シリコンウェーハの表面の結合状態及び不純物の評価方法 |
US5386118A (en) * | 1992-05-11 | 1995-01-31 | Shin-Etsu Handotai Co., Ltd. | Method and apparatus for determination of interstitial oxygen concentration in silicon single crystal |
US5444246A (en) * | 1992-09-30 | 1995-08-22 | Shin-Etsu Handotai Co., Ltd. | Determining carbon concentration in silicon single crystal by FT-IR |
US5595916A (en) * | 1993-03-29 | 1997-01-21 | Fujitsu Limited | Silicon oxide film evaluation method |
JPH10509276A (ja) * | 1993-04-28 | 1998-09-08 | エス・イー・エイチ・アメリカ,アイ・エヌ・シー | Cmos集積回路用のエピタキシャル半導体ウエーハ |
US5550374A (en) * | 1994-05-12 | 1996-08-27 | Memc Electronic Materials, Inc. | Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy |
US20050090641A1 (en) * | 2001-10-02 | 2005-04-28 | Regina Valluzzi | Self-assembling polymers, and materials fabricated therefrom |
DE102007029666B4 (de) | 2007-06-27 | 2011-03-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Bearbeiten eines Substrats |
US7979969B2 (en) * | 2008-11-17 | 2011-07-19 | Solopower, Inc. | Method of detecting and passivating a defect in a solar cell |
US8318239B2 (en) * | 2008-11-17 | 2012-11-27 | Solopower, Inc. | Method and apparatus for detecting and passivating defects in thin film solar cells |
US8318240B2 (en) * | 2008-11-17 | 2012-11-27 | Solopower, Inc. | Method and apparatus to remove a segment of a thin film solar cell structure for efficiency improvement |
TWI715039B (zh) | 2014-06-03 | 2021-01-01 | 荷蘭商Asml荷蘭公司 | 用於補償一曝光誤差的方法、元件製造方法、基板台、微影裝置、控制系統、用於量測反射率的方法、及用於量測一極紫外線輻射劑量的方法 |
CN108693141A (zh) * | 2018-01-25 | 2018-10-23 | 上海大学 | 激光与红外复合的无损检测设备及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2251080A1 (de) * | 1972-10-18 | 1974-05-02 | Max Planck Gesellschaft | Michelson-interferometer |
JPS5694243A (en) * | 1979-12-28 | 1981-07-30 | Fujitsu Ltd | Observing method for impurity in semiconductor |
US4429047A (en) * | 1981-08-28 | 1984-01-31 | Rca Corporation | Method for determining oxygen content in semiconductor material |
US4590574A (en) * | 1983-04-29 | 1986-05-20 | International Business Machines Corp. | Method for determining oxygen and carbon in silicon semiconductor wafer having rough surface |
JPS6117031A (ja) * | 1984-07-03 | 1986-01-25 | Nec Corp | シリコン結晶中の格子間酸素濃度測定方法及び測定装置 |
JPS6417031A (en) * | 1987-07-10 | 1989-01-20 | Olympus Optical Co | Shutter driving device |
JPH06117031A (ja) * | 1992-10-06 | 1994-04-26 | Toshiba Corp | 住宅の構造材 |
-
1986
- 1986-02-25 JP JP61038265A patent/JPS62197743A/ja active Granted
-
1987
- 1987-02-17 US US07/015,039 patent/US4862000A/en not_active Expired - Lifetime
- 1987-02-20 EP EP19870102401 patent/EP0250707B1/de not_active Expired - Lifetime
- 1987-02-20 DE DE8787102401T patent/DE3771945D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0449904B2 (de) | 1992-08-12 |
US4862000A (en) | 1989-08-29 |
JPS62197743A (ja) | 1987-09-01 |
EP0250707B1 (de) | 1991-08-07 |
EP0250707A3 (en) | 1988-08-03 |
EP0250707A2 (de) | 1988-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |