DE3686103D1 - Verfahren zum flachmachen eines substrats. - Google Patents

Verfahren zum flachmachen eines substrats.

Info

Publication number
DE3686103D1
DE3686103D1 DE8686107012T DE3686103T DE3686103D1 DE 3686103 D1 DE3686103 D1 DE 3686103D1 DE 8686107012 T DE8686107012 T DE 8686107012T DE 3686103 T DE3686103 T DE 3686103T DE 3686103 D1 DE3686103 D1 DE 3686103D1
Authority
DE
Germany
Prior art keywords
flatching
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686107012T
Other languages
English (en)
Other versions
DE3686103T2 (de
Inventor
Donald Clifford Hofer
Vergne Debra Brouse La
Robert James Twieg
Willi Nmn Volksen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3686103D1 publication Critical patent/DE3686103D1/de
Publication of DE3686103T2 publication Critical patent/DE3686103T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • H01L21/0212—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/312—Organic layers, e.g. photoresist
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31721—Of polyimide

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Formation Of Insulating Films (AREA)
  • Paints Or Removers (AREA)
DE8686107012T 1985-07-25 1986-05-23 Verfahren zum flachmachen eines substrats. Expired - Fee Related DE3686103T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/759,030 US4612210A (en) 1985-07-25 1985-07-25 Process for planarizing a substrate

Publications (2)

Publication Number Publication Date
DE3686103D1 true DE3686103D1 (de) 1992-08-27
DE3686103T2 DE3686103T2 (de) 1993-03-04

Family

ID=25054129

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686107012T Expired - Fee Related DE3686103T2 (de) 1985-07-25 1986-05-23 Verfahren zum flachmachen eines substrats.

Country Status (4)

Country Link
US (1) US4612210A (de)
EP (1) EP0209670B1 (de)
JP (1) JPH06105704B2 (de)
DE (1) DE3686103T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892896A (en) * 1988-04-04 1990-01-09 Ethyl Corporation Processing polyimide precursor compositions
US5114757A (en) * 1990-10-26 1992-05-19 Linde Harold G Enhancement of polyimide adhesion on reactive metals
US5194928A (en) * 1991-01-14 1993-03-16 International Business Machines Corporation Passivation of metal in metal/polyimide structure
US5114754A (en) * 1991-01-14 1992-05-19 International Business Machines Corporation Passivation of metal in metal/polyimide structures
US5153307A (en) * 1991-07-31 1992-10-06 International Business Machines Corporation Stabilization of polyamide alkyl ester solutions
US5276126A (en) * 1991-11-04 1994-01-04 Ocg Microelectronic Materials, Inc. Selected novolak resin planarization layer for lithographic applications
US5940729A (en) * 1996-04-17 1999-08-17 International Business Machines Corp. Method of planarizing a curved substrate and resulting structure
US5738915A (en) * 1996-09-19 1998-04-14 Lambda Technologies, Inc. Curing polymer layers on semiconductor substrates using variable frequency microwave energy
DE19705882A1 (de) * 1997-02-15 1998-08-20 Beck & Co Ag Dr Mischungen aus Lösungen von Polyamidocarbonsäuren und Lösungen von polyimidbildenden Ausgangsstoffen

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3882085A (en) * 1969-04-03 1975-05-06 Veba Chemie Ag Polyamide polymers from amino polyamide reactants
GB1317321A (en) * 1970-04-13 1973-05-16 Int Harvester Co Polyimides
US3779450A (en) * 1972-03-29 1973-12-18 Pennwalt Corp Basket centrifuge
JPS6040705B2 (ja) * 1978-06-26 1985-09-12 インタ−ナシヨナル・ビジネス・マシ−ンンズ・コ−ポレ−シヨン 電子回路の保護被覆形成方法
JPS56118857A (en) * 1980-02-25 1981-09-18 Nitto Electric Ind Co Thermofusing polyimide composite film and its manufacture
US4329419A (en) * 1980-09-03 1982-05-11 E. I. Du Pont De Nemours And Company Polymeric heat resistant photopolymerizable composition for semiconductors and capacitors
EP0048219B1 (de) * 1980-09-15 1986-10-01 Ciba-Geigy Ag Verwendung von flexiblem Basismaterial zur Herstellung von gedruckten Schaltungen
US4515828A (en) * 1981-01-02 1985-05-07 International Business Machines Corporation Planarization method
GB2104411B (en) * 1981-07-08 1985-02-20 Ube Industries Aromatic polyimide composite separating membrane
JPH07105319B2 (ja) * 1982-09-20 1995-11-13 富士通株式会社 半導体装置の製造方法
JPS5976451A (ja) * 1982-10-26 1984-05-01 Hitachi Ltd 半導体装置
DE3301197A1 (de) * 1983-01-15 1984-07-19 Akzo Gmbh, 5600 Wuppertal Polyimid-laminate mit hoher schaelfestigkeit
US4528216A (en) * 1983-02-24 1985-07-09 Oki Electric Industry Co., Ltd. Process for forming heat-resistant resin films of polyimide and organosilicic reactants
US4467000A (en) * 1983-03-29 1984-08-21 International Business Machines Corporation Process for coating a substrate with polyimide
JPS59212834A (ja) * 1983-05-17 1984-12-01 Mitsubishi Electric Corp 感光性耐熱材料
DE3486131T2 (de) * 1983-08-01 1993-10-28 Hitachi Chemical Co Ltd Harzmaterial mit geringer thermischer Ausdehnung für Verdrahtungsisolationsfolie.
US4533574A (en) * 1984-09-14 1985-08-06 E. I. Du Pont De Nemours And Company Polyimide coating compositions of esterified anhydride and aromatic amine mixture
US4568601A (en) * 1984-10-19 1986-02-04 International Business Machines Corporation Use of radiation sensitive polymerizable oligomers to produce polyimide negative resists and planarized dielectric components for semiconductor structures

Also Published As

Publication number Publication date
EP0209670B1 (de) 1992-07-22
EP0209670A3 (en) 1989-10-25
DE3686103T2 (de) 1993-03-04
US4612210A (en) 1986-09-16
EP0209670A2 (de) 1987-01-28
JPH06105704B2 (ja) 1994-12-21
JPS6226825A (ja) 1987-02-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee