DE3669704D1 - Vorrichtung zum liefern eines rohstoffs und verfahren zur benutzung dieser vorrichtung. - Google Patents

Vorrichtung zum liefern eines rohstoffs und verfahren zur benutzung dieser vorrichtung.

Info

Publication number
DE3669704D1
DE3669704D1 DE8686105933T DE3669704T DE3669704D1 DE 3669704 D1 DE3669704 D1 DE 3669704D1 DE 8686105933 T DE8686105933 T DE 8686105933T DE 3669704 T DE3669704 T DE 3669704T DE 3669704 D1 DE3669704 D1 DE 3669704D1
Authority
DE
Germany
Prior art keywords
delivering
raw material
raw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686105933T
Other languages
English (en)
Inventor
Ichiro C O Yokohama W Tsuchiya
Hiroshi C O Yokohama Wo Yokota
Toshio C O Yokohama Wo Danzuka
Hideki C O Yokohama Wor Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3669704D1 publication Critical patent/DE3669704D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers
    • Y10T137/2409—With counter-balancing pressure feedback to the modulating device
    • Y10T137/2452—With counter-counter balancing pressure feedback
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2499—Mixture condition maintaining or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2574—Bypass or relief controlled by main line fluid condition
    • Y10T137/2605—Pressure responsive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3118—Surge suppression

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE8686105933T 1985-05-01 1986-04-30 Vorrichtung zum liefern eines rohstoffs und verfahren zur benutzung dieser vorrichtung. Expired - Lifetime DE3669704D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60092272A JPS61254242A (ja) 1985-05-01 1985-05-01 原料供給装置

Publications (1)

Publication Number Publication Date
DE3669704D1 true DE3669704D1 (de) 1990-04-26

Family

ID=14049759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686105933T Expired - Lifetime DE3669704D1 (de) 1985-05-01 1986-04-30 Vorrichtung zum liefern eines rohstoffs und verfahren zur benutzung dieser vorrichtung.

Country Status (5)

Country Link
US (1) US4938789A (de)
EP (1) EP0200215B1 (de)
JP (1) JPS61254242A (de)
AU (1) AU588591B2 (de)
DE (1) DE3669704D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69006809T2 (de) * 1989-09-12 1994-09-15 Shinetsu Chemical Co Vorrichtung für die Verdampfung und Bereitstellung von Organometallverbindungen.
US5268337A (en) * 1991-11-18 1993-12-07 The Johns Hopkins University Ceramic oxide powders and the formation thereof
US5356451A (en) * 1993-12-20 1994-10-18 Corning Incorporated Method and apparatus for vaporization of liquid reactants
JP2959947B2 (ja) * 1994-02-28 1999-10-06 信越石英株式会社 原料ガス供給方法及び装置
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
JP3727781B2 (ja) * 1998-07-03 2005-12-14 日本碍子株式会社 原料・燃料用吐出装置
US8074677B2 (en) * 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
US9335768B2 (en) * 2013-09-12 2016-05-10 Lam Research Corporation Cluster mass flow devices and multi-line mass flow devices incorporating the same
WO2016111250A1 (ja) * 2015-01-08 2016-07-14 古河電気工業株式会社 気体分岐装置及びそれを用いたガラス微粒子堆積体の製造方法
US10146233B2 (en) * 2015-04-06 2018-12-04 Horiba Stec, Co., Ltd. Flow rate ratio control apparatus and program for flow rate ratio control apparatus
JP6573559B2 (ja) * 2016-03-03 2019-09-11 東京エレクトロン株式会社 気化原料供給装置及びこれを用いた基板処理装置
JP6683077B2 (ja) * 2016-09-05 2020-04-15 住友電気工業株式会社 ガラス合成用流体供給装置
CN108160005A (zh) * 2018-01-23 2018-06-15 温州职业技术学院 气体发生装置
JP7229792B2 (ja) 2018-02-05 2023-02-28 株式会社フジクラ 多孔質ガラス微粒子体の製造方法、多孔質ガラス微粒子体の製造装置、およびガラス母材の製造方法
JP7394045B2 (ja) * 2020-10-26 2023-12-07 信越化学工業株式会社 多孔質ガラス母材の製造装置、および製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52121341A (en) * 1976-04-06 1977-10-12 Nippon Telegr & Teleph Corp <Ntt> Production of optical fiber base materials and production apparatus fo r the same
US4302217A (en) * 1978-07-24 1981-11-24 Teitel Robert J Hydrogen supply system
US4234314A (en) * 1978-09-25 1980-11-18 Uop Inc. Guard-bed vapor bypass to overcome pressure drop in mixed-phase reactions
US4230744A (en) * 1979-02-21 1980-10-28 Corning Glass Works System for delivering materials to deposition site on optical waveguide blank
US4314837A (en) * 1979-03-01 1982-02-09 Corning Glass Works Reactant delivery system method
US4280829A (en) * 1980-05-12 1981-07-28 Corning Glass Works Apparatus for controlling internal pressure of a bait tube
US4378985A (en) * 1981-06-04 1983-04-05 Corning Glass Works Method and apparatus for forming an optical waveguide fiber
US4568370A (en) * 1982-09-29 1986-02-04 Corning Glass Works Optical fiber preform and method
US4718929A (en) * 1983-10-21 1988-01-12 Corning Glass Works Vapor phase method for making metal halide glasses
US4519815A (en) * 1983-12-15 1985-05-28 Texas Eastern Engineering Ltd. Slug-catching method and apparatus
AU563417B2 (en) * 1984-02-07 1987-07-09 Nippon Telegraph & Telephone Public Corporation Optical fibre manufacture
US4599098A (en) * 1984-02-13 1986-07-08 Lightwave Technologies, Inc. Optical fiber and method of producing same
DE3422885A1 (de) * 1984-06-20 1986-01-02 Kraftwerk Union AG, 4330 Mülheim Reingasdurchstroemzwischenspeicheranlage
US4661140A (en) * 1985-02-06 1987-04-28 Sumitomo Electric Industries, Ltd. Gas reaction apparatus and multi-wall pipe type burner therefor
US4753787A (en) * 1986-07-18 1988-06-28 Pieter Krijgsman Method and structure for forming a reaction product
US4767429A (en) * 1986-12-11 1988-08-30 American Telephone & Telegraph Co., At&T Bell Laboratories Glass body formed from a vapor-derived gel and process for producing same

Also Published As

Publication number Publication date
EP0200215A1 (de) 1986-11-05
US4938789A (en) 1990-07-03
JPS61254242A (ja) 1986-11-12
EP0200215B1 (de) 1990-03-21
AU588591B2 (en) 1989-09-21
AU5708186A (en) 1986-11-06

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Legal Events

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8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)