DE3669418D1 - Traegerscheibe fuer halbleiteranordnung aus siliziumcarbid. - Google Patents
Traegerscheibe fuer halbleiteranordnung aus siliziumcarbid.Info
- Publication number
- DE3669418D1 DE3669418D1 DE8686105672T DE3669418T DE3669418D1 DE 3669418 D1 DE3669418 D1 DE 3669418D1 DE 8686105672 T DE8686105672 T DE 8686105672T DE 3669418 T DE3669418 T DE 3669418T DE 3669418 D1 DE3669418 D1 DE 3669418D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- beta silicon
- substrate
- beta
- carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title abstract 8
- 229910010271 silicon carbide Inorganic materials 0.000 title abstract 8
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 239000013078 crystal Substances 0.000 abstract 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 230000008646 thermal stress Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Recrystallisation Techniques (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/737,367 US4767666A (en) | 1985-05-23 | 1985-05-23 | Wafer base for silicon carbide semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3669418D1 true DE3669418D1 (de) | 1990-04-12 |
Family
ID=24963643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8686105672T Expired - Lifetime DE3669418D1 (de) | 1985-05-23 | 1986-04-24 | Traegerscheibe fuer halbleiteranordnung aus siliziumcarbid. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4767666A (de) |
| EP (2) | EP0222908A1 (de) |
| JP (2) | JPS62502043A (de) |
| AT (1) | ATE50886T1 (de) |
| DE (1) | DE3669418D1 (de) |
| WO (1) | WO1986007194A1 (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2573480B2 (ja) * | 1985-11-22 | 1997-01-22 | 東芝セラミックス 株式会社 | 半導体熱処理用治具 |
| US4978567A (en) * | 1988-03-31 | 1990-12-18 | Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. | Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same |
| US5055319A (en) * | 1990-04-02 | 1991-10-08 | The Regents Of The University Of California | Controlled high rate deposition of metal oxide films |
| US5043773A (en) * | 1990-06-04 | 1991-08-27 | Advanced Technology Materials, Inc. | Wafer base for silicon carbide semiconductor devices, incorporating alloy substrates |
| US5190890A (en) * | 1990-06-04 | 1993-03-02 | Advanced Technology Materials, Inc. | Wafer base for silicon carbide semiconductor devices, incorporating alloy substrates, and method of making the same |
| JPH0529621A (ja) * | 1991-07-19 | 1993-02-05 | Rohm Co Ltd | 炭化珪素薄膜回路素子とその製造方法 |
| DE4135076A1 (de) * | 1991-10-24 | 1993-04-29 | Daimler Benz Ag | Mehrschichtige, monokristallines siliziumkarbid enthaltende zusammensetzung |
| US5492752A (en) * | 1992-12-07 | 1996-02-20 | Oregon Graduate Institute Of Science And Technology | Substrates for the growth of 3C-silicon carbide |
| US6650870B2 (en) | 1995-12-15 | 2003-11-18 | Innovision Research & Technology Plc | Data communication apparatus |
| DE19803423C2 (de) * | 1998-01-29 | 2001-02-08 | Siemens Ag | Substrathalterung für SiC-Epitaxie und Verfahren zum Herstellen eines Einsatzes für einen Suszeptor |
| WO2004102634A2 (en) | 2003-04-16 | 2004-11-25 | The Regents Of The University Of California | Metal mems devices and methods of making same |
| US7767498B2 (en) * | 2005-08-25 | 2010-08-03 | Vitex Systems, Inc. | Encapsulated devices and method of making |
| US20070187888A1 (en) * | 2005-11-29 | 2007-08-16 | Paul Dures | Lottery game card having a Sudoku-themed game |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3176204A (en) * | 1960-12-22 | 1965-03-30 | Raytheon Co | Device composed of different semiconductive materials |
| IL63802A (en) * | 1981-09-11 | 1984-10-31 | Iscar Ltd | Sintered hard metal products having a multi-layer wear-resistant coating |
-
1985
- 1985-05-23 US US06/737,367 patent/US4767666A/en not_active Expired - Lifetime
-
1986
- 1986-04-23 WO PCT/US1986/000892 patent/WO1986007194A1/en not_active Application Discontinuation
- 1986-04-23 EP EP86904481A patent/EP0222908A1/de not_active Withdrawn
- 1986-04-23 JP JP61503869A patent/JPS62502043A/ja active Pending
- 1986-04-24 EP EP86105672A patent/EP0209648B1/de not_active Expired - Lifetime
- 1986-04-24 DE DE8686105672T patent/DE3669418D1/de not_active Expired - Lifetime
- 1986-04-24 AT AT86105672T patent/ATE50886T1/de active
- 1986-05-23 JP JP61117721A patent/JPS61272922A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| WO1986007194A1 (en) | 1986-12-04 |
| JPS62502043A (ja) | 1987-08-13 |
| EP0209648A1 (de) | 1987-01-28 |
| US4767666A (en) | 1988-08-30 |
| EP0222908A1 (de) | 1987-05-27 |
| EP0209648B1 (de) | 1990-03-07 |
| JPS61272922A (ja) | 1986-12-03 |
| ATE50886T1 (de) | 1990-03-15 |
| JPH0556851B2 (de) | 1993-08-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee | ||
| 8370 | Indication related to discontinuation of the patent is to be deleted | ||
| 8339 | Ceased/non-payment of the annual fee |