DE3664386D1 - Electrostatic rebalancing, microproduction accelerometer - Google Patents

Electrostatic rebalancing, microproduction accelerometer

Info

Publication number
DE3664386D1
DE3664386D1 DE8686400240T DE3664386T DE3664386D1 DE 3664386 D1 DE3664386 D1 DE 3664386D1 DE 8686400240 T DE8686400240 T DE 8686400240T DE 3664386 T DE3664386 T DE 3664386T DE 3664386 D1 DE3664386 D1 DE 3664386D1
Authority
DE
Germany
Prior art keywords
microproduction
accelerometer
rebalancing
electrostatic
electrostatic rebalancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8686400240T
Other languages
English (en)
Inventor
Andre Boura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Francaise dEquipements pour la Navigation Aerienne SFENA SA
Original Assignee
Societe Francaise dEquipements pour la Navigation Aerienne SFENA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Francaise dEquipements pour la Navigation Aerienne SFENA SA filed Critical Societe Francaise dEquipements pour la Navigation Aerienne SFENA SA
Application granted granted Critical
Publication of DE3664386D1 publication Critical patent/DE3664386D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
DE8686400240T 1985-04-16 1986-02-05 Electrostatic rebalancing, microproduction accelerometer Expired DE3664386D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8505690A FR2580389B2 (fr) 1985-04-16 1985-04-16 Accelerometre micro-usine a rappel electrostatique

Publications (1)

Publication Number Publication Date
DE3664386D1 true DE3664386D1 (en) 1989-08-17

Family

ID=9318265

Family Applications (2)

Application Number Title Priority Date Filing Date
DE198686400240T Pending DE198724T1 (de) 1985-04-16 1986-02-05 Durch mikrobearbeitung hergestellter beschleunigungsmesser mit elektrostatischer rueckstellung.
DE8686400240T Expired DE3664386D1 (en) 1985-04-16 1986-02-05 Electrostatic rebalancing, microproduction accelerometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE198686400240T Pending DE198724T1 (de) 1985-04-16 1986-02-05 Durch mikrobearbeitung hergestellter beschleunigungsmesser mit elektrostatischer rueckstellung.

Country Status (5)

Country Link
US (1) US4711128A (de)
EP (1) EP0198724B1 (de)
JP (1) JPH0656389B2 (de)
DE (2) DE198724T1 (de)
FR (1) FR2580389B2 (de)

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Also Published As

Publication number Publication date
US4711128A (en) 1987-12-08
DE198724T1 (de) 1987-02-26
FR2580389B2 (fr) 1989-03-03
EP0198724A1 (de) 1986-10-22
EP0198724B1 (de) 1989-07-12
JPS62123361A (ja) 1987-06-04
JPH0656389B2 (ja) 1994-07-27
FR2580389A2 (fr) 1986-10-17

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