DE3640718C2 - - Google Patents
Info
- Publication number
- DE3640718C2 DE3640718C2 DE3640718A DE3640718A DE3640718C2 DE 3640718 C2 DE3640718 C2 DE 3640718C2 DE 3640718 A DE3640718 A DE 3640718A DE 3640718 A DE3640718 A DE 3640718A DE 3640718 C2 DE3640718 C2 DE 3640718C2
- Authority
- DE
- Germany
- Prior art keywords
- base plate
- membrane
- ceramic base
- cutting edge
- annular cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012528 membrane Substances 0.000 claims description 46
- 239000000919 ceramic Substances 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000003990 capacitor Substances 0.000 claims description 20
- 238000005516 engineering process Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000001311 chemical methods and process Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 241000158147 Sator Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19863640718 DE3640718A1 (de) | 1986-11-28 | 1986-11-28 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke |
| DE8787115653T DE3778310D1 (de) | 1986-11-28 | 1987-10-26 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke. |
| EP87115653A EP0268845B1 (de) | 1986-11-28 | 1987-10-26 | Membrankondensator zur Messung sehr geringer pneumatischer Wechseldrücke |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19863640718 DE3640718A1 (de) | 1986-11-28 | 1986-11-28 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3640718A1 DE3640718A1 (de) | 1988-06-09 |
| DE3640718C2 true DE3640718C2 (enExample) | 1989-05-24 |
Family
ID=6315017
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19863640718 Granted DE3640718A1 (de) | 1986-11-28 | 1986-11-28 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke |
| DE8787115653T Expired - Fee Related DE3778310D1 (de) | 1986-11-28 | 1987-10-26 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke. |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8787115653T Expired - Fee Related DE3778310D1 (de) | 1986-11-28 | 1987-10-26 | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke. |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0268845B1 (enExample) |
| DE (2) | DE3640718A1 (enExample) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2667786A (en) * | 1950-02-11 | 1954-02-02 | Cons Eng Corp | Capacitor pressure gauge |
| US2808545A (en) * | 1955-01-24 | 1957-10-01 | Walter J Hirtreiter | Pressure pick-up-differential-type acceleration-free |
| US4168517A (en) * | 1977-11-10 | 1979-09-18 | Lee Shih Y | Capacitive pressure transducer |
| DE7922944U1 (de) * | 1979-08-10 | 1979-11-22 | Hartmann & Braun Ag, 6000 Frankfurt | Membrankondensator zur messung sehr geringer pneumatischer wechseldruecke in gasanalysegeraeten |
| DE3404262A1 (de) * | 1983-03-09 | 1984-09-13 | Fuji Electric Co., Ltd., Kawasaki | Kapazitiver messfuehler |
| GB2162319B (en) * | 1984-06-06 | 1987-08-19 | Furness Controls Ltd | Pressure sensitive capacitor |
-
1986
- 1986-11-28 DE DE19863640718 patent/DE3640718A1/de active Granted
-
1987
- 1987-10-26 EP EP87115653A patent/EP0268845B1/de not_active Expired - Lifetime
- 1987-10-26 DE DE8787115653T patent/DE3778310D1/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE3640718A1 (de) | 1988-06-09 |
| EP0268845B1 (de) | 1992-04-15 |
| EP0268845A2 (de) | 1988-06-01 |
| EP0268845A3 (en) | 1990-07-04 |
| DE3778310D1 (de) | 1992-05-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |