DE3618972A1 - Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete - Google Patents

Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete

Info

Publication number
DE3618972A1
DE3618972A1 DE19863618972 DE3618972A DE3618972A1 DE 3618972 A1 DE3618972 A1 DE 3618972A1 DE 19863618972 DE19863618972 DE 19863618972 DE 3618972 A DE3618972 A DE 3618972A DE 3618972 A1 DE3618972 A1 DE 3618972A1
Authority
DE
Germany
Prior art keywords
disc
drive device
drive
eccentric
bearing component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19863618972
Other languages
German (de)
English (en)
Other versions
DE3618972C2 (OSRAM
Inventor
Michael Wulff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WULFF, MICHAEL, 2071 HOISDORF, DE
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19863618972 priority Critical patent/DE3618972A1/de
Publication of DE3618972A1 publication Critical patent/DE3618972A1/de
Application granted granted Critical
Publication of DE3618972C2 publication Critical patent/DE3618972C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F3/00—Colour separation; Correction of tonal value
    • G03F3/02—Colour separation; Correction of tonal value by retouching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission Devices (AREA)
DE19863618972 1986-06-05 1986-06-05 Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete Granted DE3618972A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19863618972 DE3618972A1 (de) 1986-06-05 1986-06-05 Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863618972 DE3618972A1 (de) 1986-06-05 1986-06-05 Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete

Publications (2)

Publication Number Publication Date
DE3618972A1 true DE3618972A1 (de) 1987-12-10
DE3618972C2 DE3618972C2 (OSRAM) 1989-01-05

Family

ID=6302366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863618972 Granted DE3618972A1 (de) 1986-06-05 1986-06-05 Antriebsvorrichtung fuer fotomechanische modifikationssysteme, insbesondere konturiergeraete

Country Status (1)

Country Link
DE (1) DE3618972A1 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013213254A1 (de) * 2013-07-05 2014-05-22 Carl Zeiss Smt Gmbh Betätigungseinheit für ein optisches element mit zweidimensionalem stellantrieb

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4268166A (en) * 1979-01-22 1981-05-19 Byers Thomas L Apparatus and method for modifying images on photographic film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4268166A (en) * 1979-01-22 1981-05-19 Byers Thomas L Apparatus and method for modifying images on photographic film

Also Published As

Publication number Publication date
DE3618972C2 (OSRAM) 1989-01-05

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: WULFF, MICHAEL, 2071 HOISDORF, DE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee