DE3576538D1 - Verfahren zum ueberfuehren eines feststoffes in den amorphen zustand durch einbringen eines exotischen atoms mittels elektronenstrahlen. - Google Patents

Verfahren zum ueberfuehren eines feststoffes in den amorphen zustand durch einbringen eines exotischen atoms mittels elektronenstrahlen.

Info

Publication number
DE3576538D1
DE3576538D1 DE8585306678T DE3576538T DE3576538D1 DE 3576538 D1 DE3576538 D1 DE 3576538D1 DE 8585306678 T DE8585306678 T DE 8585306678T DE 3576538 T DE3576538 T DE 3576538T DE 3576538 D1 DE3576538 D1 DE 3576538D1
Authority
DE
Germany
Prior art keywords
inleting
converting
solid
electron beams
amorphous state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585306678T
Other languages
English (en)
Inventor
Hiroshi Fujita
Naoto Sumida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka University NUC
Original Assignee
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC filed Critical Osaka University NUC
Application granted granted Critical
Publication of DE3576538D1 publication Critical patent/DE3576538D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/28—Solid state diffusion of only metal elements or silicon into metallic material surfaces using solids, e.g. powders, pastes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
    • C23C12/02—Diffusion in one step
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/60—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2636—Bombardment with radiation with high-energy radiation for heating, e.g. electron beam heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
DE8585306678T 1985-03-06 1985-09-19 Verfahren zum ueberfuehren eines feststoffes in den amorphen zustand durch einbringen eines exotischen atoms mittels elektronenstrahlen. Expired - Lifetime DE3576538D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60043992A JPS61204372A (ja) 1985-03-06 1985-03-06 電子線による異種原子の固体内注入を利用した材料の非晶質化方法

Publications (1)

Publication Number Publication Date
DE3576538D1 true DE3576538D1 (de) 1990-04-19

Family

ID=12679212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585306678T Expired - Lifetime DE3576538D1 (de) 1985-03-06 1985-09-19 Verfahren zum ueberfuehren eines feststoffes in den amorphen zustand durch einbringen eines exotischen atoms mittels elektronenstrahlen.

Country Status (4)

Country Link
US (1) US4668527A (de)
EP (1) EP0193674B1 (de)
JP (1) JPS61204372A (de)
DE (1) DE3576538D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0674501B2 (ja) * 1985-02-27 1994-09-21 大阪大学長 電子線による異種原子の固体内注入方法
DE271426T1 (de) * 1986-11-07 1989-01-05 United Technologies Corp., Hartford, Conn. Verfahren zur herstellung eines multimetallischen gegenstandes.
DE271425T1 (de) * 1986-11-07 1988-12-15 United Technologies Corp., Hartford, Conn. Multimetallisch hergestellter gegenstand.
CA2166450C (en) * 1995-01-20 2008-03-25 Ronald Salovey Chemically crosslinked ultrahigh molecular weight polyethylene for artificial human joints
US6149389A (en) * 1996-03-13 2000-11-21 Forschungszentrum Karlsruhe Gmbh Protective coating for turbine blades
DE19609690C2 (de) * 1996-03-13 2000-12-28 Karlsruhe Forschzent Turbinenschaufel
US6228900B1 (en) 1996-07-09 2001-05-08 The Orthopaedic Hospital And University Of Southern California Crosslinking of polyethylene for low wear using radiation and thermal treatments
JP2000514481A (ja) * 1996-07-09 2000-10-31 ザ オーソピーディック ホスピタル 放射線及び熱処理を用いた低摩耗ポリエチレンの架橋
US6017975A (en) 1996-10-02 2000-01-25 Saum; Kenneth Ashley Process for medical implant of cross-linked ultrahigh molecular weight polyethylene having improved balance of wear properties and oxidation resistance
AU4986497A (en) 1996-10-15 1998-05-11 Orthopaedic Hospital, The Wear resistant surface-gradient cross-linked polyethylene
DE19740696A1 (de) * 1997-09-16 1999-03-18 Bayerische Motoren Werke Ag Verfahren zur Herstellung und Bearbeitung metallischer Schichten
US6692679B1 (en) 1998-06-10 2004-02-17 Depuy Orthopaedics, Inc. Cross-linked molded plastic bearings
US6245276B1 (en) 1999-06-08 2001-06-12 Depuy Orthopaedics, Inc. Method for molding a cross-linked preform
US6627141B2 (en) 1999-06-08 2003-09-30 Depuy Orthopaedics, Inc. Method for molding a cross-linked preform
US6818172B2 (en) 2000-09-29 2004-11-16 Depuy Products, Inc. Oriented, cross-linked UHMWPE molding for orthopaedic applications
US7819925B2 (en) * 2002-01-28 2010-10-26 Depuy Products, Inc. Composite prosthetic bearing having a crosslinked articulating surface and method for making the same
US7186364B2 (en) 2002-01-28 2007-03-06 Depuy Products, Inc. Composite prosthetic bearing constructed of polyethylene and an ethylene-acrylate copolymer and method for making the same
US20040002770A1 (en) * 2002-06-28 2004-01-01 King Richard S. Polymer-bioceramic composite for orthopaedic applications and method of manufacture thereof
US7938861B2 (en) * 2003-04-15 2011-05-10 Depuy Products, Inc. Implantable orthopaedic device and method for making the same
US20040262809A1 (en) * 2003-06-30 2004-12-30 Smith Todd S. Crosslinked polymeric composite for orthopaedic implants
US7384430B2 (en) * 2004-06-30 2008-06-10 Depuy Products, Inc. Low crystalline polymeric material for orthopaedic implants and an associated method
US7879275B2 (en) * 2004-12-30 2011-02-01 Depuy Products, Inc. Orthopaedic bearing and method for making the same
US7883653B2 (en) 2004-12-30 2011-02-08 Depuy Products, Inc. Method of making an implantable orthopaedic bearing
US7896921B2 (en) * 2004-12-30 2011-03-01 Depuy Products, Inc. Orthopaedic bearing and method for making the same
CN113718200B (zh) * 2021-08-25 2022-06-07 西安交通大学 一种基于高温离子辐照制备梯度结构非晶薄膜的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2911533A (en) * 1957-12-24 1959-11-03 Arthur C Damask Electron irradiation of solids
DE1614854A1 (de) * 1966-12-30 1970-12-23 Texas Instruments Inc Verfahren zur Erzeugung von UEbergaengen in Halbleitern
US3718502A (en) * 1969-10-15 1973-02-27 J Gibbons Enhancement of diffusion of atoms into a heated substrate by bombardment
CA1095387A (en) * 1976-02-17 1981-02-10 Conrad M. Banas Skin melting
US4364969A (en) * 1979-12-13 1982-12-21 United Kingdom Atomic Energy Authority Method of coating titanium and its alloys
FR2475068B1 (fr) * 1980-02-01 1986-05-16 Commissariat Energie Atomique Procede de dopage de semi-conducteurs
GB2073254B (en) * 1980-04-09 1984-05-23 Atomic Energy Authority Uk Ion implanting metal coated ferrous surfaces
US4359486A (en) * 1980-08-28 1982-11-16 Siemens Aktiengesellschaft Method of producing alloyed metal contact layers on crystal-orientated semiconductor surfaces by energy pulse irradiation
GB2125442B (en) * 1982-05-24 1986-02-19 Atomic Energy Authority Uk A procedure for the hardening of materials
DE3224810A1 (de) * 1982-07-02 1984-01-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung harter, verschleissfester randschichten auf einem metallischen werkstoff
JPH0674501B2 (ja) * 1985-02-27 1994-09-21 大阪大学長 電子線による異種原子の固体内注入方法
EP1811073A2 (de) * 2006-01-18 2007-07-25 BERNINA International AG Nähmaschine und Verfahren zum Erfassen von Bewegungen bei Nähmaschinen

Also Published As

Publication number Publication date
JPS61204372A (ja) 1986-09-10
EP0193674A1 (de) 1986-09-10
JPH0116308B2 (de) 1989-03-23
EP0193674B1 (de) 1990-03-14
US4668527A (en) 1987-05-26

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