DE3534544C2 - - Google Patents
Info
- Publication number
- DE3534544C2 DE3534544C2 DE3534544A DE3534544A DE3534544C2 DE 3534544 C2 DE3534544 C2 DE 3534544C2 DE 3534544 A DE3534544 A DE 3534544A DE 3534544 A DE3534544 A DE 3534544A DE 3534544 C2 DE3534544 C2 DE 3534544C2
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- membrane
- group
- chamber
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012528 membrane Substances 0.000 claims description 126
- 239000012530 fluid Substances 0.000 claims description 51
- 230000005540 biological transmission Effects 0.000 claims description 34
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 31
- 239000000203 mixture Substances 0.000 claims description 18
- 229910052732 germanium Inorganic materials 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 9
- 238000010791 quenching Methods 0.000 claims description 8
- 230000000171 quenching effect Effects 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 229910052720 vanadium Inorganic materials 0.000 claims description 7
- 229910052726 zirconium Inorganic materials 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- -1 M n Inorganic materials 0.000 claims 1
- 238000010079 rubber tapping Methods 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 27
- 230000005291 magnetic effect Effects 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 239000010936 titanium Substances 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910000952 Be alloy Inorganic materials 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 229910001069 Ti alloy Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000003057 platinum Chemical class 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59204879A JPS6183930A (ja) | 1984-09-29 | 1984-09-29 | 圧力・差圧伝送器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3534544A1 DE3534544A1 (de) | 1986-04-03 |
| DE3534544C2 true DE3534544C2 (cg-RX-API-DMAC7.html) | 1987-08-20 |
Family
ID=16497908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853534544 Granted DE3534544A1 (de) | 1984-09-29 | 1985-09-27 | Druckmessvorrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4776218A (cg-RX-API-DMAC7.html) |
| JP (1) | JPS6183930A (cg-RX-API-DMAC7.html) |
| AU (1) | AU557806B2 (cg-RX-API-DMAC7.html) |
| DE (1) | DE3534544A1 (cg-RX-API-DMAC7.html) |
| GB (1) | GB2165055B (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4315962A1 (de) * | 1993-04-20 | 1994-10-27 | Landis & Gyr Business Support | Kapsel für einen Drucksensor und Verfahren zur Einkapselung des Drucksensors |
| DE10036474A1 (de) * | 2000-07-25 | 2002-02-14 | A B Elektronik Gmbh | Drucksensor |
| DE10064871A1 (de) * | 2000-12-27 | 2002-07-04 | Endress & Hauser Gmbh & Co Kg | Druckmessgerät |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4717545A (en) * | 1986-09-11 | 1988-01-05 | Miles Inc. | Device and method for chemical analysis of fluids with a reagent coated light source |
| DE3638978C2 (de) * | 1986-11-14 | 1996-04-25 | Teves Gmbh Alfred | Elektrohydraulische Vorrichtung zur kontinuierlichen Überwachung des Druckes in einer hydraulischen Kraftfahrzeug-Bremsanlage |
| DE3713236A1 (de) * | 1987-04-18 | 1988-11-03 | Parker Ermeto Gmbh | Vorrichtung zur messung von druecken |
| US4949581A (en) * | 1989-06-15 | 1990-08-21 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
| US5015993A (en) * | 1989-06-29 | 1991-05-14 | Pitney Bowes Inc. | Ferromagnetic alloys with high nickel content and high permeability |
| US5015992A (en) * | 1989-06-29 | 1991-05-14 | Pitney Bowes Inc. | Cobalt-niobium amorphous ferromagnetic alloys |
| KR930011091B1 (ko) * | 1990-06-08 | 1993-11-20 | 미쯔비시 덴끼 가부시끼가이샤 | 압력 센서 |
| US5465626A (en) * | 1994-04-04 | 1995-11-14 | Motorola, Inc. | Pressure sensor with stress isolation platform hermetically sealed to protect sensor die |
| CA2217754A1 (en) * | 1995-04-28 | 1996-10-31 | Rosemount Inc. | Mounting assembly for a pressure transmitter |
| DE19608310C1 (de) * | 1996-02-22 | 1997-07-17 | Hartmann & Braun Ag | Differenzdruckmeßumformereinheit mit einem Überlastschutzsystem |
| DE19608321C2 (de) * | 1996-02-22 | 2002-01-24 | Abb Patent Gmbh | Differenzdruckmeßumformereinheit mit einem Überlastschutzsystem |
| US6543291B1 (en) * | 2000-01-06 | 2003-04-08 | Kulite Semiconductor Products, Inc. | Wet-to-wet pressure sensing assembly |
| DE10157761A1 (de) | 2001-11-27 | 2003-06-05 | Endress & Hauser Gmbh & Co Kg | Druckaufnehmer |
| JP2003315193A (ja) * | 2002-04-24 | 2003-11-06 | Denso Corp | 圧力センサ |
| DE102004017580A1 (de) * | 2004-04-07 | 2005-12-01 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckaufnehmer mit dynamischem Überlastschutz |
| US7467555B2 (en) * | 2006-07-10 | 2008-12-23 | Rosemount Inc. | Pressure transmitter with multiple reference pressure sensors |
| RU2325623C1 (ru) * | 2006-08-10 | 2008-05-27 | Федеральное государственное унитарное предприятие "Производственное объединение "Старт" (ФГУП "ПО "Старт") | Датчик разности давлений |
| JP4848904B2 (ja) * | 2006-09-13 | 2011-12-28 | 株式会社デンソー | 圧力センサ |
| US7437939B1 (en) * | 2007-04-13 | 2008-10-21 | Rosemount Inc. | Pressure and mechanical sensors using titanium-based superelastic alloy |
| EP2113759A1 (fr) * | 2008-04-29 | 2009-11-04 | The Swatch Group Research and Development Ltd. | Capteur de pression ayant une membrane comprenant un matériau amorphe |
| RU2395793C1 (ru) * | 2009-01-29 | 2010-07-27 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт автоматики им. Н.Л. Духова" (ФГУП "ВНИИА") | Датчик разности давлений |
| US10053980B2 (en) * | 2015-03-27 | 2018-08-21 | Halliburton As | Borehole stress meter system and method for determining wellbore formation instability |
| US10247632B2 (en) * | 2016-06-23 | 2019-04-02 | Honeywell International | Oil filled gage reference side protection |
| DE102021129594A1 (de) | 2021-11-12 | 2023-05-17 | Endress+Hauser SE+Co. KG | Baugruppe eines Feldgerätes zur Bestimmung oder Überwachung einer physikalischen oder chemischen Prozessgröße |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6022287B2 (ja) * | 1980-07-17 | 1985-06-01 | 松下電器産業株式会社 | 圧力センサ |
| JPS5753636A (en) * | 1980-09-18 | 1982-03-30 | Tdk Corp | Detecting method for pressure of fluid |
| DE3132848A1 (de) * | 1981-08-20 | 1983-03-03 | Robert Bosch Gmbh, 7000 Stuttgart | Mechanisch-elektrischer wandler zur messung von druecken |
| JPS5887880A (ja) * | 1981-11-20 | 1983-05-25 | Hitachi Ltd | 半導体ダイアフラム形センサ |
| JPS5950331A (ja) * | 1982-09-16 | 1984-03-23 | Toshiba Corp | 伝送器のダイアフラム構造 |
-
1984
- 1984-09-29 JP JP59204879A patent/JPS6183930A/ja active Pending
-
1985
- 1985-09-25 AU AU47859/85A patent/AU557806B2/en not_active Ceased
- 1985-09-25 GB GB08523656A patent/GB2165055B/en not_active Expired
- 1985-09-27 DE DE19853534544 patent/DE3534544A1/de active Granted
-
1987
- 1987-09-14 US US07/096,779 patent/US4776218A/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4315962A1 (de) * | 1993-04-20 | 1994-10-27 | Landis & Gyr Business Support | Kapsel für einen Drucksensor und Verfahren zur Einkapselung des Drucksensors |
| DE10036474A1 (de) * | 2000-07-25 | 2002-02-14 | A B Elektronik Gmbh | Drucksensor |
| DE10064871A1 (de) * | 2000-12-27 | 2002-07-04 | Endress & Hauser Gmbh & Co Kg | Druckmessgerät |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6183930A (ja) | 1986-04-28 |
| DE3534544A1 (de) | 1986-04-03 |
| US4776218A (en) | 1988-10-11 |
| GB8523656D0 (en) | 1985-10-30 |
| GB2165055A (en) | 1986-04-03 |
| AU4785985A (en) | 1986-04-10 |
| GB2165055B (en) | 1988-04-13 |
| AU557806B2 (en) | 1987-01-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |