DE3480694D1 - Saugduese. - Google Patents
Saugduese.Info
- Publication number
- DE3480694D1 DE3480694D1 DE8484110913T DE3480694T DE3480694D1 DE 3480694 D1 DE3480694 D1 DE 3480694D1 DE 8484110913 T DE8484110913 T DE 8484110913T DE 3480694 T DE3480694 T DE 3480694T DE 3480694 D1 DE3480694 D1 DE 3480694D1
- Authority
- DE
- Germany
- Prior art keywords
- suction nozzle
- suction
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
- G03C2001/7455—Edge bead nonuniformity coated at the border
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Nozzles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983141123U JPS6049949U (ja) | 1983-09-12 | 1983-09-12 | 吸引ノズル |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3480694D1 true DE3480694D1 (de) | 1990-01-18 |
Family
ID=15284691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484110913T Expired - Lifetime DE3480694D1 (de) | 1983-09-12 | 1984-09-12 | Saugduese. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4611553A (de) |
EP (1) | EP0139211B1 (de) |
JP (1) | JPS6049949U (de) |
DE (1) | DE3480694D1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877475A (en) * | 1984-11-01 | 1989-10-31 | Matsushita Electric Industrial Co., Ltd. | Method for producing information storage disk |
US4754771A (en) * | 1985-07-17 | 1988-07-05 | Hybritech Incorporated | Apparatus for washing beads |
JPH0425259Y2 (de) * | 1986-12-10 | 1992-06-16 | ||
JPH074583B2 (ja) * | 1988-05-30 | 1995-01-25 | 富士写真フイルム株式会社 | ウェブの除塵方法 |
JPH0611422B2 (ja) * | 1988-10-04 | 1994-02-16 | 富士写真フイルム株式会社 | 塗布層縁部の吸引処理方法及び吸引ノズル |
SE500772C2 (sv) * | 1992-11-25 | 1994-08-29 | Staffan Sjoeberg | Anordning för rengöring av föremål i rörelse |
US5608943A (en) * | 1993-08-23 | 1997-03-11 | Tokyo Electron Limited | Apparatus for removing process liquid |
EP0841589B1 (de) * | 1995-04-26 | 2001-08-08 | ILFORD Imaging Switzerland GmbH | Verfahren und Vorrichtung zur Vorhangbeschichtung eines bewegten Trägers |
US6457654B1 (en) | 1995-06-12 | 2002-10-01 | Georgia Tech Research Corporation | Micromachined synthetic jet actuators and applications thereof |
US6123145A (en) * | 1995-06-12 | 2000-09-26 | Georgia Tech Research Corporation | Synthetic jet actuators for cooling heated bodies and environments |
US5758823A (en) * | 1995-06-12 | 1998-06-02 | Georgia Tech Research Corporation | Synthetic jet actuator and applications thereof |
EP0774301A1 (de) * | 1995-10-19 | 1997-05-21 | Minnesota Mining And Manufacturing Company | Vorrichtung zum Entfernen einer sich auf einer sich fortbewegenden Bahn befindlichen Beschichtung und Beschichtungsvorrichtung mit einer solchen Vorrichtung |
US5952050A (en) | 1996-02-27 | 1999-09-14 | Micron Technology, Inc. | Chemical dispensing system for semiconductor wafer processing |
DE19716466A1 (de) * | 1997-04-21 | 1998-10-22 | Bachofen & Meier Ag | Verfahren und Vorrichtung zum Auftragen von Dispersionen auf eine Materialbahn |
US6103636A (en) * | 1997-08-20 | 2000-08-15 | Micron Technology, Inc. | Method and apparatus for selective removal of material from wafer alignment marks |
US6554607B1 (en) | 1999-09-01 | 2003-04-29 | Georgia Tech Research Corporation | Combustion-driven jet actuator |
JP4512926B2 (ja) * | 1999-12-01 | 2010-07-28 | Jts株式会社 | コーティング装置 |
JP3405312B2 (ja) * | 2000-02-25 | 2003-05-12 | 日本電気株式会社 | 塗布膜除去装置 |
WO2002072421A2 (en) | 2001-03-10 | 2002-09-19 | Georgia Tech Research Corporation | Modification of fluid flow about bodies and surfaces through virtual aero-shaping of airfoils with synthetic jet actuators |
DE10159334A1 (de) * | 2001-12-03 | 2003-06-18 | Hilti Ag | Vorrichtung zum Reinigen eines Bohrloches |
EP1319446A2 (de) | 2001-12-13 | 2003-06-18 | Dow Global Technologies Inc. | Saugdüse |
JP5068577B2 (ja) * | 2007-04-25 | 2012-11-07 | 株式会社エムテーシー | 角形被処理体のフォトレジストの除去装置 |
JP5546516B2 (ja) * | 2011-09-22 | 2014-07-09 | 富士フイルム株式会社 | 塗布装置及び塗布方法 |
JP6390732B2 (ja) * | 2013-08-05 | 2018-09-19 | 東京エレクトロン株式会社 | 処理液供給装置 |
JP6221954B2 (ja) | 2013-08-05 | 2017-11-01 | 東京エレクトロン株式会社 | 現像方法、現像装置及び記憶媒体 |
CN104742490A (zh) * | 2015-03-05 | 2015-07-01 | 南京第壹有机光电有限公司 | 一种选择性除膜装置 |
NL2019096B1 (en) * | 2017-06-20 | 2018-12-27 | Suss Microtec Lithography Gmbh | Nozzle tip adapter, nozzle assembly as well as nozzle |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2899339A (en) * | 1957-08-23 | 1959-08-11 | Foating to a moving web | |
US3849830A (en) * | 1973-09-18 | 1974-11-26 | W Wagner | Test tube washer |
JPS591391B2 (ja) * | 1979-11-19 | 1984-01-11 | コニカ株式会社 | 塗布物の製造方法 |
-
1983
- 1983-09-12 JP JP1983141123U patent/JPS6049949U/ja active Granted
-
1984
- 1984-09-12 EP EP84110913A patent/EP0139211B1/de not_active Expired
- 1984-09-12 DE DE8484110913T patent/DE3480694D1/de not_active Expired - Lifetime
- 1984-09-12 US US06/649,800 patent/US4611553A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0139211A3 (en) | 1987-10-28 |
JPH022459Y2 (de) | 1990-01-22 |
EP0139211A2 (de) | 1985-05-02 |
JPS6049949U (ja) | 1985-04-08 |
US4611553A (en) | 1986-09-16 |
EP0139211B1 (de) | 1989-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |