DE3473846D1 - Method for polishing amorphous aluminum oxide - Google Patents

Method for polishing amorphous aluminum oxide

Info

Publication number
DE3473846D1
DE3473846D1 DE8484101834T DE3473846T DE3473846D1 DE 3473846 D1 DE3473846 D1 DE 3473846D1 DE 8484101834 T DE8484101834 T DE 8484101834T DE 3473846 T DE3473846 T DE 3473846T DE 3473846 D1 DE3473846 D1 DE 3473846D1
Authority
DE
Germany
Prior art keywords
aluminum oxide
amorphous aluminum
polishing
polishing amorphous
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484101834T
Other languages
English (en)
Inventor
Jagtar Singh Basi
Eric Mendel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3473846D1 publication Critical patent/DE3473846D1/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE8484101834T 1983-03-10 1984-02-22 Method for polishing amorphous aluminum oxide Expired DE3473846D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47412083A 1983-03-10 1983-03-10

Publications (1)

Publication Number Publication Date
DE3473846D1 true DE3473846D1 (en) 1988-10-13

Family

ID=23882264

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484101834T Expired DE3473846D1 (en) 1983-03-10 1984-02-22 Method for polishing amorphous aluminum oxide

Country Status (3)

Country Link
EP (1) EP0121707B1 (de)
JP (1) JPS5953317B2 (de)
DE (1) DE3473846D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232875A (en) * 1992-10-15 1993-08-03 Micron Technology, Inc. Method and apparatus for improving planarity of chemical-mechanical planarization operations
US5643053A (en) * 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
US5582534A (en) * 1993-12-27 1996-12-10 Applied Materials, Inc. Orbital chemical mechanical polishing apparatus and method
US5650039A (en) * 1994-03-02 1997-07-22 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved slurry distribution
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
US5858813A (en) * 1996-05-10 1999-01-12 Cabot Corporation Chemical mechanical polishing slurry for metal layers and films
TW572980B (en) 2000-01-12 2004-01-21 Jsr Corp Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process
US6910948B2 (en) * 2001-09-27 2005-06-28 Nsk Ltd. Needle bearing and method for grinding bearing parts thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE549314A (de) * 1955-07-08
DE1009884B (de) * 1955-07-08 1957-06-06 Vaw Ver Aluminium Werke Ag Verfahren zur Vorbehandlung von Werkstuecken aus Aluminium oder Aluminiumlegierungen zur Herstellung hochglaenzender, anodisch oxydierter Oberflaechen
CH356000A (de) * 1955-07-08 1961-07-31 Vaw Ver Aluminium Werke Ag Verfahren zur Herstellung haltbarer hochglänzender Oberflächen auf Werkstücken aus Aluminium oder einer Aluminiumlegierung
US2940228A (en) * 1956-07-03 1960-06-14 Vaw Ver Aluminium Werke Ag Apparatus for polishing metals
US2942956A (en) * 1958-10-13 1960-06-28 Wyandotte Chemicals Corp Aluminum brightener compositions
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
DE1271288B (de) * 1965-02-23 1968-06-27 Monsanto Co Verfahren zum Polieren von Werkstoffen mittels eines Siliciumdioxyd enthaltenden Poliermittels
GB1109892A (en) * 1965-03-12 1968-04-18 Marshall Wolverhampton A new or improved metal polishing composition
US3906678A (en) * 1972-09-14 1975-09-23 Buehler Ltd Automatic specimen polishing machine and method
US3931696A (en) * 1974-03-04 1976-01-13 Veb Rathenower Optische Werke Device for making sections for specimens and specimen supports therefor
JPS6013788B2 (ja) * 1981-02-06 1985-04-09 住友特殊金属株式会社 単結晶フエライトの精密加工方法

Also Published As

Publication number Publication date
JPS59170175A (ja) 1984-09-26
EP0121707B1 (de) 1988-09-07
EP0121707A3 (en) 1985-10-09
EP0121707A2 (de) 1984-10-17
JPS5953317B2 (ja) 1984-12-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee