EP0121707A3 - Method for polishing amorphous aluminum oxide - Google Patents

Method for polishing amorphous aluminum oxide Download PDF

Info

Publication number
EP0121707A3
EP0121707A3 EP84101834A EP84101834A EP0121707A3 EP 0121707 A3 EP0121707 A3 EP 0121707A3 EP 84101834 A EP84101834 A EP 84101834A EP 84101834 A EP84101834 A EP 84101834A EP 0121707 A3 EP0121707 A3 EP 0121707A3
Authority
EP
European Patent Office
Prior art keywords
aluminum oxide
amorphous aluminum
polishing
polishing amorphous
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP84101834A
Other versions
EP0121707B1 (en
EP0121707A2 (en
Inventor
Jagtar Singh Basi
Eric Mendel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP0121707A2 publication Critical patent/EP0121707A2/en
Publication of EP0121707A3 publication Critical patent/EP0121707A3/en
Application granted granted Critical
Publication of EP0121707B1 publication Critical patent/EP0121707B1/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP19840101834 1983-03-10 1984-02-22 Method for polishing amorphous aluminum oxide Expired EP0121707B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47412083A 1983-03-10 1983-03-10
US474120 1983-03-10

Publications (3)

Publication Number Publication Date
EP0121707A2 EP0121707A2 (en) 1984-10-17
EP0121707A3 true EP0121707A3 (en) 1985-10-09
EP0121707B1 EP0121707B1 (en) 1988-09-07

Family

ID=23882264

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19840101834 Expired EP0121707B1 (en) 1983-03-10 1984-02-22 Method for polishing amorphous aluminum oxide

Country Status (3)

Country Link
EP (1) EP0121707B1 (en)
JP (1) JPS5953317B2 (en)
DE (1) DE3473846D1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232875A (en) * 1992-10-15 1993-08-03 Micron Technology, Inc. Method and apparatus for improving planarity of chemical-mechanical planarization operations
US5582534A (en) * 1993-12-27 1996-12-10 Applied Materials, Inc. Orbital chemical mechanical polishing apparatus and method
US5643053A (en) 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
US5650039A (en) * 1994-03-02 1997-07-22 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved slurry distribution
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
US5858813A (en) * 1996-05-10 1999-01-12 Cabot Corporation Chemical mechanical polishing slurry for metal layers and films
TW572980B (en) 2000-01-12 2004-01-21 Jsr Corp Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process
US6910948B2 (en) 2001-09-27 2005-06-28 Nsk Ltd. Needle bearing and method for grinding bearing parts thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB825560A (en) * 1955-07-08 1959-12-16 Vaw Ver Aluminium Werke Ag Method of polishing metals
GB825559A (en) * 1955-07-08 1959-12-16 Vaw Ver Aluminium Werke Ag Method of producing a durable and very high lustre on articles made of aluminium or aluminium alloys
US2940228A (en) * 1956-07-03 1960-06-14 Vaw Ver Aluminium Werke Ag Apparatus for polishing metals
US2942956A (en) * 1958-10-13 1960-06-28 Wyandotte Chemicals Corp Aluminum brightener compositions
US2968577A (en) * 1955-07-08 1961-01-17 Vaw Ver Aluminium Werke Ag Method and apparatus for polishing metals
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
GB1109892A (en) * 1965-03-12 1968-04-18 Marshall Wolverhampton A new or improved metal polishing composition
DE1271288B (en) * 1965-02-23 1968-06-27 Monsanto Co Process for polishing materials by means of a polishing agent containing silicon dioxide
US3906678A (en) * 1972-09-14 1975-09-23 Buehler Ltd Automatic specimen polishing machine and method
US3931696A (en) * 1974-03-04 1976-01-13 Veb Rathenower Optische Werke Device for making sections for specimens and specimen supports therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013788B2 (en) * 1981-02-06 1985-04-09 住友特殊金属株式会社 Precision processing method for single crystal ferrite

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB825560A (en) * 1955-07-08 1959-12-16 Vaw Ver Aluminium Werke Ag Method of polishing metals
GB825559A (en) * 1955-07-08 1959-12-16 Vaw Ver Aluminium Werke Ag Method of producing a durable and very high lustre on articles made of aluminium or aluminium alloys
US2968577A (en) * 1955-07-08 1961-01-17 Vaw Ver Aluminium Werke Ag Method and apparatus for polishing metals
US2940228A (en) * 1956-07-03 1960-06-14 Vaw Ver Aluminium Werke Ag Apparatus for polishing metals
US2942956A (en) * 1958-10-13 1960-06-28 Wyandotte Chemicals Corp Aluminum brightener compositions
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
DE1271288B (en) * 1965-02-23 1968-06-27 Monsanto Co Process for polishing materials by means of a polishing agent containing silicon dioxide
GB1109892A (en) * 1965-03-12 1968-04-18 Marshall Wolverhampton A new or improved metal polishing composition
US3906678A (en) * 1972-09-14 1975-09-23 Buehler Ltd Automatic specimen polishing machine and method
US3931696A (en) * 1974-03-04 1976-01-13 Veb Rathenower Optische Werke Device for making sections for specimens and specimen supports therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENTS ABSTRACTS OF JAPAN, vol. 6, no. 232 (M-172)[1110], 18th November 1982; & JP - A - 57 132 964 (SUMITOMO TOKUSHIYU KINZOKU K.K.) 17-08-1982 *

Also Published As

Publication number Publication date
JPS59170175A (en) 1984-09-26
JPS5953317B2 (en) 1984-12-24
EP0121707B1 (en) 1988-09-07
EP0121707A2 (en) 1984-10-17
DE3473846D1 (en) 1988-10-13

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