DE3439688C2 - - Google Patents
Info
- Publication number
- DE3439688C2 DE3439688C2 DE19843439688 DE3439688A DE3439688C2 DE 3439688 C2 DE3439688 C2 DE 3439688C2 DE 19843439688 DE19843439688 DE 19843439688 DE 3439688 A DE3439688 A DE 3439688A DE 3439688 C2 DE3439688 C2 DE 3439688C2
- Authority
- DE
- Germany
- Prior art keywords
- layers
- layer
- contact layers
- contact
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 239000012876 carrier material Substances 0.000 claims description 6
- 238000000992 sputter etching Methods 0.000 claims description 6
- 229910052718 tin Inorganic materials 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000001465 metallisation Methods 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 238000006116 polymerization reaction Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 230000001172 regenerating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 60
- 239000010949 copper Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 101100173447 Caenorhabditis elegans ger-1 gene Proteins 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000282376 Panthera tigris Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005021 gait Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
- H01G4/306—Stacked capacitors made by thin film techniques
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843439688 DE3439688A1 (de) | 1984-10-30 | 1984-10-30 | Verfahren zum herstellen elektrischer plasmapolymerer vielschichtkondensatoren |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843439688 DE3439688A1 (de) | 1984-10-30 | 1984-10-30 | Verfahren zum herstellen elektrischer plasmapolymerer vielschichtkondensatoren |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3439688A1 DE3439688A1 (de) | 1986-04-30 |
| DE3439688C2 true DE3439688C2 (fr) | 1989-07-06 |
Family
ID=6249105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19843439688 Granted DE3439688A1 (de) | 1984-10-30 | 1984-10-30 | Verfahren zum herstellen elektrischer plasmapolymerer vielschichtkondensatoren |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3439688A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0339844A3 (fr) * | 1988-04-29 | 1991-01-16 | SPECTRUM CONTROL, INC. (a Delaware corporation) | Structure multicouche et son procédé de fabrication |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3021786A1 (de) * | 1980-06-10 | 1981-12-17 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstelung von elektrishen bauelementen, insbesondere schichtkondensatoren |
| DE3209041A1 (de) * | 1982-03-12 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung eines regenerierfaehigen elektrischen schichtkondensators |
-
1984
- 1984-10-30 DE DE19843439688 patent/DE3439688A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3439688A1 (de) | 1986-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8120 | Willingness to grant licenses paragraph 23 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |