DE3428593C2 - - Google Patents

Info

Publication number
DE3428593C2
DE3428593C2 DE3428593A DE3428593A DE3428593C2 DE 3428593 C2 DE3428593 C2 DE 3428593C2 DE 3428593 A DE3428593 A DE 3428593A DE 3428593 A DE3428593 A DE 3428593A DE 3428593 C2 DE3428593 C2 DE 3428593C2
Authority
DE
Germany
Prior art keywords
receiver
measuring device
surface measuring
optics
focal points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3428593A
Other languages
German (de)
English (en)
Other versions
DE3428593A1 (de
Inventor
Guiseppe Florenz/Firenze It Molesini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISTITUTO NAZIONALE DI OTTICA ARCETRI FLORENZ/FIRENZE IT
Original Assignee
ISTITUTO NAZIONALE DI OTTICA ARCETRI FLORENZ/FIRENZE IT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISTITUTO NAZIONALE DI OTTICA ARCETRI FLORENZ/FIRENZE IT filed Critical ISTITUTO NAZIONALE DI OTTICA ARCETRI FLORENZ/FIRENZE IT
Publication of DE3428593A1 publication Critical patent/DE3428593A1/de
Application granted granted Critical
Publication of DE3428593C2 publication Critical patent/DE3428593C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19843428593 1983-08-02 1984-08-02 Optisches oberflaechenmessgeraet Granted DE3428593A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT09491/83A IT1198660B (it) 1983-08-02 1983-08-02 Profilometro ottico multifocale per dispersione

Publications (2)

Publication Number Publication Date
DE3428593A1 DE3428593A1 (de) 1985-02-14
DE3428593C2 true DE3428593C2 (fr) 1988-11-17

Family

ID=11130919

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843428593 Granted DE3428593A1 (de) 1983-08-02 1984-08-02 Optisches oberflaechenmessgeraet

Country Status (4)

Country Link
DE (1) DE3428593A1 (fr)
FR (1) FR2550332B1 (fr)
GB (1) GB2144537B (fr)
IT (1) IT1198660B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006007170B4 (de) * 2006-02-08 2009-06-10 Sirona Dental Systems Gmbh Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik
DE102009001086A1 (de) 2009-02-23 2010-09-02 Sirona Dental Systems Gmbh Handgehaltene dentale Kamera und Verfahren zur optischen 3D-Vermessung
DE102016003334A1 (de) 2016-03-14 2017-09-14 Universität Stuttgart (Körperschaft Des Öffentlichen Rechts) Anordnung und Verfahren zur Raman-Spektroskopie, insbesondere auch zur Tumorgewebe- und Aorta-Diagnostik

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8501100A (nl) * 1985-04-15 1986-11-03 Optische Ind De Oude Delft Nv Werkwijze en stelsel voor het meten van het ruwheidsprofiel van een oppervlak.
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
US4707610A (en) * 1985-07-03 1987-11-17 Siscan Systems, Inc. Method and apparatus for measuring surface profiles
US4740688A (en) * 1986-03-20 1988-04-26 Smiths Industries Public Limited Company Optical transducers with wavelength coding
JPH07107481B2 (ja) * 1987-05-21 1995-11-15 アンリツ株式会社 変位測定装置
CH671828A5 (fr) * 1987-06-26 1989-09-29 Battelle Memorial Institute
AU622666B2 (en) * 1988-05-06 1992-04-16 Gersan Establishment Identifying the position of objects or zones
GB2219078B (en) * 1988-05-06 1992-08-26 Gersan Ets Identifying the position of objects or zones
US5206699A (en) 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
JP3323537B2 (ja) * 1991-07-09 2002-09-09 キヤノン株式会社 微細構造評価装置及び微細構造評価法
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
JP3206843B2 (ja) * 1992-12-18 2001-09-10 株式会社小松製作所 ３次元画像計測装置
DE19510535A1 (de) * 1995-03-23 1996-09-26 Siemens Ag Verfahren und Einrichtung zum Erkennen eines Defekts an einem Körper
US6175754B1 (en) 1995-06-07 2001-01-16 Keravision, Inc. Method and apparatus for measuring corneal incisions
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
FR2748322A1 (fr) * 1996-05-02 1997-11-07 Cohen Sabban Joseph Dispositif optoelectronique de triangulation spatiochromatique
FR2758076A1 (fr) * 1997-01-09 1998-07-10 Sabban Joseph Cohen Procede et dispositif optoelectroniques de retrodigitalisation en odontologie
DE19714202A1 (de) * 1997-04-07 1998-10-15 Bosch Gmbh Robert Vorrichtung zum optischen Prüfen von Oberflächen
IL125659A (en) 1998-08-05 2002-09-12 Cadent Ltd Method and device for three-dimensional simulation of a structure
FR2805342B1 (fr) * 2000-02-21 2002-07-12 Sabban Joseph Cohen Capteur de numerisation 3d optique haute resolution a faible angle de triangulation
US7154111B2 (en) 2002-10-16 2006-12-26 Campbell Science Group, Inc. Cornea characteristics measuring device
FR2846094B1 (fr) * 2002-10-17 2005-09-30 Dufournier Technologies Dispositif et procede de selection de pneumatiques en fonction du couple pneumatique/sol
FR2848664B1 (fr) * 2002-12-11 2005-03-11 Micro Module Detecteur de position, forme et reflectivite d'une surface
GB2407378B (en) 2003-10-24 2006-09-06 Lein Applied Diagnostics Ltd Ocular property measuring apparatus and method therefor
GB2409033C (en) 2003-12-12 2006-05-24 Lein Applied Diagnostics Ltd Extended focal region measuring apparatus and method
DE102004022454B4 (de) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
JP4331097B2 (ja) * 2004-12-10 2009-09-16 株式会社東芝 表面粗さの計測方法および装置およびタービンの劣化診断方法
EP2224204B1 (fr) * 2004-12-16 2021-05-26 Werth Messtechnik GmbH Procédé de mesure de la géometrie d'un objet à l'aide d'un appareil de mesure de coordonnées
US7522292B2 (en) * 2005-03-11 2009-04-21 Carl Zeiss Smt Ag System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape
DE102006026775B4 (de) * 2006-06-07 2008-04-30 Stiftung Für Lasertechnologien In Der Medizin Und Messtechnik An Der Universität Ulm Verfahren und Vorrichtung zur Charakterisierung bewegter Oberflächen
JP4888807B2 (ja) * 2006-07-26 2012-02-29 オプトウエア株式会社 走査型形状計測機
ITRM20060651A1 (it) * 2006-12-06 2008-06-07 Enea Ente Nuove Tec Metodo e dispositivo radar ottico tridimensionale utilizzante tre fasci rgb modulati da diodi laser, in particolare per applicazioni metrologiche e delle belle arti.
GB2451443B (en) 2007-07-30 2012-12-26 Lein Applied Diagnostics Ltd Optical measurement apparatus and method therefor
GB2457302B (en) 2008-02-11 2013-04-10 Lein Applied Diagnostics Ltd Measurement apparatus and method therefor
GB2487742B (en) * 2011-02-02 2013-08-21 Rolls Royce Plc An erosion testing assembly
JP6570035B2 (ja) * 2016-03-30 2019-09-04 国立大学法人東北大学 変位測定装置および変位測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1473780A1 (de) * 1965-12-30 1969-03-13 Bbc Brown Boveri & Cie Einrichtung zur beruehrungslosen Messung von Konturen
FR1534762A (fr) * 1967-05-18 1968-08-02 Cilas Procédé et dispositif de palpage optique

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006007170B4 (de) * 2006-02-08 2009-06-10 Sirona Dental Systems Gmbh Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik
DE102009001086A1 (de) 2009-02-23 2010-09-02 Sirona Dental Systems Gmbh Handgehaltene dentale Kamera und Verfahren zur optischen 3D-Vermessung
US8577212B2 (en) 2009-02-23 2013-11-05 Sirona Dental Systems Gmbh Handheld dental camera and method for carrying out optical 3D measurement
DE102009001086B4 (de) * 2009-02-23 2014-03-27 Sirona Dental Systems Gmbh Handgehaltene dentale Kamera und Verfahren zur optischen 3D-Vermessung
DE102016003334A1 (de) 2016-03-14 2017-09-14 Universität Stuttgart (Körperschaft Des Öffentlichen Rechts) Anordnung und Verfahren zur Raman-Spektroskopie, insbesondere auch zur Tumorgewebe- und Aorta-Diagnostik
WO2017157514A1 (fr) 2016-03-14 2017-09-21 Universität Stuttgart Système et procédé de spectroscopie raman

Also Published As

Publication number Publication date
GB2144537A (en) 1985-03-06
GB8419614D0 (en) 1984-09-05
IT1198660B (it) 1988-12-21
GB2144537B (en) 1986-07-30
FR2550332B1 (fr) 1988-04-01
FR2550332A1 (fr) 1985-02-08
DE3428593A1 (de) 1985-02-14
IT8309491A0 (it) 1983-08-02

Similar Documents

Publication Publication Date Title
DE3428593C2 (fr)
EP0321529B1 (fr) Dispositif de mesure des ecarts entre un element optique a aberration chromatique elevee et un objet
EP3891465B1 (fr) Dispositif de mesure optique
DE69612844T2 (de) Wellenfrontenbestimmung mit Mikrospiegel zur Selbstreferenz und seine Justage
DE3887947T2 (de) Messanordnung von entfernungen.
EP0045321B1 (fr) Procédé et dispositif de mesure optique de distances
DE69021813T2 (de) Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen.
DE102018114860A1 (de) Vorrichtung und Verfahren zur optischen Vermessung eines Messobjekts
EP0011708A1 (fr) Méthode et dispositif pour mesurer la planéité, la rugosité ou le rayon de courbure d'une surface à mesurer
DE102008029459A1 (de) Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
DE3432252A1 (de) Messmikroskop
EP0242436A2 (fr) Dispositif pour la mesure de petites longueurs
EP0112399B1 (fr) Méthode de mesure interférométrique pour des surfaces
DE102010016462B4 (de) Schichtmessverfahren und Messvorrichtung
DE3721749A1 (de) Verfahren und vorrichtung zur beruehrungslosen erfassung der form von gegenstaenden
EP3811025B1 (fr) Dispositif de mesure optique confocale chromatique et d'imagerie confocale d'un objet de mesure et procédé d'exécution
EP1805476B1 (fr) Interferometre comprenant un systeme de miroirs pour effectuer des mesures sur un objet
DE4105509C2 (de) Streulichtmeßanordnung zur Untersuchung der Oberflächenrauheit
DE102019001498A1 (de) Vorrichtung zur optischen Vermessung und Abbildung eines Messobjekts sowie Verfahren
DE4404154C2 (de) Verfahren und Vorrichtung zum optischen Untersuchen einer Oberfläche
EP1794572B1 (fr) Procede d'exploitation d'un systeme interferometrique avec un element de reference pourvu d'une ou plusieurs zones reflechissantes
DE3517044C2 (fr)
DE2922163A1 (de) Optische vorrichtung zur bestimmung der guete einer oberflaeche
DE69218558T2 (de) Berührungsloses Verfahren und Vorrichtung zur Höhendifferenzmessung von zwei Oberflächen
DE3716241C2 (fr)

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee