GB2144537A - Profile measuring instrument - Google Patents

Profile measuring instrument Download PDF

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Publication number
GB2144537A
GB2144537A GB08419614A GB8419614A GB2144537A GB 2144537 A GB2144537 A GB 2144537A GB 08419614 A GB08419614 A GB 08419614A GB 8419614 A GB8419614 A GB 8419614A GB 2144537 A GB2144537 A GB 2144537A
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GB
United Kingdom
Prior art keywords
detector
measuring instrument
profile measuring
optical profile
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08419614A
Other versions
GB8419614D0 (en
GB2144537B (en
Inventor
Giuseppe Molesini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTTICA IST NAZ
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OTTICA IST NAZ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTTICA IST NAZ filed Critical OTTICA IST NAZ
Publication of GB8419614D0 publication Critical patent/GB8419614D0/en
Publication of GB2144537A publication Critical patent/GB2144537A/en
Application granted granted Critical
Publication of GB2144537B publication Critical patent/GB2144537B/en
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

An optical profile measuring instrument for inspecting surfaces of specimens to be tested includes a polychromatic light source 21 having a slit shaped aperture and a collimator lens 23. The collimated beam is dispersed longitudinally by a lens 27A and focused into a series of focal points F1 to Fn by a lens 27B. Each focus point is associated with a particular 31 wavelength. Light reflected from a specimen 29 is deflected by a separator 25 onto device 31 which angularly disperses the light and focuses it onto an array of photodiodes 33 connected to a detection circuit 35. The diodes 33 are sequentially scanned to provide an output signal whose maximum value corresponds to the position of the surface of specimen 29. <IMAGE>

Description

SPECIFICATION Profile measuring instrument This invention relates to an optical profile measuring instrument for inspecting the surfaces of specimens to be tested.
Mechanical surfaces are characterized by their finish in terms of roughness (microfinish) as well as by their macroscopic condition.
Many of the operating characteristics of the final component are due to this finish. The microfinish may expressed in terms of the values of a number of parameters such as Ra or the RMS value, autocorrelation function, or the Fourier spectrum of the surface profile.
These values may be obtained by integrated measurements of surface sections, or from knowledge of the three dimensions topography of the surface.
Instruments designed to reconstruct the three dimensional topography in fact explore the surface along linear sections, thereby obtaining an altitude profile from which the desired parameters may be obtained using appropriate statistical criteria. A true three dimensional profile is obtained by scanning parallel sections. The various instruments designed to be used for this purpose are mainly characterised by their sensitivity, their lateral resolution and their measurement range.
The measurement range which is of use for mechanical purposes usually extends from a fraction of a micrometer to some tens of micrometers.
In the case of the mechanical measurement range there are two main types of instrument (in addition to those instruments using the Moor6 method or the projection of fringes or lines), whose sensitivity has a lower limit of a few micrometers, and these are the contact stylus instruments and optical profile measuring instruments.
Stylus instruments are very widely used.
Their vertical resolution is approximately ten A, whereas their lateral resolution is a few micrometers.
Optical profile measuring instruments are devices of the non-contact type and may have a typical resolution of a fraction of a micrometer in vertical terms and a micrometer in lateral terms. There are also very sophisticated optical profile measuring instruments of the heterodyne and interferometer type which have a much higher resolution such as the Sommargren, Wyant or Bennett instrument.
It is an object of this invention to provide an optical profile measuring instrument of simple and reliable construction and which has good resolution and accuracy.
According to this invention there is provided an optical profile measuring instrument for the inspection of mechanical surfaces of specimens to be tested comprising means for producing a light beam which is concentrated on a surface of a specimen to be tested and which is returned and deflected by a reflection separator to a detector, characterized in that the light beam is polychromatic, in that the beam which is incident on the surface is dispersed longitudinally by a longitudinal dispersion device, and in that the returned beam is dispersed by an angular dispersion device, and in that the detector is arranged to detect the angularly dispersed beam.
The instrument of this invention is of the non-contact type and is designed to operate in sequence with an operating machine and can supply altitude data in practice in real time.
Its vertical resolution is close to that obtained by the interferometer method. Its lateral sensitivity depends on the dimension the spot focussed on the surface under test and may be approximately one micrometer.
The detector may be formed from an array or a matrix of photodiodes which are associated with a detection circuit.
In use the components of the instrument may be static with the exception of the specimen which is provided with relative movement.
Advantageously, the means for producing the light beam includes a slit and the detector is a photodiode matrix arranged for three dimensional detection.
According to another aspect of this invention there is provided an optical profile measuring instrument for inspection of mechanical surfaces of specimens to be tested, said instrument comprising means for producing a polychromatic light beam, means for concentrating the beam on the surface of a specimen to be tested, means for longitudinally dispersing the beam before the beam is incident on said surface, a detector, means for reflecting light returned from said surface onto the detector, and means for subjecting the returned light to angular dispersion before the returned light is incident on the detector.
This invention will now be described in more detail, by way of example, with reference to the drawings in which: Figure 1 is a diagram of a conventional optical profile measuring instrument; and Figure 2 is a diagram of an optical profile measuring instrument embodying this invention.
The operating principle of the conventional instrument is shown in Fig. 1. The reference 1 indicates a collimated monochromatic light source producing a parallel beam which is incident on and passes through a separator 3 in order to reach a first lens 5. The first lens 5 concentrates the beam on the surface of the specimen to be tested being movable in the direction of the arrow. The reflected light again passes through the lens 5 and is deflected by the separator 7 to a second lens 9 which concentrates it on a diaphragm 11, in front of a detector 1 3.
The detector receives the maximum signal when the surface of the specimen is located in the focus of the lens 5. This concept forms the basis of a conventional instrument, in which the lens 1 oscillates longitudinally and the signal is detected in phase with the oscillation.
A similar construction is used in the instrument embodying the invention, together with wavelength coding of a sequence of longitudinal foci, as shown in the drawings, resulting from the use of polychromatic, rather than monochromatic light, whilst the component elements are all static with the exception of the specimen to be tested. In this case a plurality of foci are axially formed, each of which is related to a respective wavelength.
The corresponding signals are then laterally dispersed using the characteristics of the various wavelengths prior to reception by a detector constituted by an array of photodiodes. the photodiodes are scanned sequentially and, the maximum value of the resulting signal corresponds to the position of the surface of the specimen being tested.
Fig. 2 shows an operational diagram of the instrument embodying the invention. Light from a polychromatic light source 21 is converted by an achromatic collimator 23 into a collimated beam having parallel rays. The collimated polychromatic light beam passes through a separator 25 and a longitudinal dispersion and focussing device 27. Consequently, there is formed around the surface to be analysed of a specimen 29 a series of foci F,-Fn each relating to a respective wavelength and therefore to a respective wavelength of monochromatic light. The light reflected from the surface passes through the dispersion and focussing device 27 and is deflected by the separator 25 to an angular dispersion and focussing device 31. The angularly dispersed light is focused along an array of photodiodes 33 connected to the electronic circuit 35.The source 21 is advantageously defined by a diaphragm 37 having a slit orthogonal to the direction in which the dispersion takes place and therefore optically orthogonal to the array of photodiodes 33.
The measurement range is controlled by the longitudinal dispersion and by the focusing characteristics. The angular dispersion and the characteristics of the second focusing device 31 should be adapted to the detector used.
The sensitivity and the lateral resolution depend on the same parameters.
The longitudinal dispersion and focusing device 27, designed to provide the longitudinal dispersion and focusing effect, may comprise two separate components: a simple lens 27A acting as the dispersion device and a microscope lens 27B. Alternatively the dispersion component may be incorporated in the collimater lens 23 or in the focusing lens by means of a suitable optical unit.
The angular dispersion and focusing device 31 may also comprise two components. The first may be a prism, but may also be a grating. The second may be a corrected lens.
The light source 21 may be a white light lamp with a condenser and a slit. The slit simplifies alignment and extends the use of the device to three dimensional topography on an entire section with a matrix of photodiodes as the detector.
Suitable data processing software should be provided for use with the instrument.
The use of the signals of the various photodiodes is designed for the differential measurement of very small displacements about a given position, the latter being associated with the position of a particular distribution function. The position may be the centre line of the function or the position of a peak.

Claims (6)

1. An optical profile measuring instrument for the inspection of mechanical surfaces of specimens to be tested comprising means for producing a light beam which is concentrated on a surface of a specimen to be tested and which is returned and deflected by a reflection separator to a detector, characterized in that the light beam is polychromatic, in that the beam which is incident on the surface is dispersed longitudinally by a longitudinal dispersion device, and in that the returned beam is dispersed by an angular dispersion device and in that the detector is arranged to detect the angularly dispersed beam.
2. An optical profile measuring instrument as claimed in claim 1 characterized in that the detector is formed by an array or a matrix of photodiodes which are associated with a detection circuit.
3. An optical profile measuring instrument asclaimed in claim 1 or claim 2, characterized in that, in use, the components of the instrument are static with the exception of the specimen which is provided with relative movement.
4. An optical profile measuring instrument as claimed in any one of the preceding claims, characterized in that the means for producing the light beam include a slit and in that the detector is a photodiode matrix arranged for three dimensional detection.
5. An optical profile measuring instrument for inspection of mechanical surfaces of specimens to be tested, said instrument comprising means for producing a polychromatic light beam, means for concentrating the beam on the surface of a specimen to be tested, means for longitudinally dispersing the beam before the beam is incident on said surface, a detector, means for reflecting light returned from said surface onto the detector, and means for subjecting the returned light to angular dispersion before the returned light is incident on the detector.
6. An optical profile measuring instrument substantially as hereinbefore described with reference to and as shown in Fig. 2 of the accompanying Drawings.
GB08419614A 1983-08-02 1984-08-01 Profile measuring instrument Expired GB2144537B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT09491/83A IT1198660B (en) 1983-08-02 1983-08-02 MULTIFOCAL OPTICAL PROFILOMETER FOR DISPERSION

Publications (3)

Publication Number Publication Date
GB8419614D0 GB8419614D0 (en) 1984-09-05
GB2144537A true GB2144537A (en) 1985-03-06
GB2144537B GB2144537B (en) 1986-07-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
GB08419614A Expired GB2144537B (en) 1983-08-02 1984-08-01 Profile measuring instrument

Country Status (4)

Country Link
DE (1) DE3428593A1 (en)
FR (1) FR2550332B1 (en)
GB (1) GB2144537B (en)
IT (1) IT1198660B (en)

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0198557A1 (en) * 1985-04-15 1986-10-22 B.V. Optische Industrie "De Oude Delft" A method and system for measuring the roughness profile of a surface
GB2188144A (en) * 1986-03-20 1987-09-23 Smiths Industries Plc Optical transducers
EP0242151A1 (en) * 1986-04-11 1987-10-21 SiScan Systems, Inc. Method and apparatus for measuring linewidths by surface profiles
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
WO1988010406A1 (en) * 1987-06-26 1988-12-29 Battelle-Institut E.V. Device for measuring distances between an optical element with high chromatic aberration and an object
GB2219078A (en) * 1988-05-06 1989-11-29 Gersan Ets Identifying the position of objects or zones
AU622666B2 (en) * 1988-05-06 1992-04-16 Gersan Establishment Identifying the position of objects or zones
EP0526982A1 (en) * 1991-07-09 1993-02-10 Canon Kabushiki Kaisha Fine structure evaluation apparatus and method
WO1993011403A1 (en) * 1991-12-04 1993-06-10 Siemens Aktiengesellschaft Optical distance sensor
US5448360A (en) * 1992-12-18 1995-09-05 Kabushiki Kaisha Komatsu Seisakusho Three-dimensional image measuring device
FR2748322A1 (en) * 1996-05-02 1997-11-07 Cohen Sabban Joseph Opto-electronic instrument for digitising surface of object
FR2758076A1 (en) * 1997-01-09 1998-07-10 Sabban Joseph Cohen Opto-electronic system for three=dimension digitising of teeth dental data without contact and in real=time
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
DE19714202A1 (en) * 1997-04-07 1998-10-15 Bosch Gmbh Robert Device for the optical inspection of surfaces
WO2000008415A1 (en) * 1998-08-05 2000-02-17 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US6175754B1 (en) 1995-06-07 2001-01-16 Keravision, Inc. Method and apparatus for measuring corneal incisions
FR2805342A1 (en) * 2000-02-21 2001-08-24 Sabban Joseph Cohen Digital sensor for three dimensional measurement includes polychromatic light source and separate viewing channel examining range of images
WO2004034894A1 (en) * 2002-10-16 2004-04-29 Campbell Science Group, Inc. Cornea characteristics measuring device
FR2848664A1 (en) * 2002-12-11 2004-06-18 Micro Module Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system
AU2005234746B2 (en) * 2004-12-10 2007-09-20 Kabushiki Kaisha Toshiba Surface roughness measuring method and apparatus and turbine deterioration diagnostic method
JP2008032668A (en) * 2006-07-26 2008-02-14 Oputouea Kk Scanning type shape measuring machine
WO2008068791A1 (en) * 2006-12-06 2008-06-12 Enea-Ente Per Le Nuove Tecnologie E L'ambiente Three-dimensional optical radar method and device which use three rgb beams modulated by laser diodes, in particular for metrological and fine arts applications
DE102006007170B4 (en) * 2006-02-08 2009-06-10 Sirona Dental Systems Gmbh Method and arrangement for fast and robust chromatic confocal 3D metrology
US7769419B2 (en) 2003-10-24 2010-08-03 Lein Applied Diagnostics Limited Ocular property measuring apparatus and method therefor
DE102009001086A1 (en) 2009-02-23 2010-09-02 Sirona Dental Systems Gmbh Hand-held dental camera and method for 3D optical measurement
US8078245B2 (en) 2003-12-12 2011-12-13 Lein Applied Diagnostics Limited Extended focal region measuring apparatus and method
EP2485037A3 (en) * 2011-02-02 2012-12-26 Rolls-Royce plc An erosion testing assembly
US8696128B2 (en) 2007-07-30 2014-04-15 Lein Applied Diagnostics Optical measurement apparatus and method therefor
DE102004022454B4 (en) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Measuring device with optical stylus tip
US9026188B2 (en) 2008-02-11 2015-05-05 Lein Applied Diagnostics Measurement apparatus and method therefor
DE102016003334A1 (en) 2016-03-14 2017-09-14 Universität Stuttgart (Körperschaft Des Öffentlichen Rechts) Arrangement and method for Raman spectroscopy, in particular for tumor tissue and aortic diagnostics
JP2017181233A (en) * 2016-03-30 2017-10-05 国立大学法人東北大学 Displacement measuring apparatus and displacement measuring method

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JPH07107481B2 (en) * 1987-05-21 1995-11-15 アンリツ株式会社 Displacement measuring device
US5206699A (en) 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
DE19510535A1 (en) * 1995-03-23 1996-09-26 Siemens Ag Defect detection method for glass or plastic body
FR2846094B1 (en) * 2002-10-17 2005-09-30 Dufournier Technologies DEVICE AND METHOD FOR SELECTING TIRES BASED ON PNEUMATIC TORQUE / GROUND
EP2224204B1 (en) * 2004-12-16 2021-05-26 Werth Messtechnik GmbH Method for measuring object geometries with a coordinate measuring device
US7522292B2 (en) * 2005-03-11 2009-04-21 Carl Zeiss Smt Ag System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape
DE102006026775B4 (en) * 2006-06-07 2008-04-30 Stiftung Für Lasertechnologien In Der Medizin Und Messtechnik An Der Universität Ulm Method and device for characterizing moving surfaces

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DE1473780A1 (en) * 1965-12-30 1969-03-13 Bbc Brown Boveri & Cie Device for non-contact measurement of contours
FR1534762A (en) * 1967-05-18 1968-08-02 Cilas Optical probing method and device

Cited By (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0198557A1 (en) * 1985-04-15 1986-10-22 B.V. Optische Industrie "De Oude Delft" A method and system for measuring the roughness profile of a surface
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
GB2188144B (en) * 1986-03-20 1989-11-15 Smiths Industries Plc Optical transducers
GB2188144A (en) * 1986-03-20 1987-09-23 Smiths Industries Plc Optical transducers
JP2586902B2 (en) 1986-04-11 1997-03-05 サイスキヤン・システムズ・インク Surface profile measuring device and method
EP0242151A1 (en) * 1986-04-11 1987-10-21 SiScan Systems, Inc. Method and apparatus for measuring linewidths by surface profiles
US5165063A (en) * 1987-06-26 1992-11-17 Battelle-Institut E.V. Device for measuring distances using an optical element of large chromatic aberration
WO1988010406A1 (en) * 1987-06-26 1988-12-29 Battelle-Institut E.V. Device for measuring distances between an optical element with high chromatic aberration and an object
GB2219078A (en) * 1988-05-06 1989-11-29 Gersan Ets Identifying the position of objects or zones
AU622666B2 (en) * 1988-05-06 1992-04-16 Gersan Establishment Identifying the position of objects or zones
GB2219078B (en) * 1988-05-06 1992-08-26 Gersan Ets Identifying the position of objects or zones
EP0526982A1 (en) * 1991-07-09 1993-02-10 Canon Kabushiki Kaisha Fine structure evaluation apparatus and method
US5270794A (en) * 1991-07-09 1993-12-14 Canon Kabushiki Kaisha Fine structure evaluation apparatus and method
WO1993011403A1 (en) * 1991-12-04 1993-06-10 Siemens Aktiengesellschaft Optical distance sensor
US5448359A (en) * 1991-12-04 1995-09-05 Siemens Aktiengesellschaft Optical distance sensor
US5448360A (en) * 1992-12-18 1995-09-05 Kabushiki Kaisha Komatsu Seisakusho Three-dimensional image measuring device
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
US6175754B1 (en) 1995-06-07 2001-01-16 Keravision, Inc. Method and apparatus for measuring corneal incisions
FR2748322A1 (en) * 1996-05-02 1997-11-07 Cohen Sabban Joseph Opto-electronic instrument for digitising surface of object
FR2758076A1 (en) * 1997-01-09 1998-07-10 Sabban Joseph Cohen Opto-electronic system for three=dimension digitising of teeth dental data without contact and in real=time
DE19714202A1 (en) * 1997-04-07 1998-10-15 Bosch Gmbh Robert Device for the optical inspection of surfaces
US8310683B2 (en) 1998-08-05 2012-11-13 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US9615901B2 (en) 1998-08-05 2017-04-11 Align Technology, Inc. Method and apparatus for imaging three-dimensional structure
EP1327851A1 (en) * 1998-08-05 2003-07-16 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US6697164B1 (en) 1998-08-05 2004-02-24 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US7990548B2 (en) 1998-08-05 2011-08-02 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7944569B2 (en) 1998-08-05 2011-05-17 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US6940611B2 (en) 1998-08-05 2005-09-06 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US7092107B2 (en) 1998-08-05 2006-08-15 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7796277B2 (en) 1998-08-05 2010-09-14 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7230725B2 (en) 1998-08-05 2007-06-12 Cadent Ltd Method and apparatus for imaging three-dimensional structure
WO2000008415A1 (en) * 1998-08-05 2000-02-17 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US8638448B2 (en) 1998-08-05 2014-01-28 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US9089277B2 (en) 1998-08-05 2015-07-28 Align Technology, Inc. Method and apparatus for imaging three-dimensional structure
US7477402B2 (en) 1998-08-05 2009-01-13 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7630089B2 (en) 1998-08-05 2009-12-08 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US8638447B2 (en) 1998-08-05 2014-01-28 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
FR2805342A1 (en) * 2000-02-21 2001-08-24 Sabban Joseph Cohen Digital sensor for three dimensional measurement includes polychromatic light source and separate viewing channel examining range of images
US7501645B2 (en) 2002-10-16 2009-03-10 Campbell Science Group, Inc. Cornea characteristics measuring device
US7154111B2 (en) 2002-10-16 2006-12-26 Campbell Science Group, Inc. Cornea characteristics measuring device
WO2004034894A1 (en) * 2002-10-16 2004-04-29 Campbell Science Group, Inc. Cornea characteristics measuring device
FR2848664A1 (en) * 2002-12-11 2004-06-18 Micro Module Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system
US7769419B2 (en) 2003-10-24 2010-08-03 Lein Applied Diagnostics Limited Ocular property measuring apparatus and method therefor
US8078245B2 (en) 2003-12-12 2011-12-13 Lein Applied Diagnostics Limited Extended focal region measuring apparatus and method
DE102004022454B4 (en) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Measuring device with optical stylus tip
AU2005234746B2 (en) * 2004-12-10 2007-09-20 Kabushiki Kaisha Toshiba Surface roughness measuring method and apparatus and turbine deterioration diagnostic method
DE102006007170B4 (en) * 2006-02-08 2009-06-10 Sirona Dental Systems Gmbh Method and arrangement for fast and robust chromatic confocal 3D metrology
US7787132B2 (en) 2006-02-08 2010-08-31 Sirona Dental Systems Gmbh Method and arrangement for a rapid and robust chromatic confocal 3D measurement technique
JP2009526216A (en) * 2006-02-08 2009-07-16 シロナ・デンタル・システムズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Rapid and powerful method and apparatus for chromatic confocal 3D measurement technology
JP2008032668A (en) * 2006-07-26 2008-02-14 Oputouea Kk Scanning type shape measuring machine
WO2008068791A1 (en) * 2006-12-06 2008-06-12 Enea-Ente Per Le Nuove Tecnologie E L'ambiente Three-dimensional optical radar method and device which use three rgb beams modulated by laser diodes, in particular for metrological and fine arts applications
US8696128B2 (en) 2007-07-30 2014-04-15 Lein Applied Diagnostics Optical measurement apparatus and method therefor
US9026188B2 (en) 2008-02-11 2015-05-05 Lein Applied Diagnostics Measurement apparatus and method therefor
DE102009001086A1 (en) 2009-02-23 2010-09-02 Sirona Dental Systems Gmbh Hand-held dental camera and method for 3D optical measurement
DE102009001086B4 (en) * 2009-02-23 2014-03-27 Sirona Dental Systems Gmbh Hand-held dental camera and method for 3D optical measurement
US8577212B2 (en) 2009-02-23 2013-11-05 Sirona Dental Systems Gmbh Handheld dental camera and method for carrying out optical 3D measurement
US9010178B2 (en) 2011-02-02 2015-04-21 Rolls-Royce Plc Erosion testing assembly
EP2485037A3 (en) * 2011-02-02 2012-12-26 Rolls-Royce plc An erosion testing assembly
DE102016003334A1 (en) 2016-03-14 2017-09-14 Universität Stuttgart (Körperschaft Des Öffentlichen Rechts) Arrangement and method for Raman spectroscopy, in particular for tumor tissue and aortic diagnostics
WO2017157514A1 (en) 2016-03-14 2017-09-21 Universität Stuttgart Arrangement and method for raman spectroscopy
JP2017181233A (en) * 2016-03-30 2017-10-05 国立大学法人東北大学 Displacement measuring apparatus and displacement measuring method

Also Published As

Publication number Publication date
DE3428593C2 (en) 1988-11-17
GB8419614D0 (en) 1984-09-05
IT1198660B (en) 1988-12-21
GB2144537B (en) 1986-07-30
FR2550332B1 (en) 1988-04-01
FR2550332A1 (en) 1985-02-08
DE3428593A1 (en) 1985-02-14
IT8309491A0 (en) 1983-08-02

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