DE3345077C2 - Optoakustisches Gerät zur Konzentrationsmessung von Gasen und/oder Teilchen - Google Patents

Optoakustisches Gerät zur Konzentrationsmessung von Gasen und/oder Teilchen

Info

Publication number
DE3345077C2
DE3345077C2 DE3345077A DE3345077A DE3345077C2 DE 3345077 C2 DE3345077 C2 DE 3345077C2 DE 3345077 A DE3345077 A DE 3345077A DE 3345077 A DE3345077 A DE 3345077A DE 3345077 C2 DE3345077 C2 DE 3345077C2
Authority
DE
Germany
Prior art keywords
optoacoustic
cell
measuring
frequency
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3345077A
Other languages
German (de)
English (en)
Other versions
DE3345077A1 (de
Inventor
Ichiro Kohga Shiga Asano
Toshihiko Sakyo Kyoto Uno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of DE3345077A1 publication Critical patent/DE3345077A1/de
Application granted granted Critical
Publication of DE3345077C2 publication Critical patent/DE3345077C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G01N29/2425—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/1626—Arrangements with two photodetectors, the signals of which are compared
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4242—Modulated light, e.g. for synchronizing source and detector circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE3345077A 1983-01-08 1983-12-13 Optoakustisches Gerät zur Konzentrationsmessung von Gasen und/oder Teilchen Expired DE3345077C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58002614A JPS59145957A (ja) 1983-01-08 1983-01-08 光音響型濃度測定装置

Publications (2)

Publication Number Publication Date
DE3345077A1 DE3345077A1 (de) 1984-07-12
DE3345077C2 true DE3345077C2 (de) 1986-04-10

Family

ID=11534270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3345077A Expired DE3345077C2 (de) 1983-01-08 1983-12-13 Optoakustisches Gerät zur Konzentrationsmessung von Gasen und/oder Teilchen

Country Status (3)

Country Link
US (1) US4817413A (enExample)
JP (1) JPS59145957A (enExample)
DE (1) DE3345077C2 (enExample)

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US5129255A (en) * 1989-10-06 1992-07-14 The Aerospace Corporation Photoacoustic detection and tracking apparatus
EP0431394A3 (en) * 1989-12-07 1992-01-22 Siemens Aktiengesellschaft Method and apparatus for gas analysis
DK163537C (da) * 1990-03-05 1992-08-03 Fls Airloq As Fremgangsmaade og apparat til overfoersel af et akustisk signal i en fotoakustisk celle
EP0640822B1 (en) * 1993-08-30 1998-04-22 Millipore Investment Holdings Limited Integrity test for porous structures using acoustic emission
DE69425817D1 (de) * 1994-06-04 2000-10-12 Orbisphere Lab Vorrichtung und Verfahren zur Luminiszenzanalyse
DE69431873T2 (de) * 1994-06-04 2003-11-13 Orbisphere Laboratories Neuchatel S.A., Neuchatel Photoakustisches Analysegerät
US5596146A (en) * 1994-06-06 1997-01-21 Iowa State University Research Foundation, Inc. Photoacoustic measurement of unburned carbon in fly-ash
FR2815122B1 (fr) * 2000-10-06 2003-02-07 Univ Reims Champagne Ardenne Dispositif de detection de gaz
HUP0204193A2 (en) * 2000-10-09 2003-03-28 Siemens Building Tech Ag Optoacoustic measuring arrangement and use thereof
EP1195597A1 (de) * 2000-10-09 2002-04-10 Siemens Building Technologies AG Optoakustische Messanordnung und Verwendung der Messanordnung
US7213445B2 (en) * 2001-12-05 2007-05-08 Wayne State University Acoustic particulates density sensor
WO2003083455A1 (fr) * 2002-04-03 2003-10-09 Universite De Reims Champagne-Ardenne Dispositif de detection de gaz
US7245380B2 (en) * 2002-06-10 2007-07-17 William Marsh Rice University Quartz-enhanced photoacoustic spectroscopy
ES2305159T3 (es) * 2002-08-01 2008-11-01 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Maquina de mecanizado por laser.
EP1730496A1 (en) * 2004-03-29 2006-12-13 Noveltech Solutions OY Method and system for detecting one or more gases or gas mixtures and/or for measuring the concentration of one or more gases or gas mixtures
JP2008532036A (ja) * 2005-03-04 2008-08-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光音響分光法の検出器及びシステム
CN101163956B (zh) * 2005-04-26 2011-02-02 皇家飞利浦电子股份有限公司 用于含氮气体化合物检测的低成本设备
US20070251221A1 (en) * 2006-04-28 2007-11-01 Lueschow Kevin J System and method for monitoring a filter
WO2008026183A1 (en) * 2006-08-31 2008-03-06 Koninklijke Philips Electronics N.V. Cavity-enhanced photo acoustic trace gas detector with improved feedback loop
US8098376B2 (en) * 2006-09-07 2012-01-17 William Marsh Rice University Integrated embedded processor based laser spectroscopic sensor
DE102007014520B3 (de) * 2007-03-27 2008-10-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Detektor mit zwei Strahlengängen für das Anregungslicht
JP5358065B2 (ja) * 2007-04-18 2013-12-04 日本電信電話株式会社 成分濃度測定装置
US20100192669A1 (en) * 2007-07-06 2010-08-05 Koninklijke Philips Electronics N.V. Photo acoustic sample detector with light guide
WO2009146710A1 (en) * 2008-06-03 2009-12-10 Nkt Flexibles I/S A pipe system, a gas sensing system for a pipe system, and a method of determining a gas component in a cavity of a pipe
EP2300193B9 (de) * 2008-06-20 2015-03-18 TRUMPF Werkzeugmaschinen GmbH + Co. KG Laserbearbeitungsmaschine mit einem photoakustisch-messkopf in der eine gasatmosphäre enthaltenden strahlführung
US20110016962A1 (en) * 2009-07-21 2011-01-27 Baker Hughes Incorporated Detector for Characterizing a Fluid
JP5525808B2 (ja) * 2009-12-25 2014-06-18 株式会社堀場製作所 磁気圧力式酸素分析計
US8327686B2 (en) * 2010-03-02 2012-12-11 Li-Cor, Inc. Method and apparatus for the photo-acoustic identification and quantification of analyte species in a gaseous or liquid medium
US8746038B2 (en) * 2011-04-01 2014-06-10 Honeywell International Inc. Photoacoustic detector with acoustic and vibration noise compensation
US9243998B2 (en) * 2011-07-07 2016-01-26 Honeywell International Inc. Resonant photo acoustic system
US20130008229A1 (en) * 2011-07-07 2013-01-10 Honeywell International Inc. Resonant photo acoustic system
CN103163080B (zh) * 2011-12-14 2015-07-15 中国科学院合肥物质科学研究院 一种用于农田多种气体实时在线监测装置
WO2020051786A1 (en) 2018-09-12 2020-03-19 Shenzhen Voxtech Co., Ltd. Signal processing device having multiple acoustic-electric transducers
CN103293107A (zh) * 2013-06-28 2013-09-11 中国科学院半导体研究所 基于石英音叉增强气体光声光谱的空气湿度动态检测装置
CN103983544B (zh) * 2014-05-28 2015-12-30 南京大学 多通道气溶胶散射吸收测量仪
EP3189323A4 (en) * 2014-09-03 2018-05-16 Cooper Technologies Company Optical gas sensor
DE102015106373B4 (de) * 2015-04-24 2023-03-02 Infineon Technologies Ag Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit
FR3042866A1 (fr) * 2015-10-21 2017-04-28 Aerovia Dispositif de detection de gaz a tres forte sensibilite base sur un resonateur de helmholtz
US9696283B1 (en) * 2016-10-11 2017-07-04 Aerodyne Research, Inc. Apparatus and methods for photoacoustic measurement of light absorption of particulate and gaseous species
CN107064012B (zh) * 2017-04-11 2019-06-25 山西大学 基于拍频效应的石英增强光声光谱气体检测装置及方法
EP3652521B1 (en) * 2017-07-11 2021-04-14 Saudi Arabian Oil Company Photoacoustic gas detection
US10228322B2 (en) * 2017-07-13 2019-03-12 Cymer LLC Apparatus for and method of sensing fluorine concentration
JP6987976B2 (ja) 2017-09-25 2022-01-05 サイマー リミテッド ライアビリティ カンパニー ガス放電光源におけるフッ素検出
DE102017130988B4 (de) * 2017-12-21 2022-07-07 Infineon Technologies Ag Vorrichtungen und verfahren zur nutzung des photoakustischen effekts
EP3693725B1 (en) 2019-02-11 2021-04-07 Infineon Technologies AG Photoacoustic sensor
JP7433129B2 (ja) * 2020-05-12 2024-02-19 日立グローバルライフソリューションズ株式会社 光音響センサおよびそれを用いた空間環境制御システム

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US3513415A (en) * 1967-05-09 1970-05-19 Bulova Watch Co Inc Tuning fork filters having broadened band-pass
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US3559100A (en) * 1969-02-03 1971-01-26 Philamon Lab Inc Electromagnetically driven tuning fork
US3998557A (en) * 1974-06-03 1976-12-21 Massachusetts Institute Of Technology Gas detector
JPS5945088B2 (ja) * 1976-09-13 1984-11-02 株式会社東芝 赤外吸収検出装置
US4193008A (en) * 1977-04-18 1980-03-11 Murata Manufacturing Co., Ltd. Tuning fork formed of rolled invariable elasticity material
JPS53153832U (enExample) * 1977-05-09 1978-12-04
US4163382A (en) * 1978-04-28 1979-08-07 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for optoacoustic spectroscopy
US4269509A (en) * 1978-05-26 1981-05-26 Allied Chemical Corporation Photoacoustic Raman spectroscopy
US4200399A (en) * 1978-11-20 1980-04-29 General Motors Corporation Resonant optoacoustic spectroscopy apparatus
US4255964A (en) * 1978-11-30 1981-03-17 The Garrett Corporation Fluid monitor
US4371785A (en) * 1980-08-14 1983-02-01 Panametrics, Inc. Method and apparatus for detection and analysis of fluids
FI812870L (fi) * 1980-12-16 1982-06-17 Econics Corp Stoerningsfilter foer foerbraenningsgasanalysator
JPS595939A (ja) * 1982-07-03 1984-01-12 Horiba Ltd パ−テイキユレ−ト連続測定装置
US4489239A (en) * 1982-09-24 1984-12-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Portable remote laser sensor for methane leak detection
US4480191A (en) * 1982-09-27 1984-10-30 Sun Electric Corporation Automatic gain control for an infrared source of an automotive emissions analyzer

Also Published As

Publication number Publication date
US4817413A (en) 1989-04-04
JPH0441297B2 (enExample) 1992-07-07
DE3345077A1 (de) 1984-07-12
JPS59145957A (ja) 1984-08-21

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee