DE3319328C2 - - Google Patents
Info
- Publication number
- DE3319328C2 DE3319328C2 DE19833319328 DE3319328A DE3319328C2 DE 3319328 C2 DE3319328 C2 DE 3319328C2 DE 19833319328 DE19833319328 DE 19833319328 DE 3319328 A DE3319328 A DE 3319328A DE 3319328 C2 DE3319328 C2 DE 3319328C2
- Authority
- DE
- Germany
- Prior art keywords
- plate
- intermediate plate
- base plate
- carrier
- outer ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38353382A | 1982-06-01 | 1982-06-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3319328A1 DE3319328A1 (de) | 1983-12-08 |
| DE3319328C2 true DE3319328C2 (ja) | 1988-12-22 |
Family
ID=23513596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833319328 Granted DE3319328A1 (de) | 1982-06-01 | 1983-05-27 | Vorrichtung zur feinbearbeitung zerbrechlicher werkstuecke |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS591158A (ja) |
| DE (1) | DE3319328A1 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61241059A (ja) * | 1985-04-16 | 1986-10-27 | Toshiba Corp | 研磨装置 |
| US6083083A (en) * | 1994-04-22 | 2000-07-04 | Kabushiki Kaisha Toshiba | Separation type grinding surface plate and grinding apparatus using same |
| KR980012048A (ko) * | 1996-07-12 | 1998-04-30 | 조셉제이. 스위니 | 화학 기계식 폴리싱 장치와 이러한 화학 기계식 폴리싱 장치내에서 폴리싱 패드를 플래튼에 대해 고정시키는 방법 |
| US6379221B1 (en) | 1996-12-31 | 2002-04-30 | Applied Materials, Inc. | Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1355345A (en) * | 1919-03-17 | 1920-10-12 | William A Lorenz | Disk grinding-machine |
| DE1982787U (de) * | 1968-01-13 | 1968-04-04 | Albert Fezer | Vorrichtung zum halten von insbesondere duennwandigen werkstuecken, z. b. duennen blechen, folien od. dgl. |
| DE1729540A1 (de) * | 1968-01-15 | 1971-06-09 | Lissmann Alkor Werk | Verfahren und Einrichtung zum Aufbringen von Flaechenmustern auf Kunststoffhohlkoerper |
| US3562964A (en) * | 1970-02-24 | 1971-02-16 | Spitfire Tool & Machine Co Inc | Lapping machine |
| DE2644054A1 (de) * | 1976-09-30 | 1978-04-06 | Harro Hoefliger | Geraet zum reinigen und polieren von schuettgut, insbesondere von arzneimittel enthaltenden hartgelatinekapseln oder pillen |
-
1983
- 1983-05-27 DE DE19833319328 patent/DE3319328A1/de active Granted
- 1983-06-01 JP JP58097760A patent/JPS591158A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3319328A1 (de) | 1983-12-08 |
| JPS591158A (ja) | 1984-01-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |