DE3319328C2 - - Google Patents

Info

Publication number
DE3319328C2
DE3319328C2 DE19833319328 DE3319328A DE3319328C2 DE 3319328 C2 DE3319328 C2 DE 3319328C2 DE 19833319328 DE19833319328 DE 19833319328 DE 3319328 A DE3319328 A DE 3319328A DE 3319328 C2 DE3319328 C2 DE 3319328C2
Authority
DE
Germany
Prior art keywords
plate
intermediate plate
base plate
carrier
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19833319328
Other languages
German (de)
English (en)
Other versions
DE3319328A1 (de
Inventor
Lawrence Mount Prospect Ill. Us Day
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPX Corp
Original Assignee
General Signal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Signal Corp filed Critical General Signal Corp
Publication of DE3319328A1 publication Critical patent/DE3319328A1/de
Application granted granted Critical
Publication of DE3319328C2 publication Critical patent/DE3319328C2/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
DE19833319328 1982-06-01 1983-05-27 Vorrichtung zur feinbearbeitung zerbrechlicher werkstuecke Granted DE3319328A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38353382A 1982-06-01 1982-06-01

Publications (2)

Publication Number Publication Date
DE3319328A1 DE3319328A1 (de) 1983-12-08
DE3319328C2 true DE3319328C2 (fr) 1988-12-22

Family

ID=23513596

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833319328 Granted DE3319328A1 (de) 1982-06-01 1983-05-27 Vorrichtung zur feinbearbeitung zerbrechlicher werkstuecke

Country Status (2)

Country Link
JP (1) JPS591158A (fr)
DE (1) DE3319328A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61241059A (ja) * 1985-04-16 1986-10-27 Toshiba Corp 研磨装置
US6083083A (en) * 1994-04-22 2000-07-04 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same
EP0818272A1 (fr) * 1996-07-12 1998-01-14 Applied Materials, Inc. Rétention d'un tampon de polissage sur un plateau dans un système de polissage mécano-chimique
US6379221B1 (en) 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1355345A (en) * 1919-03-17 1920-10-12 William A Lorenz Disk grinding-machine
DE1982787U (de) * 1968-01-13 1968-04-04 Albert Fezer Vorrichtung zum halten von insbesondere duennwandigen werkstuecken, z. b. duennen blechen, folien od. dgl.
DE1729540A1 (de) * 1968-01-15 1971-06-09 Lissmann Alkor Werk Verfahren und Einrichtung zum Aufbringen von Flaechenmustern auf Kunststoffhohlkoerper
US3562964A (en) * 1970-02-24 1971-02-16 Spitfire Tool & Machine Co Inc Lapping machine
DE2644054A1 (de) * 1976-09-30 1978-04-06 Harro Hoefliger Geraet zum reinigen und polieren von schuettgut, insbesondere von arzneimittel enthaltenden hartgelatinekapseln oder pillen

Also Published As

Publication number Publication date
JPS591158A (ja) 1984-01-06
DE3319328A1 (de) 1983-12-08

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee