DE3280011D1 - High electron mobility semiconductor device and process for producing the same - Google Patents

High electron mobility semiconductor device and process for producing the same

Info

Publication number
DE3280011D1
DE3280011D1 DE8282302106T DE3280011T DE3280011D1 DE 3280011 D1 DE3280011 D1 DE 3280011D1 DE 8282302106 T DE8282302106 T DE 8282302106T DE 3280011 T DE3280011 T DE 3280011T DE 3280011 D1 DE3280011 D1 DE 3280011D1
Authority
DE
Germany
Prior art keywords
producing
semiconductor device
same
electron mobility
high electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282302106T
Other languages
German (de)
English (en)
Inventor
Takashi Mimura
Satoshi Hiyamizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3280011D1 publication Critical patent/DE3280011D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/113—Isolations within a component, i.e. internal isolations
    • H10D62/115—Dielectric isolations, e.g. air gaps
    • H10D62/116—Dielectric isolations, e.g. air gaps adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/472—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having lower bandgap active layer formed on top of wider bandgap layer, e.g. inverted HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
DE8282302106T 1981-04-23 1982-04-23 High electron mobility semiconductor device and process for producing the same Expired DE3280011D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56061702A JPS57176772A (en) 1981-04-23 1981-04-23 Semiconductor device and manufacture thereof

Publications (1)

Publication Number Publication Date
DE3280011D1 true DE3280011D1 (en) 1989-12-07

Family

ID=13178831

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282302106T Expired DE3280011D1 (en) 1981-04-23 1982-04-23 High electron mobility semiconductor device and process for producing the same

Country Status (4)

Country Link
US (1) US4714948A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0064829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS57176772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3280011D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2537781B1 (fr) * 1982-12-14 1986-05-30 Thomson Csf Transistor a effet de champ, fonctionnant en regime d'accumulation par gaz d'electrons
DE3629685C2 (de) * 1986-09-01 2000-08-10 Daimler Chrysler Ag Photoempfänger
DE3629681A1 (de) * 1986-09-01 1988-03-10 Licentia Gmbh Photoempfaenger
JPH07120807B2 (ja) * 1986-12-20 1995-12-20 富士通株式会社 定電流半導体装置
DE3644410A1 (de) * 1986-12-24 1988-07-07 Licentia Gmbh Photoempfaenger
FR2611305B1 (fr) * 1987-02-20 1990-04-27 Labo Electronique Physique Circuit comportant des lignes conductrices pour le transfert de signaux rapides
US5227644A (en) * 1989-07-06 1993-07-13 Nec Corporation Heterojunction field effect transistor with improve carrier density and mobility
JPH03145139A (ja) * 1989-10-30 1991-06-20 Mitsubishi Electric Corp 電界効果トランジスタとその製造方法
US5242846A (en) * 1989-10-30 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a junction field effect transistor
GB2279806B (en) * 1993-07-05 1997-05-21 Toshiba Cambridge Res Center Semiconductor device and method of making same
US6444552B1 (en) * 1999-07-15 2002-09-03 Hrl Laboratories, Llc Method of reducing the conductivity of a semiconductor and devices made thereby
CA2456662A1 (en) * 2001-08-07 2003-02-20 Jan Kuzmik High electron mobility devices
JP2005129696A (ja) * 2003-10-23 2005-05-19 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
US7405430B2 (en) * 2005-06-10 2008-07-29 Cree, Inc. Highly uniform group III nitride epitaxial layers on 100 millimeter diameter silicon carbide substrates
DE102008021674A1 (de) * 2008-03-31 2009-10-01 Osram Opto Semiconductors Gmbh Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelements
KR101626463B1 (ko) * 2010-02-26 2016-06-02 삼성전자주식회사 고 전자 이동도 트랜지스터의 제조방법
KR102238547B1 (ko) * 2014-10-30 2021-04-09 인텔 코포레이션 질화 갈륨 트랜지스터에서 2d 전자 가스에 대한 낮은 접촉 저항을 위한 소스/드레인 재성장
CN108649071B (zh) * 2018-05-17 2019-03-19 苏州汉骅半导体有限公司 半导体器件及其制造方法
JP2021111666A (ja) 2020-01-08 2021-08-02 ソニーセミコンダクタソリューションズ株式会社 化合物半導体装置及び化合物半導体装置の製造方法
CN112380659A (zh) * 2020-11-11 2021-02-19 天津大学 基于新型电阻模型的GaN HEMT等效电路拓扑结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL163372C (nl) * 1967-11-14 1980-08-15 Sony Corp Halfgeleiderinrichting, omvattende een monokristallijn halfgeleiderlichaam met een door aangroeien vanuit de dampfase verkregen halfgeleidende laag, die een gebied van monokristallijn materiaal en een gebied van polykristallijn materiaal omvat.
US3956033A (en) * 1974-01-03 1976-05-11 Motorola, Inc. Method of fabricating an integrated semiconductor transistor structure with epitaxial contact to the buried sub-collector
US4163237A (en) * 1978-04-24 1979-07-31 Bell Telephone Laboratories, Incorporated High mobility multilayered heterojunction devices employing modulated doping
US4291327A (en) * 1978-08-28 1981-09-22 Bell Telephone Laboratories, Incorporated MOS Devices
DE2913068A1 (de) * 1979-04-02 1980-10-23 Max Planck Gesellschaft Heterostruktur-halbleiterkoerper und verwendung hierfuer
EP0033037B1 (en) * 1979-12-28 1990-03-21 Fujitsu Limited Heterojunction semiconductor devices

Also Published As

Publication number Publication date
EP0064829A3 (en) 1985-09-25
EP0064829A2 (en) 1982-11-17
JPS57176772A (en) 1982-10-30
JPS6353710B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-25
EP0064829B1 (en) 1989-11-02
US4714948A (en) 1987-12-22

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee