DE3170781D1 - Method for regulating concentration and distribution of oxygen in czochralski grown silicon - Google Patents

Method for regulating concentration and distribution of oxygen in czochralski grown silicon

Info

Publication number
DE3170781D1
DE3170781D1 DE8181306131T DE3170781T DE3170781D1 DE 3170781 D1 DE3170781 D1 DE 3170781D1 DE 8181306131 T DE8181306131 T DE 8181306131T DE 3170781 T DE3170781 T DE 3170781T DE 3170781 D1 DE3170781 D1 DE 3170781D1
Authority
DE
Germany
Prior art keywords
oxygen
distribution
grown silicon
czochralski grown
regulating concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181306131T
Other languages
German (de)
English (en)
Inventor
Roger Allen Frederick
Jerry Wofford Moody
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Application granted granted Critical
Publication of DE3170781D1 publication Critical patent/DE3170781D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8181306131T 1980-12-29 1981-12-24 Method for regulating concentration and distribution of oxygen in czochralski grown silicon Expired DE3170781D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22092480A 1980-12-29 1980-12-29

Publications (1)

Publication Number Publication Date
DE3170781D1 true DE3170781D1 (en) 1985-07-04

Family

ID=22825580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181306131T Expired DE3170781D1 (en) 1980-12-29 1981-12-24 Method for regulating concentration and distribution of oxygen in czochralski grown silicon

Country Status (6)

Country Link
EP (1) EP0055619B1 (enrdf_load_stackoverflow)
JP (2) JPS57135796A (enrdf_load_stackoverflow)
KR (1) KR850001941B1 (enrdf_load_stackoverflow)
CA (1) CA1191075A (enrdf_load_stackoverflow)
DE (1) DE3170781D1 (enrdf_load_stackoverflow)
MX (1) MX159794A (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1191075A (en) * 1980-12-29 1985-07-30 Roger A. Frederick Method for regulating concentration and distribution of oxygen in czochralski grown silicon
US4511428A (en) * 1982-07-09 1985-04-16 International Business Machines Corporation Method of controlling oxygen content and distribution in grown silicon crystals
JPS61151088A (ja) * 1984-12-24 1986-07-09 Toshiba Corp 単結晶の製造方法
JPS62105998A (ja) * 1985-10-31 1987-05-16 Sony Corp シリコン基板の製法
JP2579778B2 (ja) * 1987-10-01 1997-02-12 住友シチックス株式会社 半導体用単結晶の製造方法
JP2520926B2 (ja) * 1987-12-16 1996-07-31 三菱マテリアル株式会社 シリコン単結晶中の酸素濃度制御方法
JPH02263793A (ja) * 1989-04-05 1990-10-26 Nippon Steel Corp 酸化誘起積層欠陥の発生し難いシリコン単結晶及びその製造方法
US5215620A (en) * 1989-09-19 1993-06-01 Shin-Etsu Handotai Co. Ltd. Method for pulling a silicon single crystal by imposing a periodic rotation rate on a constant rotation rate
JP2813592B2 (ja) * 1989-09-29 1998-10-22 住友シチックス株式会社 単結晶製造方法
JPH0699225B2 (ja) * 1989-10-23 1994-12-07 信越半導体株式会社 シリコン単結晶引上げ方法
JPH0532480A (ja) * 1991-02-20 1993-02-09 Sumitomo Metal Ind Ltd 結晶成長方法
US5178720A (en) * 1991-08-14 1993-01-12 Memc Electronic Materials, Inc. Method for controlling oxygen content of silicon crystals using a combination of cusp magnetic field and crystal and crucible rotation rates
JPH05194075A (ja) * 1992-01-24 1993-08-03 Nec Corp 単結晶育成法
US5593498A (en) * 1995-06-09 1997-01-14 Memc Electronic Materials, Inc. Apparatus for rotating a crucible of a crystal pulling machine
JP3927786B2 (ja) * 2001-10-30 2007-06-13 シルトロニック・ジャパン株式会社 単結晶の製造方法
KR101022918B1 (ko) * 2009-02-18 2011-03-16 주식회사 엘지실트론 무네킹 공정을 이용한 단결정 제조 방법
CN113789567B (zh) * 2021-09-17 2022-11-25 安徽光智科技有限公司 一种大尺寸锗单晶生长方法
CN115976628A (zh) * 2022-12-06 2023-04-18 隆基绿能科技股份有限公司 一种晶体生长方法及晶体硅

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4040895A (en) * 1975-10-22 1977-08-09 International Business Machines Corporation Control of oxygen in silicon crystals
DE2758888C2 (de) * 1977-12-30 1983-09-22 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Herstellung reinster Siliciumeinkristalle
JPS55140795A (en) * 1979-04-19 1980-11-04 Nippon Telegr & Teleph Corp <Ntt> Automatic crystal growing device
EP0042901B1 (fr) * 1980-06-26 1984-10-31 International Business Machines Corporation Procédé pour contrôler la teneur en oxygène des barreaux de silicium tirés selon la méthode de Czochralski
CA1191075A (en) * 1980-12-29 1985-07-30 Roger A. Frederick Method for regulating concentration and distribution of oxygen in czochralski grown silicon

Also Published As

Publication number Publication date
KR830008552A (ko) 1983-12-10
MX159794A (es) 1989-08-28
JP2705867B2 (ja) 1998-01-28
CA1191075A (en) 1985-07-30
JPH0321515B2 (enrdf_load_stackoverflow) 1991-03-22
KR850001941B1 (ko) 1985-12-31
JPH05194083A (ja) 1993-08-03
EP0055619B1 (en) 1985-05-29
EP0055619A1 (en) 1982-07-07
JPS57135796A (en) 1982-08-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MEMC ELECTRONIC MATERIALS, INC., ST. PETERS, MO.,

8328 Change in the person/name/address of the agent

Free format text: TER MEER, N., DIPL.-CHEM. DR.RER.NAT. MUELLER, F., DIPL.-ING., 8000 MUENCHEN STEINMEISTER, H., DIPL.-ING. WIEBUSCH, M., 4800 BIELEFELD URNER, P., DIPL.-PHYS. ING.(GRAD.), PAT.-ANWAELTE, 8000 MUENCHEN