DE3134342A1 - Elektronischer kapazitiver messkopf fuer distanzmessungen - Google Patents
Elektronischer kapazitiver messkopf fuer distanzmessungenInfo
- Publication number
- DE3134342A1 DE3134342A1 DE19813134342 DE3134342A DE3134342A1 DE 3134342 A1 DE3134342 A1 DE 3134342A1 DE 19813134342 DE19813134342 DE 19813134342 DE 3134342 A DE3134342 A DE 3134342A DE 3134342 A1 DE3134342 A1 DE 3134342A1
- Authority
- DE
- Germany
- Prior art keywords
- measuring head
- electrode
- electrode arrangement
- head according
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims description 7
- 239000011810 insulating material Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 230000006641 stabilisation Effects 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813134342 DE3134342A1 (de) | 1981-08-31 | 1981-08-31 | Elektronischer kapazitiver messkopf fuer distanzmessungen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813134342 DE3134342A1 (de) | 1981-08-31 | 1981-08-31 | Elektronischer kapazitiver messkopf fuer distanzmessungen |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3134342A1 true DE3134342A1 (de) | 1983-03-10 |
DE3134342C2 DE3134342C2 (enrdf_load_stackoverflow) | 1989-12-07 |
Family
ID=6140496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19813134342 Granted DE3134342A1 (de) | 1981-08-31 | 1981-08-31 | Elektronischer kapazitiver messkopf fuer distanzmessungen |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3134342A1 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5412327A (en) * | 1992-09-22 | 1995-05-02 | Meinen; Michael | Distance sensor utilizing a bridge circuit incorporating variable capacitances |
WO2002031433A1 (de) * | 2000-10-09 | 2002-04-18 | Micro-Epsilon Messtechnik Gmbh & Co.Kg | Kombination von zwei sensoren, z.b. von einem kapazitiven sensor und einem auf wirbelstrom- oder ultraschallbasis arbeitendem abstandssensor, in einem gehäuse |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3333148A1 (de) * | 1983-09-14 | 1985-03-28 | Ingenieure Block + Seichter Inh.Klaus Seichter, 3000 Hannover | Einrichung zur positionierung eines optischen sensors |
DE19634782A1 (de) * | 1996-08-28 | 1998-03-05 | Anton Koukal | Regelungseinrichtung zur selbsttätigen Konstanthaltung des Abstandes eines Werkzeugs von einem Werkstück |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2258691A1 (de) * | 1971-12-09 | 1973-06-14 | Ade Corp | Geraet zur direkten anzeige von kapazitiv gemessenen abmassen |
DE2137545B2 (de) * | 1970-08-17 | 1979-05-17 | Ade Corp., Watertown, Mass. (V.St.A.) | KapazitStsmeßsonde |
DE2711925B2 (de) * | 1976-03-19 | 1980-09-18 | Rca Corp., New York, N.Y. (V.St.A.) | Lageregeleinrichtung |
-
1981
- 1981-08-31 DE DE19813134342 patent/DE3134342A1/de active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2137545B2 (de) * | 1970-08-17 | 1979-05-17 | Ade Corp., Watertown, Mass. (V.St.A.) | KapazitStsmeßsonde |
DE2258691A1 (de) * | 1971-12-09 | 1973-06-14 | Ade Corp | Geraet zur direkten anzeige von kapazitiv gemessenen abmassen |
DE2711925B2 (de) * | 1976-03-19 | 1980-09-18 | Rca Corp., New York, N.Y. (V.St.A.) | Lageregeleinrichtung |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5412327A (en) * | 1992-09-22 | 1995-05-02 | Meinen; Michael | Distance sensor utilizing a bridge circuit incorporating variable capacitances |
WO2002031433A1 (de) * | 2000-10-09 | 2002-04-18 | Micro-Epsilon Messtechnik Gmbh & Co.Kg | Kombination von zwei sensoren, z.b. von einem kapazitiven sensor und einem auf wirbelstrom- oder ultraschallbasis arbeitendem abstandssensor, in einem gehäuse |
US6822442B2 (en) | 2000-10-09 | 2004-11-23 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensor arrangement for detecting properties of a target |
Also Published As
Publication number | Publication date |
---|---|
DE3134342C2 (enrdf_load_stackoverflow) | 1989-12-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3231995C2 (de) | Verfahren und Anordnung zum Messen der Verschmutzung eines kapazitiven Taupunktsensors | |
EP0451701B1 (de) | Verfahren zur kontaktlosen Messung des elektrischen Widerstands eines Untersuchungsmaterials | |
DE2539212C2 (de) | Einrichtung zur kapazitiven Längen- oder Dickenmessung | |
DE10151703B4 (de) | Vorrichtung und Verfahren zum Erfassen der Beschaffenheit einer Tonerteilchenschicht in einem Drucker oder Kopierer | |
DE2454469C3 (de) | Induktiver Durchflußmesser | |
EP0478958B1 (de) | Kapazitiver Sensor zur Messung eines Kraftstoffwandfilms | |
DE19643698C2 (de) | Vorrichtung zur Abschirmung von für kapazitive Messungen verwendeten Leiterbahnen eines Kochfeldes | |
EP0357733A1 (de) | Kapazitiver näherungsgeber | |
DE3438332A1 (de) | Druckmessvorrichtung | |
DE2344008C3 (de) | Meßgerät zum Messen von Veränderungen der physikalischen Eigenschaften eines magnetisch oder elektrisch leitenden Untersuchungsobjekts | |
DE19937387C1 (de) | Vorrichtung zur Überwachung eines Auftrags eines flüssigen bis pastenförmigen Mediums auf ein Substrat | |
DE10033620A1 (de) | Vorrichtung und Verfahren zur Ermittlung der Feuchte in Gasen | |
WO2020109565A1 (de) | Verfahren und sensor zum bestimmen eines die impedanz einer suspension anzeigenden werts | |
DE2405651B2 (de) | Pyrometer | |
DE3134342A1 (de) | Elektronischer kapazitiver messkopf fuer distanzmessungen | |
DE3323798C2 (enrdf_load_stackoverflow) | ||
DE10028486A1 (de) | Sensor für die Kantenposition eines elektrisch leitenden Materials | |
DE10027507C1 (de) | Schaltungsanordnung zur Erfassung von Kapazitätsänderungen | |
DE2341088A1 (de) | Verfahren zum messen der magnetischen oder elektrischen eigenschaften eines ferromagnetischen materials | |
DE2420120B2 (de) | Messvorrichtung | |
DE4413840A1 (de) | Vorrichtung zur berührungslosen Messung an einem Objekt | |
DE2441473C3 (de) | Verfahren und Vorrichtung zum Messen des Feuchte- und/oder Füllstoffgehaltes bzw. der Dicke von Bahnen | |
DE3824948C2 (enrdf_load_stackoverflow) | ||
DE102024110653B3 (de) | Messsystem und Verfahren zur Charakterisierung einer mehrschichtigen Struktur mit schichtweise unterschiedlichen ohmschen Eigenschaften, Sensormodul für ein Messsystem, Fertigungsanlage für eine mehrschichtige Struktur mit schichtweise unterschiedlichen ohmschen Eigenschaften | |
DE4040332A1 (de) | Verfahren und sensor zur messung der elektrolytischen leitfaehigkeit von fluessigkeiten |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8127 | New person/name/address of the applicant |
Owner name: SEICHTER GMBH, 3000 HANNOVER, DE |
|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |