DE3134342A1 - Electronic capacitive measuring head for distance measurements - Google Patents
Electronic capacitive measuring head for distance measurementsInfo
- Publication number
- DE3134342A1 DE3134342A1 DE19813134342 DE3134342A DE3134342A1 DE 3134342 A1 DE3134342 A1 DE 3134342A1 DE 19813134342 DE19813134342 DE 19813134342 DE 3134342 A DE3134342 A DE 3134342A DE 3134342 A1 DE3134342 A1 DE 3134342A1
- Authority
- DE
- Germany
- Prior art keywords
- measuring head
- electrode
- electrode arrangement
- head according
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Elektronischer kapazitiver MesskopfElectronic capacitive measuring head
Die Erfindung bezieht sich auf einen kapazitiven Messkopf für Distanzmessungen. Für den Aufbau eines kapazitiven tlesskopfes eignet sich eine Brueckenschaltung, in der eine der Brückenelemente die veränderliche Kapazität darstellt.The invention relates to a capacitive measuring head for distance measurements. A bridge circuit is suitable for setting up a capacitive tless head, in which one of the bridge elements represents the variable capacitance.
Rls Sensor wird beispielsweise eine Elektrodenanordnung it zwei in einer Ebene liegenden Elektroden verwendet, die an den Gegenstand, zu der die Distanz gemessen werden soll, herangefuehrt wird.The sensor is, for example, an electrode arrangement with two inches A plane lying electrodes are used, which are attached to the object to which the distance is to be measured, is brought up.
Die Kapazität der Elektrodenanordnung ist abhängig von dem Medium, das sich in der Naehe der Eleanodnung befindet. Wenn die Ele kt rodenanordnung sich nicht in der Naehe eines Gegenstandes befindet, so ist die Luft nit ihrer relativ geringen Dielektrizitätskonstanten massgebend für die Kapazität der Elektrodenanordnung. Wird dagegen ein Gegenstand, bzw. eine Fläche mit höherer Dielektrizitätskonstante in die Nähe der Elektrodenanordnung gebracht, so steigt die Kapazität und die Brueckenanordnung wird eserstimmt. Von dieser Verstimmung kann ein Messsignal abgeleitet werden.The capacity of the electrode arrangement depends on the medium, which is close to the Eleanodnung. When the electrode assembly is is not in the vicinity of an object, the air is relative with it low dielectric constant decisive for the capacitance of the electrode arrangement. In contrast, it becomes an object or a surface with a higher dielectric constant brought into the vicinity of the electrode arrangement, the capacitance and the bridge arrangement increases it will be true. A measurement signal can be derived from this detuning.
Oer Erfindung liegt die Aufgabe zugrunde, eine Elektrodenanordnung zu schaffen, die gegenueber Temperaturschwankungen unempfindlich ist.The invention is based on the object of an electrode arrangement to create that is insensitive to temperature fluctuations.
Die genannte Aufgabe wird durch die in Patentanspruch 1 angegebene Erfindung gelöst.The stated object is given by that specified in claim 1 Invention solved.
Weiter soll eine Elektrodenanordnung gefunden werden, bei der der Bereich, in de die Anordnung bei der Annaeherung eines Gegenstandes empfindlich ist, genau definiert ist.Furthermore, an electrode arrangement is to be found in which the Area in which the arrangement is sensitive when an object is approached is, is well defined.
Bei der erfindungsgemässen Elektrodenanordnung sind die Elektroden durch die Metollsohicht einer mit Metall besichteten Isolierstoffplatte gebildet. Neben der Kapazität, die sich im angrenzenden Luftraum zwischen den Elektroden befindet, liegt auch eine Kapazttaet zwischen den Elektroden im angrenzenden Isolierstoff. Diese Kapazitäten in den angrenzenden Bereichen unterliegen temperaturbedingten Schwankungen. Diese werden durch folgende Massnahme in der Brückenschaltung kompensiert: Im Messkopf ist eine zu der Messelektrodenanordnung gleichartige, zweite Elektrodenanordnung vorgesehen, die in einem anderen Brückenzweig der Brückenschaltung angeschlossen ist, und zwar so, ds eine Verschiebung des Bruecken-Arbeitspunktes infloge Kapazitätsaenderungen in der ersten, als Messensor benutzten Elektrodenanordnung kompensiert wird.In the electrode arrangement according to the invention, the electrodes are formed by the Metollsohicht a coated with metal insulating plate. In addition to the capacitance, which is located in the adjacent air space between the electrodes, there is also a capacitance between the electrodes in the adjacent insulating material. These capacities in the adjacent areas are subject to temperature-related factors Fluctuations. These are compensated by the following measure in the bridge circuit: In the measuring head there is a second electrode arrangement which is similar to the measuring electrode arrangement provided, which is connected in another branch of the bridge circuit is, in such a way, ds a shift of the bridge operating point due to changes in capacity is compensated in the first electrode arrangement used as a measuring sensor.
I Folgenden wird die Mess-Elektrodenanordnung "äussere Elektrode" und die zur Kompensation dienende Elektrodenanordnung innere Elektrode" genannt.I The following is the measurement electrode arrangement "outer electrode" and the electrode arrangement serving for compensation is called the inner electrode ".
Es ist möglich, fuer die innere und die aessere Elektrode getrennte Isol ierstoffplat ten zu verwenden.It is possible for the inner and the outer electrode separate Use insulating plates.
Gemäss einen besonders vorteilhaften Ausfuehrungsbeispiel der Erfindung ist die innere Elektrode auf der Rueckseite der Isolierstoffplatte der aeusseren Elektrode vorgesehen.According to a particularly advantageous embodiment of the invention is the inner electrode on the back of the insulating plate of the outer Electrode provided.
Es wird nit Vorteil eine doppelseitig netallbeschichtete Isolierstoffplatte verwendet, bei der die Elektroden durch einen Ätzvorgang freigeätzt werden.It is not advantageous to have an insulating plate coated with metal on both sides used, in which the electrodes are etched free by an etching process.
Danit die Elektroden sich nicht gegenseitig beeinflussen, werden diese nit Vorteil geg.eneinander versetzt angeordnet.So that the electrodes do not influence each other, they will staggered in relation to each other with advantage.
IM Folgenden wird die Erfindung anhand eines Ausführungsbeispiels, das in der Zeichnung dargestellt ist, erläutert.In the following, the invention is based on an exemplary embodiment, which is shown in the drawing, explained.
Es zeigen Fig.1 das Schaltbild eines kapazitiven Messkopfes mit einer Brückenschaltung, Fig. 2 eine mögliche Elektrodenanordnung und Fig. 3 eine Elektrodenanordnung mit dem erfindungsgemässen Merkmalen.1 shows the circuit diagram of a capacitive measuring head with a Bridge circuit, FIG. 2 shows a possible electrode arrangement and FIG. 3 shows an electrode arrangement with the features according to the invention.
In der Schaltung in Fig. 1 ist der Ausgang eines Wechselspannungsgenerators 1 ueber einen Koppelkondensator 2 an eine Brueckenschaltung aus den Brueckenzweigen 3 bis 7 angekoppelt.In the circuit in Fig. 1, the output is an alternating voltage generator 1 via a coupling capacitor 2 to a bridge circuit from the bridge branches 3 to 7 coupled.
Die Wechselspannung wird an oberen Ende der Brückenschaltung eingespeist. Der untere Punkt der Brueckenschaltung ist auf Massepotential er Schaltung gelegt.The alternating voltage is fed in at the upper end of the bridge circuit. The lower point of the bridge circuit is connected to ground potential of the circuit.
Die beiden Zweige im oberen Teil der Erueckenschaltung sind durch Kondensatoren 3 und 4 nit fester Kapazität gebildet.The two branches in the upper part of the back circuit are through Capacitors 3 and 4 formed with fixed capacitance.
In linken Zweig des unteren Teils der Brueckenschaltung liegt die veraenderliche Kapazitaet 5 der Anordnung und parallel dazu eine Kapazitaet 6.In the left branch of the lower part of the bridge circuit is the variable capacity 5 of the arrangement and parallel to it a capacity 6.
In benachbarten Zweig des unteren Teils liegt eine Kapazität 7, die zun Abgleich der Bruecke einstellbar ist.In the adjacent branch of the lower part there is a capacitance 7, which to balance the bridge is adjustable.
An sogenannten Null zweig der Brueckenschaltung sind die zueinander invertierten Eingänge eines Differenzverstärkers 8 angeschlossen. In \erstaerker 8 wird die an Nulizweig anliegende Spannung verstaerkt.At the so-called zero branch of the bridge circuit they are to each other inverted inputs of a differential amplifier 8 connected. In \ stronger 8 the voltage applied to the zero branch is amplified.
Das verstärkte Signal wird einer Gleichrichterschaltung 9 zugeführt, in der aus den Wechselspannungssignal ein Gleichspannungssignal mit zu der Verst innung der Brücke stetig sich aendernder Groesse gewonnen wird.The amplified signal is fed to a rectifier circuit 9, in which from the AC voltage signal a DC voltage signal with to the amplifier Guild of the bridge is constantly changing Greatness is gained.
Dieses Signal steht an Ausgang 10 zur Verfügung.This signal is available at output 10.
Die Kapazitaeten 5 und 6 in Fig. 1 koennen durch eine Elektrodenanordnung realisiert werden, die in Fig.2 dargestellt ist.The capacities 5 and 6 in Fig. 1 can be through an electrode arrangement be realized, which is shown in Fig.2.
Eine metallbesichtete Isolierstoffplatte 11, z.B.A metal-lined insulating sheet 11, e.g.
eine kupferkaschierte Epoxydharzplatte, wird so gesetzt, dass sich die in Fig. 2 dargestellte Anordnung nit einer grossflächigen Masseelektrode 12 und einer Sensorelektrode 13 ergibt, die gegeneinander isoliert sind.a copper-clad epoxy resin plate is placed in such a way that the arrangement shown in FIG. 2 with a large-area ground electrode 12 and a sensor electrode 13 results, which are insulated from each other.
Die Masseelektrode 12 ungibt die Sensorelektrode 13 allseitig.The ground electrode 12 gives the sensor electrode 13 on all sides.
Die Anschlüsse der Elektroden 12 und 13 sind nach hinten an Punkten 14 durch die Isolierstoffplatte 11 hindurch in das Gehaeuseinnere des Messkopfes gefuehrt.The connections of the electrodes 12 and 13 are at points to the rear 14 through the insulating plate 11 into the interior of the housing of the measuring head guided.
Bi dieser Anordnung ist der Messkopf nur in Bereich der Fläche der Sensorelektrode empfindlich, und zwar aus folgenden Grund: Die Masseelektrode ist relativ zur Sensorelektrode sehr grossflächig. Daher ist die Kapazität der Masseelektrode zu einem Messobjekt gross, die der Sensorelektrode dagegen klein.With this arrangement, the measuring head is only in the area of the Sensor electrode sensitive, for the following reason: the The ground electrode has a very large area relative to the sensor electrode. Hence the The capacitance of the ground electrode to a measurement object is large, that of the sensor electrode on the other hand small.
Man nuss sich die resultierende Kapazitaet als eine Reihenschaltung der genannten Kapazitäten vorstellen. Unter den genannten Bedingungen ist der Wert der Kapazität der Sensorelektrode zum Messobjekt ausschlaggebend fuer den resultierenden Wert.The resulting capacitance is used as a series circuit of the mentioned capacities. Under the conditions mentioned, the value is the capacitance of the sensor electrode to the measurement object is decisive for the resulting Value.
Die veränderliche Kapazität 5 in Fig. 1 wird in Fig. 2 durch die Kapazitaet zwischen den Elektroden 12 und 13 gebildet, die sich in angrenzenden Luftraum bildet.The variable capacitance 5 in FIG. 1 is represented in FIG. 2 by the capacitance formed between the electrodes 12 and 13, which forms in the adjacent air space.
Dagegen liegt die Kapazität 6 in der lsolierstoffplatte unterhalb der Elektroden 12 und 13.In contrast, the capacitance 6 in the insulating material plate is below of electrodes 12 and 13.
Die Isolierstoffplatte 11 mit den Elektroden 12 und 13 genaess Fig. 2 bildet eine Wand des kapazitiven Messkopf es, so dass bei einer Annäherung eines Gegenstandes an die Ele kt rodenanordnung die Kapazität 5 verändert wird.The insulating plate 11 with the electrodes 12 and 13 as shown in Fig. 2 forms a wall of the capacitive measuring head so that when a Subject to the elec trode arrangement, the capacitance 5 is changed.
Die Kapazität 6 in der Isolierstoffplatte unterliegt Tenperaturschwankungen.The capacity 6 in the insulating plate is subject to temperature fluctuations.
UM diese zu kompensieren, ist in Fig. 3 an der den Gehaeuseinneren des Messkopfes zugewandten Seite der Isolierstoffplatte 11 die gleich aufgebaute innere Elektrode vorgesehen.To compensate for this, FIG. 3 shows the interior of the housing of the measuring head facing side of the insulating material plate 11 has the same structure internal electrode provided.
Die aeussere Elektrode und die innere Elekt rode sind gegeneinander versetzt angeordnet, derart dass sie sich nicht gegenüberstehen, sondern jeweils der Masseelektrode der anderen Elektrodenanordnung.The outer electrode and the inner electrode are against each other arranged offset so that they do not face each other, but each the ground electrode of the other electrode arrangement.
Da die innere Elektrode somit nach aussen abgeschirmt ist, ist der aeusse re Anteil ihrer Kapazität nicht variabel.Since the inner electrode is thus shielded from the outside, the the outer share of their capacity is not variable.
An besten wird die Isolierstoffplatte nit den Elektroden punktsymmetrisch ausgelegt Es kann dann fuer die Elektroden dieselbe Vorlage (Druckvorlage fuer die Retzung) verwendet werden.The insulating plate with the electrodes is best point symmetrical The same template can then be used for the electrodes (print template for the Retzung) can be used.
Die in der Isolierstoffplatte liegende Kapazität der inneren Elektrode ändert sich in den gleichen Masse mit der Temperatur wie die in der Isolierstoffplatte liegende Kapazität der äusseren Elektrode.The capacitance of the inner electrode in the insulating plate changes to the same extent with temperature as that in the insulating plate lying capacitance of the outer electrode.
Durch den Aufbau der inneren und äusseren Elektrode it einer einzigen Isolierstoffplatte ist sicher gewaehrleistet, dass beide Elektrodenanordnungen die gleiche Tenperatur besitzen.Due to the structure of the inner and outer electrode it is a single one Insulating plate is guaranteed to ensure that both electrode arrangements have the same temperature.
Die innere Elektrode wird in die Stelle des Condensators 7 in Fig. 1 in die Brückenschaltung aufgenommen.The inner electrode is in the place of the condenser 7 in Fig. 1 added to the bridge circuit.
Erforderlichenfalls kann noch eine kleine variable iapzitaet t Abgleich der Brücke an geeigneter Stelle vorgesehen werden.If necessary, a small variable capacity can be adjusted be provided at a suitable location on the bridge.
Hit Vorteil wird der beschriebene Versatz der Sensorelektroden so gross gewählt, dass die Anordnung nur auf der einen Haelfte der Isolierstoffplatte empfindlich ist. Es koennen dann zwei gleiche Messköpfe zueinander um 180 Grad gedreht nebeneinander angeordnet werden. Es ist dann eine Abtastung auf der gesamten Breite der Isolierstoffplatte möglich.The described offset of the sensor electrodes is an advantage chosen large that the arrangement is only on one half of the insulating plate is sensitive. Two identical measuring heads can then be rotated 180 degrees to each other be arranged side by side. It is then a scan over the entire width the insulating plate possible.
Eine solche Anordnung Mit zwei Messköpfen ist z.B. fuer eine Abtastung einer an den Messköpfen entlang bewegten Bahn anwendbar, wenn die Bahn die Breite einer ganzen Isolierstoffplatte hat.Such an arrangement with two measuring heads is e.g. for scanning a path moving along the measuring heads can be used if the path has the width a whole sheet of insulating material.
Vom Anmelder wird so eine Anordnung in einem Gerät eingesetzt, mit 2eM die Se itenf lanken e ines Rutoreifens in der Endkontrolle vermessen werden.The applicant uses such an arrangement in a device, with 2eM the side flanks of a rut tire are measured in the final inspection.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19813134342 DE3134342A1 (en) | 1981-08-31 | 1981-08-31 | Electronic capacitive measuring head for distance measurements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19813134342 DE3134342A1 (en) | 1981-08-31 | 1981-08-31 | Electronic capacitive measuring head for distance measurements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3134342A1 true DE3134342A1 (en) | 1983-03-10 |
| DE3134342C2 DE3134342C2 (en) | 1989-12-07 |
Family
ID=6140496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19813134342 Granted DE3134342A1 (en) | 1981-08-31 | 1981-08-31 | Electronic capacitive measuring head for distance measurements |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3134342A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5412327A (en) * | 1992-09-22 | 1995-05-02 | Meinen; Michael | Distance sensor utilizing a bridge circuit incorporating variable capacitances |
| WO2002031433A1 (en) * | 2000-10-09 | 2002-04-18 | Micro-Epsilon Messtechnik Gmbh & Co.Kg | Combination consisting of two sensors, for example, of a capacitive sensor and of a proximity sensor that functions on the basis of eddy current or ultrasound, inside a housing |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3333148A1 (en) * | 1983-09-14 | 1985-03-28 | Ingenieure Block + Seichter Inh.Klaus Seichter, 3000 Hannover | Device for positioning an optical sensor |
| DE19634782A1 (en) * | 1996-08-28 | 1998-03-05 | Anton Koukal | Control of gap between plasma burner and workpiece |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2258691A1 (en) * | 1971-12-09 | 1973-06-14 | Ade Corp | DEVICE FOR DIRECT DISPLAY OF CAPACITIVE MEASURED DIMENSIONS |
| DE2137545B2 (en) * | 1970-08-17 | 1979-05-17 | Ade Corp., Watertown, Mass. (V.St.A.) | Capacitance measuring probe |
| DE2711925B2 (en) * | 1976-03-19 | 1980-09-18 | Rca Corp., New York, N.Y. (V.St.A.) | Position control device |
-
1981
- 1981-08-31 DE DE19813134342 patent/DE3134342A1/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2137545B2 (en) * | 1970-08-17 | 1979-05-17 | Ade Corp., Watertown, Mass. (V.St.A.) | Capacitance measuring probe |
| DE2258691A1 (en) * | 1971-12-09 | 1973-06-14 | Ade Corp | DEVICE FOR DIRECT DISPLAY OF CAPACITIVE MEASURED DIMENSIONS |
| DE2711925B2 (en) * | 1976-03-19 | 1980-09-18 | Rca Corp., New York, N.Y. (V.St.A.) | Position control device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5412327A (en) * | 1992-09-22 | 1995-05-02 | Meinen; Michael | Distance sensor utilizing a bridge circuit incorporating variable capacitances |
| WO2002031433A1 (en) * | 2000-10-09 | 2002-04-18 | Micro-Epsilon Messtechnik Gmbh & Co.Kg | Combination consisting of two sensors, for example, of a capacitive sensor and of a proximity sensor that functions on the basis of eddy current or ultrasound, inside a housing |
| US6822442B2 (en) | 2000-10-09 | 2004-11-23 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensor arrangement for detecting properties of a target |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3134342C2 (en) | 1989-12-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8127 | New person/name/address of the applicant |
Owner name: SEICHTER GMBH, 3000 HANNOVER, DE |
|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |