DE3062788D1 - Method of producing polishing compositions - Google Patents

Method of producing polishing compositions

Info

Publication number
DE3062788D1
DE3062788D1 DE8080401773T DE3062788T DE3062788D1 DE 3062788 D1 DE3062788 D1 DE 3062788D1 DE 8080401773 T DE8080401773 T DE 8080401773T DE 3062788 T DE3062788 T DE 3062788T DE 3062788 D1 DE3062788 D1 DE 3062788D1
Authority
DE
Germany
Prior art keywords
polishing compositions
precipitate
solution
equivalents
rare earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8080401773T
Other languages
English (en)
Inventor
Jean Khaladji
Marcel Peltier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rhone Poulenc Specialites Chimiques
Original Assignee
Rhone Poulenc Specialites Chimiques
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Specialites Chimiques filed Critical Rhone Poulenc Specialites Chimiques
Application granted granted Critical
Publication of DE3062788D1 publication Critical patent/DE3062788D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Catalysts (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Glass Compositions (AREA)
  • Polymerisation Methods In General (AREA)
DE8080401773T 1979-12-27 1980-12-10 Method of producing polishing compositions Expired DE3062788D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7931742A FR2472601A1 (fr) 1979-12-27 1979-12-27 Procede de fabrication de compositions de polissage a base de cerium

Publications (1)

Publication Number Publication Date
DE3062788D1 true DE3062788D1 (en) 1983-05-19

Family

ID=9233184

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8080401773T Expired DE3062788D1 (en) 1979-12-27 1980-12-10 Method of producing polishing compositions

Country Status (8)

Country Link
US (2) US4529410A (de)
EP (1) EP0031749B1 (de)
JP (1) JPS56131686A (de)
AT (1) ATE3054T1 (de)
AU (1) AU546390B2 (de)
BR (1) BR8008474A (de)
DE (1) DE3062788D1 (de)
FR (1) FR2472601A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545830B1 (fr) * 1983-05-13 1986-01-03 Rhone Poulenc Spec Chim Nouvelle composition de polissage a base de cerium et son procede de fabrication
FR2549846B1 (fr) * 1983-07-29 1986-12-26 Rhone Poulenc Spec Chim Nouvelle composition de polissage a base de cerium et son procede de fabrication
FR2559755A1 (fr) * 1984-02-20 1985-08-23 Rhone Poulenc Spec Chim Oxyde cerique a nouvelles caracteristiques morphologiques et son procede d'obtention
FR2559754A1 (fr) * 1984-02-20 1985-08-23 Rhone Poulenc Spec Chim Oxyde cerique a nouvelles caracteristiques morphologiques et son procede d'obtention
AT380897B (de) * 1984-12-10 1986-07-25 Koller Anton Mischung zur pflege und reinigung von kontaktlinsen
FR2604443A1 (fr) * 1986-09-26 1988-04-01 Rhone Poulenc Chimie Composition de polissage a base de cerium destinee au polissage des verres organiques
US5015452A (en) * 1986-11-17 1991-05-14 Clarkson University Process for synthesis of uniform colloidal particles of rare earth oxides
WO1988003910A1 (en) * 1986-11-17 1988-06-02 Clarkson University Process for synthesis of uniform colloidal particles of rare earth oxides
FR2624519A1 (fr) * 1987-12-09 1989-06-16 Rhone Poulenc Chimie Composition de polissage perfectionnee a base de cerium et son procede de preparation
FR2631630B1 (fr) * 1988-05-18 1990-08-31 Rhone Poulenc Chimie Abrasifs a base de terres rares
US4954142A (en) * 1989-03-07 1990-09-04 International Business Machines Corporation Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
US5084071A (en) * 1989-03-07 1992-01-28 International Business Machines Corporation Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
US5114437A (en) * 1990-08-28 1992-05-19 Sumitomo Chemical Co., Ltd. Polishing composition for metallic material
US5106394A (en) * 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
JP2509826B2 (ja) * 1991-03-28 1996-06-26 多木化学株式会社 酸化第二セリウムゾル
US5376222A (en) * 1991-09-04 1994-12-27 Fujitsu Limited Polishing method for polycrystalline silicon
US10361802B1 (en) 1999-02-01 2019-07-23 Blanding Hovenweep, Llc Adaptive pattern recognition based control system and method
US8352400B2 (en) 1991-12-23 2013-01-08 Hoffberg Steven M Adaptive pattern recognition based controller apparatus and method and human-factored interface therefore
US5264010A (en) * 1992-04-27 1993-11-23 Rodel, Inc. Compositions and methods for polishing and planarizing surfaces
US5389352A (en) * 1993-07-21 1995-02-14 Rodel, Inc. Oxide particles and method for producing them
KR100360787B1 (ko) * 1996-02-07 2003-01-29 히다치 가세고교 가부시끼가이샤 산화세륨연마제,반도체칩및반도체장치,그들의제조법및기판의연마법
US5958288A (en) * 1996-11-26 1999-09-28 Cabot Corporation Composition and slurry useful for metal CMP
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US6231629B1 (en) 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
US5910471A (en) * 1997-03-07 1999-06-08 Minnesota Mining And Manufacturing Company Abrasive article for providing a clear surface finish on glass
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass
US6270395B1 (en) 1998-09-24 2001-08-07 Alliedsignal, Inc. Oxidizing polishing slurries for low dielectric constant materials
US7904187B2 (en) 1999-02-01 2011-03-08 Hoffberg Steven M Internet appliance system and method
FR2795065B1 (fr) * 1999-06-16 2002-04-19 Rhodia Chimie Sa Sol d'un phosphate de cerium et/ou de lanthane, procede de preparation et utilisation en polissage
WO2001000744A1 (fr) * 1999-06-28 2001-01-04 Nissan Chemical Industries, Ltd. Compose abrasif pour plateau en verre de disque dur
US6933417B1 (en) 1999-11-22 2005-08-23 Dow Global Technologies Inc. Process for vinyl chloride manufacture from ethane and ethylene with partial CHl recovery from reactor effluent
US6680415B1 (en) * 1999-11-22 2004-01-20 Dow Global Technologies Inc. Oxyhalogenation process using catalyst having porous rare earth halide support
US6909024B1 (en) 1999-11-22 2005-06-21 The Dow Chemical Company Process for the conversion of ethylene to vinyl chloride and novel catalyst compositions useful for such process
US6797845B1 (en) 1999-11-22 2004-09-28 Dow Global Technologies Inc. Process for vinyl chloride manufacture from ethane and ethylene with immediate HCl recovery from reactor effluent
US6638144B2 (en) 2000-04-28 2003-10-28 3M Innovative Properties Company Method of cleaning glass
US6986798B2 (en) 2000-11-30 2006-01-17 Showa Denko K.K. Cerium-based abrasive, production process thereof
TW528796B (en) * 2000-12-13 2003-04-21 Mitsui Mining & Amp Smelting C Cerium-based abrasive and method of evaluating the same
US7887714B2 (en) 2000-12-25 2011-02-15 Nissan Chemical Industries, Ltd. Cerium oxide sol and abrasive
RU2284984C2 (ru) * 2001-05-23 2006-10-10 Дау Глобал Текнолоджиз Инк. Способ окислительного галогенирования и необязательного дегидрирования углеводородов от c3 до c10 (варианты)
US6716407B2 (en) * 2001-06-18 2004-04-06 The Boeing Company Monazite-based coatings for thermal protection systems
US6596042B1 (en) * 2001-11-16 2003-07-22 Ferro Corporation Method of forming particles for use in chemical-mechanical polishing slurries and the particles formed by the process
WO2003044123A1 (en) * 2001-11-16 2003-05-30 Ferro Corporation Particles for use in cmp slurries and method for producing them
JP2003155467A (ja) * 2001-11-26 2003-05-30 Fujino Kinzoku Kk イオン発生体およびその製造方法
JP4236857B2 (ja) * 2002-03-22 2009-03-11 三井金属鉱業株式会社 セリウム系研摩材およびその製造方法
US20040152929A1 (en) * 2002-05-08 2004-08-05 Clarke William D Process for vinyl chloride manufacture from ethane and ethylene with air feed and alternative hcl processing methods
US20050108947A1 (en) * 2003-11-26 2005-05-26 Mueller Brian L. Compositions and methods for chemical mechanical polishing silica and silicon nitride
US20060021972A1 (en) * 2004-07-28 2006-02-02 Lane Sarah J Compositions and methods for chemical mechanical polishing silicon dioxide and silicon nitride
AT502308B1 (de) * 2005-07-20 2010-03-15 Treibacher Ind Ag Glasschleifmittel auf ceroxidbasis und verfahren zu dessen herstellung
CN101735768B (zh) * 2008-11-25 2013-08-14 西安迈克森新材料有限公司 一种稀土类抛光粉制备方法
JP5512962B2 (ja) * 2008-12-08 2014-06-04 三井金属鉱業株式会社 フッ素及び硫黄を含有するセリウム系研摩材
EP2419486A4 (de) * 2009-04-15 2013-07-10 Rhodia China Co Ltd Cer basierte partikelzusammensetzung und ihre herstellung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097083A (en) * 1959-07-02 1963-07-09 American Potash & Chem Corp Polishing composition and process of forming same
FR1263505A (fr) * 1960-07-01 1961-06-09 American Potash & Chem Corp Composition de polissage et procédé pour la préparer
US3262766A (en) * 1963-11-21 1966-07-26 Grace W R & Co Rare-earth oxides for polishing glass
US3311461A (en) * 1964-06-15 1967-03-28 American Potash & Chem Corp Process for producing rare earthcontaining glass polishing agents
US3768989A (en) * 1968-08-19 1973-10-30 N Goetzinger Process for the preparation of a rare earth oxide polishing composition
FI46249C (fi) * 1970-09-15 1973-02-12 Kemira Oy Menetelmä ceriumoksidin valkoisuuden parantamiseksi
DE2857146T1 (de) * 1977-11-01 1980-12-04 Atomic Energy Authority Uk Production of dispersions
SU715473A1 (ru) * 1978-08-10 1980-02-15 Государственный ордена Октябрьской Революции научно-исследовательский и проектный институт редкометаллической промышленности Способ получени полирующего материала на основе двуокиси цери
JP3086013B2 (ja) * 1991-06-28 2000-09-11 オリンパス光学工業株式会社 光学性能測定方法および装置
JPH099746A (ja) * 1995-06-30 1997-01-14 Kubota Corp 移植機の動力伝動装置

Also Published As

Publication number Publication date
BR8008474A (pt) 1981-07-14
JPS5758388B2 (de) 1982-12-09
ATE3054T1 (de) 1983-04-15
EP0031749A3 (en) 1981-07-22
US4529410A (en) 1985-07-16
EP0031749A2 (de) 1981-07-08
FR2472601A1 (fr) 1981-07-03
US4942697A (en) 1990-07-24
FR2472601B1 (de) 1983-12-02
EP0031749B1 (de) 1983-04-13
AU546390B2 (en) 1985-08-29
JPS56131686A (en) 1981-10-15
AU6583580A (en) 1981-07-02

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