DE3046746A1 - Verfahren zur herstellung des substrats einer elektrochromischen anzeigezelle und nach diesem verfahren hergestelltes substrat - Google Patents
Verfahren zur herstellung des substrats einer elektrochromischen anzeigezelle und nach diesem verfahren hergestelltes substratInfo
- Publication number
- DE3046746A1 DE3046746A1 DE19803046746 DE3046746A DE3046746A1 DE 3046746 A1 DE3046746 A1 DE 3046746A1 DE 19803046746 DE19803046746 DE 19803046746 DE 3046746 A DE3046746 A DE 3046746A DE 3046746 A1 DE3046746 A1 DE 3046746A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- mask
- substrate
- electrochromic
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 40
- 239000000758 substrate Substances 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims description 40
- 239000003989 dielectric material Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000000889 atomisation Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000012670 alkaline solution Substances 0.000 claims 2
- 239000003929 acidic solution Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 239000010416 ion conductor Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 8
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 239000006181 electrochemical material Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- DOETVZCFKJCYJV-UHFFFAOYSA-N 6-(4,5-dihydro-1h-imidazol-2-yl)-2-[4-(4,5-dihydro-1h-imidazol-2-yl)phenyl]-1h-indole Chemical compound N1CCN=C1C1=CC=C(C=2NC3=CC(=CC=C3C=2)C=2NCCN=2)C=C1 DOETVZCFKJCYJV-UHFFFAOYSA-N 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 101100286286 Dictyostelium discoideum ipi gene Proteins 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/1533—Constructional details structural features not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/1533—Constructional details structural features not otherwise provided for
- G02F2001/1536—Constructional details structural features not otherwise provided for additional, e.g. protective, layer inside the cell
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1120779 | 1979-12-18 | ||
| CH1120979 | 1979-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3046746A1 true DE3046746A1 (de) | 1981-08-27 |
| DE3046746C2 DE3046746C2 (ja) | 1989-09-07 |
Family
ID=25707975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19803046746 Granted DE3046746A1 (de) | 1979-12-18 | 1980-12-09 | Verfahren zur herstellung des substrats einer elektrochromischen anzeigezelle und nach diesem verfahren hergestelltes substrat |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3046746A1 (ja) |
| FR (1) | FR2472241A1 (ja) |
| GB (1) | GB2067330B (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3146103A1 (de) * | 1980-11-21 | 1982-06-03 | Sharp K.K., Osaka | "verfahren zur herstellung von anzeigeelektrodenschichten in elektrochromen anzeigevorrichtungen" |
| DE3238860A1 (de) * | 1981-10-22 | 1983-05-11 | Sharp K.K., Osaka | Elektrochrome anzeigevorrichtung und verfahren zu deren herstellung |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4488781A (en) * | 1982-01-25 | 1984-12-18 | American Cyanamid Company | Method for manufacturing an electrochromic display device and device produced thereby |
| GB2265486A (en) * | 1992-03-11 | 1993-09-29 | Marconi Gec Ltd | Display device fabrication |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH564227A (ja) * | 1972-01-12 | 1975-07-15 | ||
| DE2750387C2 (de) * | 1976-11-12 | 1982-05-27 | Sharp K.K., Osaka | Elektrochrome Anzeigevorrichtung |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5228293A (en) * | 1975-08-27 | 1977-03-03 | Sharp Corp | Electric colour display unit |
| JPS5810753B2 (ja) * | 1975-09-29 | 1983-02-26 | シャープ株式会社 | エレクトロクロミツクヒヨウジソシノ セイゾウホウホウ |
| US4187004A (en) * | 1977-01-28 | 1980-02-05 | Sharp Kabushiki Kaisha | Negative type display in electrochromic display device |
-
1980
- 1980-12-04 GB GB8038845A patent/GB2067330B/en not_active Expired
- 1980-12-09 DE DE19803046746 patent/DE3046746A1/de active Granted
- 1980-12-17 FR FR8026822A patent/FR2472241A1/fr active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH564227A (ja) * | 1972-01-12 | 1975-07-15 | ||
| DE2750387C2 (de) * | 1976-11-12 | 1982-05-27 | Sharp K.K., Osaka | Elektrochrome Anzeigevorrichtung |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3146103A1 (de) * | 1980-11-21 | 1982-06-03 | Sharp K.K., Osaka | "verfahren zur herstellung von anzeigeelektrodenschichten in elektrochromen anzeigevorrichtungen" |
| DE3238860A1 (de) * | 1981-10-22 | 1983-05-11 | Sharp K.K., Osaka | Elektrochrome anzeigevorrichtung und verfahren zu deren herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3046746C2 (ja) | 1989-09-07 |
| GB2067330B (en) | 1983-05-25 |
| FR2472241A1 (fr) | 1981-06-26 |
| FR2472241B1 (ja) | 1985-03-08 |
| GB2067330A (en) | 1981-07-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8127 | New person/name/address of the applicant |
Owner name: ETA S.A. FABRIQUES D EBAUCHES, GRANGES, CH |
|
| 8128 | New person/name/address of the agent |
Representative=s name: MUELLER-BOERNER, R., DIPL.-ING., 1000 BERLIN WEY, |
|
| 8110 | Request for examination paragraph 44 | ||
| 8128 | New person/name/address of the agent |
Representative=s name: WEY, H., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |