DE3036643C2 - Vorrichtung zur Flüssigphasen-Epitaxie - Google Patents
Vorrichtung zur Flüssigphasen-EpitaxieInfo
- Publication number
- DE3036643C2 DE3036643C2 DE3036643A DE3036643A DE3036643C2 DE 3036643 C2 DE3036643 C2 DE 3036643C2 DE 3036643 A DE3036643 A DE 3036643A DE 3036643 A DE3036643 A DE 3036643A DE 3036643 C2 DE3036643 C2 DE 3036643C2
- Authority
- DE
- Germany
- Prior art keywords
- separation chambers
- slide
- substrate
- tongues
- crucibles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004943 liquid phase epitaxy Methods 0.000 title claims description 5
- 210000002105 tongue Anatomy 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 60
- 238000000926 separation method Methods 0.000 claims description 54
- 238000000151 deposition Methods 0.000 claims description 15
- 230000008021 deposition Effects 0.000 claims description 14
- 238000002844 melting Methods 0.000 claims description 12
- 230000008018 melting Effects 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000005484 gravity Effects 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 26
- 239000000155 melt Substances 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 101100037313 Drosophila melanogaster Rlip gene Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101100140140 Xenopus laevis ralbp1-a gene Proteins 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3036643A DE3036643C2 (de) | 1980-09-29 | 1980-09-29 | Vorrichtung zur Flüssigphasen-Epitaxie |
| US06/298,594 US4406245A (en) | 1980-09-29 | 1981-09-02 | Device for epitaxial depositing layers from a liquid phase |
| EP81107190A EP0048872B1 (de) | 1980-09-29 | 1981-09-11 | Vorrichtung zur Durchführung einer Flüssigphasen-Epitaxie |
| CA000386793A CA1167573A (en) | 1980-09-29 | 1981-09-28 | Device for epitaxial depositing layers from a liquid phase |
| JP56153532A JPS5788093A (en) | 1980-09-29 | 1981-09-28 | Liquid phase epitaxial growth device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3036643A DE3036643C2 (de) | 1980-09-29 | 1980-09-29 | Vorrichtung zur Flüssigphasen-Epitaxie |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3036643A1 DE3036643A1 (de) | 1982-04-08 |
| DE3036643C2 true DE3036643C2 (de) | 1984-09-20 |
Family
ID=6113095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3036643A Expired DE3036643C2 (de) | 1980-09-29 | 1980-09-29 | Vorrichtung zur Flüssigphasen-Epitaxie |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4406245A (enrdf_load_stackoverflow) |
| EP (1) | EP0048872B1 (enrdf_load_stackoverflow) |
| JP (1) | JPS5788093A (enrdf_load_stackoverflow) |
| CA (1) | CA1167573A (enrdf_load_stackoverflow) |
| DE (1) | DE3036643C2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4519871A (en) * | 1983-11-25 | 1985-05-28 | Cook Melvin S | Bubble-mode liquid phase epitaxy |
| US4774904A (en) * | 1986-09-29 | 1988-10-04 | Jamie Knapp | Multiple-layer growth of plural semiconductor devices |
| JPS6436017U (enrdf_load_stackoverflow) * | 1987-08-27 | 1989-03-06 | ||
| US7905197B2 (en) | 2008-10-28 | 2011-03-15 | Athenaeum, Llc | Apparatus for making epitaxial film |
| US20100102419A1 (en) * | 2008-10-28 | 2010-04-29 | Eric Ting-Shan Pan | Epitaxy-Level Packaging (ELP) System |
| US8193078B2 (en) | 2008-10-28 | 2012-06-05 | Athenaeum, Llc | Method of integrating epitaxial film onto assembly substrate |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3990392A (en) * | 1968-12-31 | 1976-11-09 | U.S. Philips Corporation | Epitaxial growth apparatus |
| FR1600341A (enrdf_load_stackoverflow) * | 1968-12-31 | 1970-07-20 | ||
| US3759759A (en) * | 1970-01-29 | 1973-09-18 | Fairchild Camera Instr Co | Push pull method for solution epitaxial growth of iii v compounds |
| USRE28140E (en) | 1971-11-29 | 1974-08-27 | Bergh ctal | |
| JPS5213510B2 (enrdf_load_stackoverflow) * | 1973-02-26 | 1977-04-14 | ||
| US3853643A (en) * | 1973-06-18 | 1974-12-10 | Bell Telephone Labor Inc | Epitaxial growth of group iii-v semiconductors from solution |
| DE2337238A1 (de) * | 1973-07-21 | 1975-01-30 | Licentia Gmbh | Verfahren und vorrichtung zur epitaktischen ablagerung kristallisierter schichten auf einem einkristallinen substrat aus einem material in fluessigem zustand |
| DD115580A1 (enrdf_load_stackoverflow) * | 1974-10-15 | 1975-10-12 | ||
| DE2730358C3 (de) * | 1977-07-05 | 1982-03-18 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum aufeinanderfolgenden Abscheiden einkristalliner Schichten auf einem Substrat nach der Flüssigphasen-Schiebeepitaxie |
| JPS5556625A (en) | 1978-10-20 | 1980-04-25 | Matsushita Electric Ind Co Ltd | Semiconductor crystal growing device |
| US4214550A (en) * | 1979-05-21 | 1980-07-29 | Rca Corporation | Apparatus for the deposition of a material from a liquid phase |
-
1980
- 1980-09-29 DE DE3036643A patent/DE3036643C2/de not_active Expired
-
1981
- 1981-09-02 US US06/298,594 patent/US4406245A/en not_active Expired - Fee Related
- 1981-09-11 EP EP81107190A patent/EP0048872B1/de not_active Expired
- 1981-09-28 CA CA000386793A patent/CA1167573A/en not_active Expired
- 1981-09-28 JP JP56153532A patent/JPS5788093A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS614797B2 (enrdf_load_stackoverflow) | 1986-02-13 |
| EP0048872A1 (de) | 1982-04-07 |
| JPS5788093A (en) | 1982-06-01 |
| EP0048872B1 (de) | 1985-08-07 |
| CA1167573A (en) | 1984-05-15 |
| DE3036643A1 (de) | 1982-04-08 |
| US4406245A (en) | 1983-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |