DE3003111A1 - Drucksensor - Google Patents
DrucksensorInfo
- Publication number
- DE3003111A1 DE3003111A1 DE19803003111 DE3003111A DE3003111A1 DE 3003111 A1 DE3003111 A1 DE 3003111A1 DE 19803003111 DE19803003111 DE 19803003111 DE 3003111 A DE3003111 A DE 3003111A DE 3003111 A1 DE3003111 A1 DE 3003111A1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- pressure
- housing
- membrane
- steinmeister
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000012528 membrane Substances 0.000 claims description 27
- 239000012530 fluid Substances 0.000 claims description 21
- 238000005744 Teer Meer reaction Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979010009U JPS5937716Y2 (ja) | 1979-01-31 | 1979-01-31 | 半導体差圧センサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3003111A1 true DE3003111A1 (de) | 1980-08-07 |
Family
ID=11738396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19803003111 Ceased DE3003111A1 (de) | 1979-01-31 | 1980-01-29 | Drucksensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4287501A (en, 2012) |
| JP (1) | JPS5937716Y2 (en, 2012) |
| DE (1) | DE3003111A1 (en, 2012) |
| FR (1) | FR2448141A1 (en, 2012) |
| GB (1) | GB2042258B (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0524550A1 (de) * | 1991-07-25 | 1993-01-27 | Fibronix Sensoren GmbH | Gasgefüllter Relativdrucksensor |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58146827A (ja) * | 1982-02-25 | 1983-09-01 | Fuji Electric Co Ltd | 半導体式圧力センサ |
| US4763098A (en) * | 1985-04-08 | 1988-08-09 | Honeywell Inc. | Flip-chip pressure transducer |
| JPS61239135A (ja) * | 1985-04-16 | 1986-10-24 | Yokogawa Electric Corp | 差圧伝送器 |
| US4695817A (en) * | 1985-06-26 | 1987-09-22 | Kulite Semiconductor Products, Inc. | Environmentally protected pressure transducers employing two electrically interconnected transducer arrays |
| DE3635462A1 (de) * | 1985-10-21 | 1987-04-23 | Sharp Kk | Feldeffekt-drucksensor |
| US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
| US4790192A (en) * | 1987-09-24 | 1988-12-13 | Rosemount Inc. | Silicon side by side coplanar pressure sensors |
| US5029479A (en) * | 1988-08-15 | 1991-07-09 | Imo Industries, Inc. | Differential pressure transducers |
| US4879627A (en) * | 1988-12-30 | 1989-11-07 | United Technologies Corporation | Differential capacitive pressure sensor with over-pressure protection |
| EP0384934A1 (de) * | 1989-03-02 | 1990-09-05 | Siemens Aktiengesellschaft | Drucksensor |
| JP2823889B2 (ja) * | 1989-08-04 | 1998-11-11 | 三菱電機株式会社 | 圧力検出器 |
| US5001934A (en) * | 1990-01-02 | 1991-03-26 | Walbro Corporation | Solid state pressure sensor |
| US5072190A (en) * | 1990-08-14 | 1991-12-10 | The Foxboro Company | Pressure sensing device having fill fluid contamination detector |
| US5969591A (en) * | 1991-03-28 | 1999-10-19 | The Foxboro Company | Single-sided differential pressure sensor |
| JPH0582696A (ja) * | 1991-09-19 | 1993-04-02 | Mitsubishi Electric Corp | 半導体装置のリードフレーム |
| US5257547A (en) * | 1991-11-26 | 1993-11-02 | Honeywell Inc. | Amplified pressure transducer |
| JPH05149814A (ja) * | 1991-11-29 | 1993-06-15 | Fuji Electric Co Ltd | 二重ダイヤフラム式半導体圧力センサ |
| US5437189A (en) * | 1994-05-03 | 1995-08-01 | Motorola, Inc. | Dual absolute pressure sensor and method thereof |
| US5454270A (en) * | 1994-06-06 | 1995-10-03 | Motorola, Inc. | Hermetically sealed pressure sensor and method thereof |
| US5471884A (en) * | 1994-07-05 | 1995-12-05 | Motorola, Inc. | Gain-adjusting circuitry for combining two sensors to form a media isolated differential pressure sensor |
| US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| US5637905A (en) * | 1996-02-01 | 1997-06-10 | New Jersey Institute Of Technology | High temperature, pressure and displacement microsensor |
| US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
| US5945591A (en) * | 1996-06-04 | 1999-08-31 | Saarem; Myrl J. | Digital differential pressure gage and flow meter implementing signal difference processor |
| US6023978A (en) * | 1996-07-10 | 2000-02-15 | Honeywell Data Instruments, Inc. | Pressure transducer with error compensation from cross-coupling outputs of two sensors |
| US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
| JP3426498B2 (ja) * | 1997-08-13 | 2003-07-14 | 株式会社日立ユニシアオートモティブ | 圧力センサ |
| US6311561B1 (en) | 1997-12-22 | 2001-11-06 | Rosemount Aerospace Inc. | Media compatible pressure sensor |
| US6076409A (en) * | 1997-12-22 | 2000-06-20 | Rosemount Aerospace, Inc. | Media compatible packages for pressure sensing devices |
| US5959338A (en) * | 1997-12-29 | 1999-09-28 | Honeywell Inc. | Micro electro-mechanical systems relay |
| JP4389326B2 (ja) * | 1999-05-06 | 2009-12-24 | 株式会社デンソー | 圧力センサ |
| US6571132B1 (en) | 1999-09-28 | 2003-05-27 | Rosemount Inc. | Component type adaptation in a transducer assembly |
| US7134354B2 (en) | 1999-09-28 | 2006-11-14 | Rosemount Inc. | Display for process transmitter |
| US6484107B1 (en) | 1999-09-28 | 2002-11-19 | Rosemount Inc. | Selectable on-off logic modes for a sensor module |
| US6511337B1 (en) | 1999-09-28 | 2003-01-28 | Rosemount Inc. | Environmentally sealed instrument loop adapter |
| US6487912B1 (en) | 1999-09-28 | 2002-12-03 | Rosemount Inc. | Preinstallation of a pressure sensor module |
| US6510740B1 (en) | 1999-09-28 | 2003-01-28 | Rosemount Inc. | Thermal management in a pressure transmitter |
| US6765968B1 (en) | 1999-09-28 | 2004-07-20 | Rosemount Inc. | Process transmitter with local databus |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| CN1151367C (zh) | 2000-01-06 | 2004-05-26 | 罗斯蒙德公司 | 微机电系统(mems)用的电互联的晶粒生长 |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| US6546805B2 (en) | 2000-03-07 | 2003-04-15 | Rosemount Inc. | Process fluid transmitter with an environmentally sealed service block |
| US6662662B1 (en) | 2000-05-04 | 2003-12-16 | Rosemount, Inc. | Pressure transmitter with improved isolator system |
| US6504489B1 (en) | 2000-05-15 | 2003-01-07 | Rosemount Inc. | Process control transmitter having an externally accessible DC circuit common |
| US6480131B1 (en) | 2000-08-10 | 2002-11-12 | Rosemount Inc. | Multiple die industrial process control transmitter |
| US6564642B1 (en) * | 2000-11-02 | 2003-05-20 | Kavlico Corporation | Stable differential pressure measuring system |
| US6508114B2 (en) | 2000-11-29 | 2003-01-21 | Casco Products Corporation | Webbing tension sensor |
| DE10061153A1 (de) * | 2000-12-08 | 2002-06-27 | Lucas Varity Gmbh | Sensoranordnung für einen Unterdruck-Bremskraftverstärker und damit ausgerüsteter Unterdruck-Bremskraftverstärker |
| US6581468B2 (en) | 2001-03-22 | 2003-06-24 | Kavlico Corporation | Independent-excitation cross-coupled differential-pressure transducer |
| US6516672B2 (en) | 2001-05-21 | 2003-02-11 | Rosemount Inc. | Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter |
| US6684711B2 (en) | 2001-08-23 | 2004-02-03 | Rosemount Inc. | Three-phase excitation circuit for compensated capacitor industrial process control transmitters |
| US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
| US7109883B2 (en) * | 2002-09-06 | 2006-09-19 | Rosemount Inc. | Low power physical layer for a bus in an industrial transmitter |
| US7773715B2 (en) | 2002-09-06 | 2010-08-10 | Rosemount Inc. | Two wire transmitter with isolated can output |
| US6945117B2 (en) * | 2003-08-29 | 2005-09-20 | Dana Corporation | Gasket having a fiber-optic pressure sensor assembly |
| US7036381B2 (en) * | 2004-06-25 | 2006-05-02 | Rosemount Inc. | High temperature pressure transmitter assembly |
| US7077008B2 (en) * | 2004-07-02 | 2006-07-18 | Honeywell International Inc. | Differential pressure measurement using backside sensing and a single ASIC |
| WO2007042336A2 (en) * | 2005-10-14 | 2007-04-19 | Stmicroelectronics S.R.L. | Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
| EP1775259A1 (en) * | 2005-10-14 | 2007-04-18 | STMicroelectronics S.r.l. | Wafer level package for sensor devices |
| US7525419B2 (en) | 2006-01-30 | 2009-04-28 | Rosemount Inc. | Transmitter with removable local operator interface |
| US7497124B2 (en) * | 2007-04-20 | 2009-03-03 | Delphi Technologies, Inc. | Dual pressure sensor apparatus |
| US8334788B2 (en) | 2010-03-04 | 2012-12-18 | Rosemount Inc. | Process variable transmitter with display |
| US8466523B2 (en) * | 2011-10-07 | 2013-06-18 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
| JP5974621B2 (ja) * | 2012-05-10 | 2016-08-23 | 株式会社デンソー | 圧力センサ |
| CN104510330B (zh) * | 2013-09-27 | 2017-10-27 | 美的集团股份有限公司 | 压力传感器和压力锅 |
| US10203255B2 (en) * | 2016-08-25 | 2019-02-12 | Measurement Specialties, Inc. | Differential pressure sensor incorporating common mode error compensation |
| IT201700103489A1 (it) | 2017-09-15 | 2019-03-15 | St Microelectronics Srl | Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1179015A (fr) * | 1957-07-17 | 1959-05-20 | Const Elec Mec Metallurg | Perfectionnements aux dispositifs de mesure de pressions |
| US3402609A (en) * | 1964-09-29 | 1968-09-24 | Tokota Chuo Kenkyusho Kk | Semiconductor mechanical-to-electrical transducer |
| GB1248087A (en) | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
| US3748623A (en) * | 1972-07-25 | 1973-07-24 | Millar Instruments | Pressure transducers |
| CH592300A5 (en, 2012) * | 1975-07-08 | 1977-10-31 | Keller Hans W | |
| US4131088A (en) * | 1976-11-08 | 1978-12-26 | The Bendix Corporation | Multiple function pressure sensor |
| JPS5365089A (en) * | 1976-11-24 | 1978-06-10 | Toshiba Corp | Semiconductor pressure transducer |
-
1979
- 1979-01-31 JP JP1979010009U patent/JPS5937716Y2/ja not_active Expired
-
1980
- 1980-01-04 US US06/109,484 patent/US4287501A/en not_active Expired - Lifetime
- 1980-01-17 GB GB8001620A patent/GB2042258B/en not_active Expired
- 1980-01-18 FR FR8001118A patent/FR2448141A1/fr active Granted
- 1980-01-29 DE DE19803003111 patent/DE3003111A1/de not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0524550A1 (de) * | 1991-07-25 | 1993-01-27 | Fibronix Sensoren GmbH | Gasgefüllter Relativdrucksensor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2448141B1 (en, 2012) | 1983-02-25 |
| FR2448141A1 (fr) | 1980-08-29 |
| US4287501A (en) | 1981-09-01 |
| GB2042258B (en) | 1983-02-16 |
| JPS5937716Y2 (ja) | 1984-10-19 |
| GB2042258A (en) | 1980-09-17 |
| JPS55112233U (en, 2012) | 1980-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OAP | Request for examination filed | ||
| OD | Request for examination | ||
| 8131 | Rejection |