DE69424557T2 - Druckwandler mit aufgehangter membran - Google Patents

Druckwandler mit aufgehangter membran

Info

Publication number
DE69424557T2
DE69424557T2 DE69424557T DE69424557T DE69424557T2 DE 69424557 T2 DE69424557 T2 DE 69424557T2 DE 69424557 T DE69424557 T DE 69424557T DE 69424557 T DE69424557 T DE 69424557T DE 69424557 T2 DE69424557 T2 DE 69424557T2
Authority
DE
Germany
Prior art keywords
suspensed
membrane
pressure transformer
transformer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69424557T
Other languages
English (en)
Other versions
DE69424557D1 (de
Inventor
L Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69424557D1 publication Critical patent/DE69424557D1/de
Application granted granted Critical
Publication of DE69424557T2 publication Critical patent/DE69424557T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
DE69424557T 1993-09-20 1994-07-22 Druckwandler mit aufgehangter membran Expired - Fee Related DE69424557T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/123,729 US5483834A (en) 1993-09-20 1993-09-20 Suspended diaphragm pressure sensor
PCT/US1994/008271 WO1995008757A1 (en) 1993-09-20 1994-07-22 Suspended diaphragm pressure sensor

Publications (2)

Publication Number Publication Date
DE69424557D1 DE69424557D1 (de) 2000-06-21
DE69424557T2 true DE69424557T2 (de) 2001-01-18

Family

ID=22410513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69424557T Expired - Fee Related DE69424557T2 (de) 1993-09-20 1994-07-22 Druckwandler mit aufgehangter membran

Country Status (8)

Country Link
US (1) US5483834A (de)
EP (1) EP0720731B1 (de)
JP (1) JP3447295B2 (de)
CN (1) CN1131460A (de)
CA (1) CA2169723A1 (de)
DE (1) DE69424557T2 (de)
SG (1) SG44487A1 (de)
WO (1) WO1995008757A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005008959A1 (de) * 2005-02-28 2006-09-07 Plöchinger, Heinz, Dipl.-Ing. Drucksensoren und Kombinations-Druck-Sensoren sowie Verfahren zum Betrieb, zur Herstellung und zum Test derartiger Sensoren
DE102006018049A1 (de) * 2006-04-10 2007-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Keramische Drucksensoren und Verfahren zu ihrer Herstellung
DE102011006431A1 (de) * 2011-03-30 2012-10-04 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969591A (en) * 1991-03-28 1999-10-19 The Foxboro Company Single-sided differential pressure sensor
NO179651C (no) * 1994-03-07 1996-11-20 Sinvent As Trykkmåler
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
DE19608321C2 (de) * 1996-02-22 2002-01-24 Abb Patent Gmbh Differenzdruckmeßumformereinheit mit einem Überlastschutzsystem
JPH09232595A (ja) * 1996-02-26 1997-09-05 Denso Corp 圧力検出装置
NO304328B1 (no) * 1996-02-27 1998-11-30 Nyfotek As TrykkmÕler
US6311561B1 (en) 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
US20020003274A1 (en) * 1998-08-27 2002-01-10 Janusz Bryzek Piezoresistive sensor with epi-pocket isolation
US6006607A (en) * 1998-08-31 1999-12-28 Maxim Integrated Products, Inc. Piezoresistive pressure sensor with sculpted diaphragm
US6351996B1 (en) 1998-11-12 2002-03-05 Maxim Integrated Products, Inc. Hermetic packaging for semiconductor pressure sensors
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6255728B1 (en) 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
JP3620795B2 (ja) 2000-01-06 2005-02-16 ローズマウント インコーポレイテッド 超小型電気機械システム用電気的相互接続部の結晶粒成長
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
JP2001356062A (ja) * 2000-06-13 2001-12-26 Yamatake Corp 容量式圧力センサ
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6593749B2 (en) * 2001-05-31 2003-07-15 Innovative Micro Technology Wafer level method for probing micromechanical devices
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
EP1634052A4 (de) * 2003-06-06 2008-04-30 Univ Illinois Sensorchip und vorrichtung für berührung und/oder fluss
WO2005027998A2 (en) * 2003-09-16 2005-03-31 Cardiomems, Inc. Implantable wireless sensor
US7644624B2 (en) * 2004-06-04 2010-01-12 The Board Of Trustees Of The University Of Illinois Artificial lateral line
WO2008030284A2 (en) 2006-06-02 2008-03-13 The Board Of Trustees Of The University Of Illinois Soft mems
WO2007143123A2 (en) * 2006-06-02 2007-12-13 The Board Of Trustees Of The University Of Illinois Micromachined artificial haircell
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
DE102009000071A1 (de) * 2009-01-08 2010-07-15 Robert Bosch Gmbh Kapazitiver Drucksensor
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US9010190B2 (en) 2012-04-20 2015-04-21 Rosemount Aerospace Inc. Stress isolated MEMS structures and methods of manufacture
US8984950B2 (en) * 2012-04-20 2015-03-24 Rosemount Aerospace Inc. Separation mode capacitors for sensors
CN102944352B (zh) * 2012-11-12 2014-05-28 中国航天科技集团公司第五研究院第五一〇研究所 可增强电极板稳定性的电容薄膜式压力传感器
JP2015175833A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
CN106168514A (zh) * 2016-08-28 2016-11-30 桂林市晶准测控技术有限公司 一种压力传感装置
JP2018159593A (ja) * 2017-03-22 2018-10-11 アズビル株式会社 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
EP3769063B1 (de) 2018-05-17 2023-01-04 Rosemount Inc. Messelement und messvorrichtung damit
US11181403B2 (en) * 2019-09-24 2021-11-23 Rosemount Inc. Process variable sensor testing

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2420148A (en) * 1943-11-08 1947-05-06 Douglas Aircraft Co Inc Pressure indicator
US3686958A (en) * 1971-02-22 1972-08-29 Ladd Res Ind Fiber optic pressure detector
US4208782A (en) * 1977-12-12 1980-06-24 Kulite Semiconductor Products, Inc. Methods of fabricating transducers employing flat bondable surfaces with buried contact areas
JPS5817421B2 (ja) * 1979-02-02 1983-04-07 日産自動車株式会社 半導体圧力センサ
US4236137A (en) * 1979-03-19 1980-11-25 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flexure frames
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4443293A (en) * 1981-04-20 1984-04-17 Kulite Semiconductor Products, Inc. Method of fabricating transducer structure employing vertically walled diaphragms with quasi rectangular active areas
DE3222620A1 (de) * 1982-02-15 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Druck- oder druckdifferenzmessgeraet mit einer vor ueberlastung geschuetzten drucksonsor-einrichtung
DE3310643C2 (de) * 1983-03-24 1986-04-10 Karlheinz Dr. 7801 Schallstadt Ziegler Drucksensor
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
GB8401848D0 (en) * 1984-01-24 1984-02-29 Carter R E Pressure transducer
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4586108A (en) * 1984-10-12 1986-04-29 Rosemount Inc. Circuit for capacitive sensor made of brittle material
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material
US5083091A (en) * 1986-04-23 1992-01-21 Rosemount, Inc. Charged balanced feedback measurement circuit
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
US4833922A (en) * 1987-06-01 1989-05-30 Rosemount Inc. Modular transmitter
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
US4829825A (en) * 1987-10-19 1989-05-16 Itt Corporation Multiple diaphragm probe seal
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
US5081867A (en) * 1988-09-30 1992-01-21 Nec Corporation Semiconductor sensor
FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US5157973A (en) * 1989-03-16 1992-10-27 Process Automation Business, Inc. Pressure sensor with integral overpressure protection
SE462874B (sv) * 1989-04-06 1990-09-10 Erik Stemme Trycksensor innefattande en tryckkaenslig flat kapsel
US5022270A (en) * 1989-06-15 1991-06-11 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
US4993754A (en) * 1989-09-29 1991-02-19 Rosemount Inc. Liquid level coplanar transmitter adapter
US4974117A (en) * 1990-01-31 1990-11-27 Kavlico Corporation Dual diaphragm capacitive differential pressure transducer
JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
JP2718563B2 (ja) * 1990-08-28 1998-02-25 日本特殊陶業株式会社 圧力検出器
US5068203A (en) * 1990-09-04 1991-11-26 Delco Electronics Corporation Method for forming thin silicon membrane or beam
US5095755A (en) * 1990-11-01 1992-03-17 Rosemount Inc. Isolator for pressure transmitter
US5094109A (en) * 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
DE4111119A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Stapelbare mikromechanische kapazitive druckmesszelle
DE4111118A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Mikromechanischer kapazitiver druckwandler
KR0163443B1 (ko) * 1991-07-04 1999-03-30 나까오 다께시 압력측정장치
DE4127460C2 (de) * 1991-08-20 1994-04-14 Dornier Gmbh Sensor
DE4132391C1 (en) * 1991-09-26 1992-10-01 Siemens Ag, 8000 Muenchen, De Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
DE4213857C2 (de) * 1992-04-27 1995-10-19 Endress Hauser Gmbh Co Vorrichtung zum Messen von Druck und Differenzdruck
US5233875A (en) * 1992-05-04 1993-08-10 Kavlico Corporation Stable capacitive pressure transducer system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005008959A1 (de) * 2005-02-28 2006-09-07 Plöchinger, Heinz, Dipl.-Ing. Drucksensoren und Kombinations-Druck-Sensoren sowie Verfahren zum Betrieb, zur Herstellung und zum Test derartiger Sensoren
DE102005008959B4 (de) * 2005-02-28 2012-08-30 Heinz Plöchinger Drucksensoren und Kombinations-Drucksensoren und deren Verwendung
DE102006018049A1 (de) * 2006-04-10 2007-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Keramische Drucksensoren und Verfahren zu ihrer Herstellung
DE102006018049B4 (de) * 2006-04-10 2008-10-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Keramische Drucksensoren und Verfahren zu ihrer Herstellung
DE102011006431A1 (de) * 2011-03-30 2012-10-04 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle

Also Published As

Publication number Publication date
CN1131460A (zh) 1996-09-18
US5483834A (en) 1996-01-16
JPH09503056A (ja) 1997-03-25
CA2169723A1 (en) 1995-03-30
DE69424557D1 (de) 2000-06-21
SG44487A1 (en) 1997-12-19
EP0720731B1 (de) 2000-05-17
EP0720731A1 (de) 1996-07-10
JP3447295B2 (ja) 2003-09-16
WO1995008757A1 (en) 1995-03-30

Similar Documents

Publication Publication Date Title
DE69424557T2 (de) Druckwandler mit aufgehangter membran
DE69417247D1 (de) Drucküberträger mit isoliermembran
DE69209519D1 (de) Druckwandler mit Verstärker
DE69427306T2 (de) Wasserundurchlässigkeitsmembran
DE69313820D1 (de) Tastaturfolie
DE59306542D1 (de) Elektrodenmembran
DE69409575D1 (de) Membranventil
DE3682144D1 (de) Halbdurchlaessige zusammengesetzte membran.
DE69229665D1 (de) Mehrschichtige, oberflächenkatalysierte Membran
DE59303017D1 (de) Ventil mit Druckkompensation
ITTO910327A0 (it) Membrane permselettive e loro impiego
DE3680046D1 (de) Druckwandler mit biegbarer membran.
DE69326254T2 (de) Membrane
ID17240A (id) Membran penutupan
DE69220891D1 (de) Mineralgefüllte, heisssiegelbare Dachbahn
DE69403160T2 (de) Tank mit profilierter Rollmembran
DE69401350T2 (de) Tragflügelboot mit segeln
DK0889245T3 (da) Membrankraftorgan
DE68904552D1 (de) Aufgehaengtes membrangefuege.
FR2700375B1 (fr) Membrane élastique imperméable.
DE69406027D1 (de) Ruder
DK95394A (da) Ion-selektiv membran
DE9317751U1 (de) Druckanzeigegerät
NO942934D0 (no) Membranmodul
DE9205418U1 (de) Druckkörper

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee