DE2937511A1 - Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung - Google Patents

Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung

Info

Publication number
DE2937511A1
DE2937511A1 DE19792937511 DE2937511A DE2937511A1 DE 2937511 A1 DE2937511 A1 DE 2937511A1 DE 19792937511 DE19792937511 DE 19792937511 DE 2937511 A DE2937511 A DE 2937511A DE 2937511 A1 DE2937511 A1 DE 2937511A1
Authority
DE
Germany
Prior art keywords
fiber
membrane
output fiber
pressure
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19792937511
Other languages
German (de)
English (en)
Inventor
Dipl.-Phys. Ingrid 8000 München Fromm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to DE19792937511 priority Critical patent/DE2937511A1/de
Priority to US06/181,697 priority patent/US4322978A/en
Priority to EP80105288A priority patent/EP0025564A3/de
Priority to JP12902280A priority patent/JPS5654329A/ja
Publication of DE2937511A1 publication Critical patent/DE2937511A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
DE19792937511 1979-09-17 1979-09-17 Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung Withdrawn DE2937511A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19792937511 DE2937511A1 (de) 1979-09-17 1979-09-17 Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung
US06/181,697 US4322978A (en) 1979-09-17 1980-08-27 Optical device for measuring slight pressure differences by means of light intensity changes
EP80105288A EP0025564A3 (de) 1979-09-17 1980-09-04 Optische Vorrichtung zum Messen geringer Druckdifferenzen mittels Lichtintensitätsänderung
JP12902280A JPS5654329A (en) 1979-09-17 1980-09-17 Optical device for measuring fine differential pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792937511 DE2937511A1 (de) 1979-09-17 1979-09-17 Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung

Publications (1)

Publication Number Publication Date
DE2937511A1 true DE2937511A1 (de) 1981-05-07

Family

ID=6081055

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792937511 Withdrawn DE2937511A1 (de) 1979-09-17 1979-09-17 Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung

Country Status (4)

Country Link
US (1) US4322978A (enExample)
EP (1) EP0025564A3 (enExample)
JP (1) JPS5654329A (enExample)
DE (1) DE2937511A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590229T1 (de) * 1984-06-06 1986-05-15 Dieterich Standard Corp., Boulder, Col. Optischer Sensor
DE102010037403A1 (de) * 2010-09-08 2012-03-08 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Anordnung und Verfahren zur Messung von Verbiegungen
DE102011107547A1 (de) * 2011-07-11 2013-01-17 Krohne Messtechnik Gmbh Vortex-Durchflussmessgerät, Druckaufnehmer für ein Vortex-Durchflussmessgerät und Verfahren zur Herstellung eines solchen Druckaufnehmers

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202823A (ja) * 1982-05-22 1983-11-26 Nippon Sheet Glass Co Ltd 投受光プロ−ブ
US4509370A (en) * 1982-09-30 1985-04-09 Regents Of The University Of California Pressure-sensitive optrode
FR2540987A1 (fr) * 1983-02-14 1984-08-17 Mecilec Sa Dispositifs electro-optiques de detection et de mesure de deformations
FR2548796B1 (fr) * 1983-07-08 1985-11-22 Comp Generale Electricite Dispositif optique pour determiner la position et la forme de la surface d'un objet
US4594504A (en) * 1983-09-08 1986-06-10 Rosemount Inc. Light modulation sensor in a vortex shedding flowmeter
US4547668A (en) * 1983-09-14 1985-10-15 Siemens Corporate Research & Support, Inc. Two-dimensional pressure sensor using retro-reflective tape and semi-transparent medium
US4588886A (en) * 1983-11-14 1986-05-13 Thermo-O-Disc Incorporated Fiber optics condition sensor and method of making same
EP0154025A1 (de) * 1983-12-29 1985-09-11 INTERATOM Gesellschaft mit beschränkter Haftung Verfahren zur direkten Umwandlung von Messgrössen in Veränderungen eines über Lichtleiter zu- und abgeleiteten Lichtsignals und Hybrid-Sensor zur Durchführung des Verfahrens
US4703174A (en) * 1984-03-02 1987-10-27 Fiberdynamics, Inc. Fiberoptic temperature/pressure sensor system
US4589286A (en) * 1984-03-30 1986-05-20 The Babcock & Wilcox Company Fused silica diaphragm module for high temperature pressure transducers
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
US4678905A (en) * 1984-05-18 1987-07-07 Luxtron Corporation Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
US4694159A (en) * 1984-06-06 1987-09-15 Dieterich Standard Corporation Optic sensor with reference and detecting optic circuits
JPS61275632A (ja) * 1985-05-31 1986-12-05 Toshiba Corp 圧力測定装置
JPS61235731A (ja) * 1985-04-11 1986-10-21 Sharp Corp 感圧素子
FR2580388A1 (fr) * 1985-04-12 1986-10-17 Commissariat Energie Atomique Capteur dimensionnel a fibres optiques
US4765220A (en) * 1987-09-25 1988-08-23 Rockwell International Corporation Strand supply carrier and tensioning mechanism
GB8815179D0 (en) * 1988-06-25 1988-08-03 Racal Safety Ltd Differential pressure sensor
GB2221164B (en) * 1988-07-26 1992-02-12 Racal Safety Ltd Breathing apparatus
JPS6453912U (enExample) * 1988-09-06 1989-04-03
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
US5185675A (en) * 1989-11-27 1993-02-09 Moog, Inc. Electro optic modulator systems for fiber optic information transmission
US5065010A (en) * 1990-08-30 1991-11-12 Camino Laboratories Fiber optic measurement system having a reference conductor for controlling the energy level of the light source
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ
US5446279A (en) * 1993-08-27 1995-08-29 Hughes Aircraft Company Fiber optic sensor sensing curvature of a diaphragm
US5657163A (en) * 1995-05-31 1997-08-12 Delco Electronics Corporation Fiber optic illumination of HUD image source
US5913260A (en) * 1996-07-17 1999-06-15 Creative Technology, Ltd. System and method for detecting deformation of a membrane
JP4717237B2 (ja) * 2001-03-26 2011-07-06 株式会社鷺宮製作所 圧力センサ用ダイヤフラム保護カバーおよび圧力センサ
US6659976B2 (en) * 2001-04-16 2003-12-09 Zevek, Inc. Feeding set adaptor
US6523414B1 (en) * 2001-04-16 2003-02-25 Zevex, Inc. Optical pressure monitoring system
US6941813B2 (en) * 2003-06-30 2005-09-13 Alcon, Inc. Noninvasive pressure sensing assembly
US8486020B2 (en) 2010-08-11 2013-07-16 Zevex, Inc. Pressure sensor and method of use
US8760637B2 (en) 2010-08-30 2014-06-24 Alcon Research, Ltd. Optical sensing system including electronically switched optical magnification
AU2011308700B2 (en) 2010-10-01 2015-04-02 Zevex, Inc. Pressure sensor seal and method of use
EP2621555B1 (en) 2010-10-01 2019-10-23 Zevex, Inc. Pressure monitoring system for infusion pumps
NL2017595A (en) * 2015-11-10 2017-05-26 Asml Netherlands Bv Proximity sensor, lithographic apparatus and device manufacturing method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864018A (en) * 1973-10-18 1975-02-04 Bell Telephone Labor Inc Method and means for splicing arrays of optical fibers
DE2450080A1 (de) * 1974-10-22 1976-04-29 Licentia Gmbh Verfahren und einrichtung zur druckmessung
CH578172A5 (en) * 1975-06-10 1976-07-30 Sprecher & Schuh Ag Pressure measurement of time pressure pattern - is from earth potential in space for high voltage potential and uses housing with metallized diaphragm
US4071753A (en) * 1975-03-31 1978-01-31 Gte Laboratories Incorporated Transducer for converting acoustic energy directly into optical energy
DE2837068A1 (de) * 1978-08-24 1980-02-28 Siemens Ag Akusto-optischer modulator zur modulation der lichtintensitaet

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3215135A (en) * 1963-02-04 1965-11-02 Ernst K Franke Miniature pressure gauge for the measurement of intravascular blood pressure
US3273447A (en) * 1963-08-26 1966-09-20 Franklin Institute Detection and measurement device having a small flexible fiber transmission line
US3503116A (en) * 1967-10-09 1970-03-31 Bendix Corp Method of fabricating a pressure transducer
FR2102628A5 (enExample) * 1970-08-12 1972-04-07 Compteurs Comp D
FR2417753A1 (fr) * 1978-02-15 1979-09-14 Hitachi Ltd Systeme de mesure optique a distance et de controle d'un objet subissant une transformation physique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864018A (en) * 1973-10-18 1975-02-04 Bell Telephone Labor Inc Method and means for splicing arrays of optical fibers
DE2450080A1 (de) * 1974-10-22 1976-04-29 Licentia Gmbh Verfahren und einrichtung zur druckmessung
US4071753A (en) * 1975-03-31 1978-01-31 Gte Laboratories Incorporated Transducer for converting acoustic energy directly into optical energy
CH578172A5 (en) * 1975-06-10 1976-07-30 Sprecher & Schuh Ag Pressure measurement of time pressure pattern - is from earth potential in space for high voltage potential and uses housing with metallized diaphragm
DE2837068A1 (de) * 1978-08-24 1980-02-28 Siemens Ag Akusto-optischer modulator zur modulation der lichtintensitaet

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Z: Frequenz, Bd. 32, 1978, H. 12, S. 356-363 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590229T1 (de) * 1984-06-06 1986-05-15 Dieterich Standard Corp., Boulder, Col. Optischer Sensor
DE102010037403A1 (de) * 2010-09-08 2012-03-08 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Anordnung und Verfahren zur Messung von Verbiegungen
DE102010037403B4 (de) * 2010-09-08 2013-08-14 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Anordnung zur Messung von Verbiegungen
DE102011107547A1 (de) * 2011-07-11 2013-01-17 Krohne Messtechnik Gmbh Vortex-Durchflussmessgerät, Druckaufnehmer für ein Vortex-Durchflussmessgerät und Verfahren zur Herstellung eines solchen Druckaufnehmers
DE102011107547B4 (de) * 2011-07-11 2015-08-06 Krohne Messtechnik Gmbh Druckaufnehmer für ein Vortex-Durchflussmessgerät, Vortex-Durchflussmessgerät und Verfahren zur Herstellung eines solchen Druckaufnehmers

Also Published As

Publication number Publication date
JPS6148096B2 (enExample) 1986-10-22
JPS5654329A (en) 1981-05-14
EP0025564A2 (de) 1981-03-25
US4322978A (en) 1982-04-06
EP0025564A3 (de) 1983-02-23

Similar Documents

Publication Publication Date Title
DE2937511A1 (de) Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung
DE69106367T2 (de) Druckwandler mit optischer faser.
DE69817032T2 (de) Optischer drucksensor
DE3784291T2 (de) Faseroptisches verschiebungsmessgeraet.
DE69527339T2 (de) Sensor und Verfahren zum Messen von Abständen zu einem Medium und/oder dessen physischen Eigenschaften
EP0025565A2 (de) Optische Vorrichtung zum Messen von Druckdifferenzen mittels Lichtintensitätsänderung
DE3935083C2 (enExample)
EP0713112A1 (de) Optische Sende- und Empfangseinrichtung mit einem oberflächenemittierenden Laser
DE2914262A1 (de) Optisches daempfungsglied fuer lichtleitfasern
EP0604645B1 (de) Faseroptischer sensor nach dem fabry-perot-prinzip
DE2937485A1 (de) Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung
EP0124145A2 (de) Faser-optischer Drucksensor
DE2748173C3 (de) Beschleunigungsmesser
EP0116131A2 (de) Faseroptischer Geber
DE2326841B2 (de) Optische kollimatorvorrichtung fuer die blickfeldanzeige
DE68901727T2 (de) Optischer leistungsmesser.
DE2746497A1 (de) Lichtleiteranschluss fuer optische koppelanordnungen
DE4240804C2 (de) Einrichtung zum Erkennen der Lage und/oder zum Messen der Breite eines Aufzeichnungsträgers
DE3422988A1 (de) Verfahren und vorrichtung zum messen der querkontraktion einer laenglichen probe
EP0140821A2 (de) Justiervorrichtung für die Feinsteinstellung der optischen Kopplung zwischen zwei optischen Elementen und Verwendung der Justiervorrichtung für einen Halbleiterlaser und einen faserförmigen Lichtwellenleiter
EP1257808A1 (de) Hochdruckfester kompakter präzisionsmesskopf für optische brechungsindexmessungen in flüssigkeiten
DD242105A1 (de) Beleuchtungseinrichtung fuer mikroskope und projektoren
DE3903881C1 (enExample)
EP0092505A1 (de) Faseroptischer Geber
DE2929186C2 (enExample)

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8139 Disposal/non-payment of the annual fee