DE2904171C2 - - Google Patents

Info

Publication number
DE2904171C2
DE2904171C2 DE2904171A DE2904171A DE2904171C2 DE 2904171 C2 DE2904171 C2 DE 2904171C2 DE 2904171 A DE2904171 A DE 2904171A DE 2904171 A DE2904171 A DE 2904171A DE 2904171 C2 DE2904171 C2 DE 2904171C2
Authority
DE
Germany
Prior art keywords
deposition
amorphous silicon
substrate
layer
indicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2904171A
Other languages
German (de)
English (en)
Other versions
DE2904171A1 (de
Inventor
Rolf Dr.Phil.Nat. 8012 Ottobrunn De Plaettner
Wolfgang Dr.Rer.Nat. 8025 Unterhaching De Kruehler
Josef Dr.Rer.Nat. 8111 Berg De Grabmaier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19792904171 priority Critical patent/DE2904171A1/de
Priority to FR8001751A priority patent/FR2454182A1/fr
Priority to US06/116,982 priority patent/US4292343A/en
Priority to JP1140280A priority patent/JPS55107228A/ja
Priority to GB8003675A priority patent/GB2043042B/en
Publication of DE2904171A1 publication Critical patent/DE2904171A1/de
Application granted granted Critical
Publication of DE2904171C2 publication Critical patent/DE2904171C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02425—Conductive materials, e.g. metallic silicides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
DE19792904171 1979-02-05 1979-02-05 Verfahren zum herstellen von aus amorphem silizium bestehenden halbleiterkoerpern durch glimmentladung Granted DE2904171A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19792904171 DE2904171A1 (de) 1979-02-05 1979-02-05 Verfahren zum herstellen von aus amorphem silizium bestehenden halbleiterkoerpern durch glimmentladung
FR8001751A FR2454182A1 (fr) 1979-02-05 1980-01-28 Procede pour fabriquer des corps semi-conducteurs constitues par du silicium amorphe, au moyen d'une decharge par effluves
US06/116,982 US4292343A (en) 1979-02-05 1980-01-30 Method of manufacturing semiconductor bodies composed of amorphous silicon
JP1140280A JPS55107228A (en) 1979-02-05 1980-02-01 Method of and device for fabricating amorphous silicon semiconductor
GB8003675A GB2043042B (en) 1979-02-05 1980-02-04 Production of semiconductor bodies made of amorphous silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792904171 DE2904171A1 (de) 1979-02-05 1979-02-05 Verfahren zum herstellen von aus amorphem silizium bestehenden halbleiterkoerpern durch glimmentladung

Publications (2)

Publication Number Publication Date
DE2904171A1 DE2904171A1 (de) 1980-08-14
DE2904171C2 true DE2904171C2 (enrdf_load_stackoverflow) 1989-04-06

Family

ID=6062128

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792904171 Granted DE2904171A1 (de) 1979-02-05 1979-02-05 Verfahren zum herstellen von aus amorphem silizium bestehenden halbleiterkoerpern durch glimmentladung

Country Status (5)

Country Link
US (1) US4292343A (enrdf_load_stackoverflow)
JP (1) JPS55107228A (enrdf_load_stackoverflow)
DE (1) DE2904171A1 (enrdf_load_stackoverflow)
FR (1) FR2454182A1 (enrdf_load_stackoverflow)
GB (1) GB2043042B (enrdf_load_stackoverflow)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730325A (en) * 1980-07-30 1982-02-18 Nec Corp Manufacture of amorphous silicon thin film
DE3208494C2 (de) * 1981-03-09 1993-09-30 Canon Kk Verfahren zur Herstellung eines fotoleitfähigen Elements
US4490208A (en) * 1981-07-08 1984-12-25 Agency Of Industrial Science And Technology Method of producing thin films of silicon
US4401687A (en) * 1981-11-12 1983-08-30 Advanced Semiconductor Materials America Plasma deposition of silicon
US4379943A (en) * 1981-12-14 1983-04-12 Energy Conversion Devices, Inc. Current enhanced photovoltaic device
DE3206421A1 (de) * 1982-02-23 1983-09-01 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von schichten aus hochschmelzenden metallen bzw. metallverbindungen durch abscheidung aus der dampfphase
JPS60200523A (ja) * 1984-03-26 1985-10-11 Agency Of Ind Science & Technol シリコン薄膜の製造法
GB2193976B (en) * 1986-03-19 1990-05-30 Gen Electric Plc Process for depositing a polysilicon film on a substrate
ES2040914T3 (es) * 1988-03-24 1993-11-01 Siemens Aktiengesellschaft Procedimiento y dispositivo para la elaboracion de capas semiconductoras que consisten de aleaciones amorfas de silicio-germanio segun la tecnica de descarga de efluvios, sobre todo para celulas solares.
CA2014540A1 (en) * 1989-04-18 1990-10-18 Mitsui Toatsu Chemicals, Inc. Method for forming semiconductor thin film
JPH10511507A (ja) * 1995-10-20 1998-11-04 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 選択的に堆積された半導体領域を有する半導体装置の製造
EP1160799A4 (en) 1999-01-11 2003-02-26 Ebara Corp REACTION DEVICE FOR ELECTRON BEAM PROJECTION SYSTEM
US6613695B2 (en) * 2000-11-24 2003-09-02 Asm America, Inc. Surface preparation prior to deposition
US6960537B2 (en) 2001-10-02 2005-11-01 Asm America, Inc. Incorporation of nitrogen into high k dielectric film
TWI233204B (en) * 2002-07-26 2005-05-21 Infineon Technologies Ag Nonvolatile memory element and associated production methods and memory element arrangements
US8557702B2 (en) 2009-02-02 2013-10-15 Asm America, Inc. Plasma-enhanced atomic layers deposition of conductive material over dielectric layers
US20100294367A1 (en) * 2009-05-19 2010-11-25 Honeywell International Inc. Solar cell with enhanced efficiency
US20110108102A1 (en) * 2009-11-06 2011-05-12 Honeywell International Inc. Solar cell with enhanced efficiency
CN111850471B (zh) * 2019-04-25 2023-05-12 芝浦机械电子装置株式会社 成膜装置以及成膜方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
US4064521A (en) * 1975-07-28 1977-12-20 Rca Corporation Semiconductor device having a body of amorphous silicon
DE2547692C3 (de) * 1975-10-24 1979-10-31 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen einer Halbleiteranordnung
US4004954A (en) * 1976-02-25 1977-01-25 Rca Corporation Method of selective growth of microcrystalline silicon
CA1078078A (en) * 1976-03-22 1980-05-20 David E. Carlson Schottky barrier semiconductor device and method of making same
US4196438A (en) * 1976-09-29 1980-04-01 Rca Corporation Article and device having an amorphous silicon containing a halogen and method of fabrication
FR2394173A1 (fr) * 1977-06-06 1979-01-05 Thomson Csf Procede de fabrication de dispositifs electroniques qui comportent une couche mince de silicium amorphe et dispositif electronique obtenu par un tel procede
US4202928A (en) * 1978-07-24 1980-05-13 Rca Corporation Updateable optical storage medium

Also Published As

Publication number Publication date
US4292343A (en) 1981-09-29
JPS55107228A (en) 1980-08-16
JPH0127570B2 (enrdf_load_stackoverflow) 1989-05-30
FR2454182A1 (fr) 1980-11-07
DE2904171A1 (de) 1980-08-14
GB2043042B (en) 1983-01-12
GB2043042A (en) 1980-10-01
FR2454182B1 (enrdf_load_stackoverflow) 1983-08-05

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Legal Events

Date Code Title Description
OAM Search report available
OC Search report available
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: H01L 21/205

D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee