DE2732696A1 - Verfahren und vorrichtung zur evakuierung eines rezipienten - Google Patents

Verfahren und vorrichtung zur evakuierung eines rezipienten

Info

Publication number
DE2732696A1
DE2732696A1 DE19772732696 DE2732696A DE2732696A1 DE 2732696 A1 DE2732696 A1 DE 2732696A1 DE 19772732696 DE19772732696 DE 19772732696 DE 2732696 A DE2732696 A DE 2732696A DE 2732696 A1 DE2732696 A1 DE 2732696A1
Authority
DE
Germany
Prior art keywords
valve
time
recipient
pump
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19772732696
Other languages
German (de)
English (en)
Inventor
Guenter Dr Reich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19772732696 priority Critical patent/DE2732696A1/de
Priority to GB787830075A priority patent/GB2001393B/en
Priority to CH773978A priority patent/CH640311A5/de
Priority to FR7821558A priority patent/FR2398199A1/fr
Publication of DE2732696A1 publication Critical patent/DE2732696A1/de
Priority to US05/926,229 priority patent/US4172477A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/08—Control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE19772732696 1977-07-20 1977-07-20 Verfahren und vorrichtung zur evakuierung eines rezipienten Withdrawn DE2732696A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19772732696 DE2732696A1 (de) 1977-07-20 1977-07-20 Verfahren und vorrichtung zur evakuierung eines rezipienten
GB787830075A GB2001393B (en) 1977-07-20 1978-07-17 Method and apparatus for the evacuation of a receptacle
CH773978A CH640311A5 (de) 1977-07-20 1978-07-18 Verfahren und vorrichtung zur evakuierung eines rezipienten.
FR7821558A FR2398199A1 (fr) 1977-07-20 1978-07-20 Procede et dispositif pour realiser le vide dans un recipient
US05/926,229 US4172477A (en) 1977-07-20 1979-07-20 Generation of high vacuums

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772732696 DE2732696A1 (de) 1977-07-20 1977-07-20 Verfahren und vorrichtung zur evakuierung eines rezipienten

Publications (1)

Publication Number Publication Date
DE2732696A1 true DE2732696A1 (de) 1979-02-22

Family

ID=6014343

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772732696 Withdrawn DE2732696A1 (de) 1977-07-20 1977-07-20 Verfahren und vorrichtung zur evakuierung eines rezipienten

Country Status (5)

Country Link
US (1) US4172477A (enExample)
CH (1) CH640311A5 (enExample)
DE (1) DE2732696A1 (enExample)
FR (1) FR2398199A1 (enExample)
GB (1) GB2001393B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4648804A (en) * 1985-09-27 1987-03-10 Intel Corporation Aspirator pump device for use in semiconductor processing
US4725204A (en) * 1986-11-05 1988-02-16 Pennwalt Corporation Vacuum manifold pumping system
DE102004044077A1 (de) * 2004-05-06 2005-11-24 Andreas Oesterlein Verfahren zum Steuern einer Vakuumverpackungsmaschine sowie Vakuumverpackungsmaschine

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54140585A (en) * 1978-04-24 1979-10-31 Diesel Kiki Co Fluid circuit leakage detector
DE2928336B1 (de) * 1979-07-13 1980-12-18 Pfeiffer Vakuumtechnik Leckraten-Messeinrichtung
US4294107A (en) * 1980-05-19 1981-10-13 Walle L Irwin Self-purging probe for low pressure leak detection
US4409817A (en) * 1981-03-25 1983-10-18 Edwards Jr David Vacuum leak detector and method
US4441244A (en) * 1981-10-29 1984-04-10 Dresser Industries, Inc. Sealed bearing rotary rock bit assembly
US4683745A (en) * 1986-08-28 1987-08-04 Westvaco Corporation Cannister seal integrity tester
US4796676A (en) * 1987-06-05 1989-01-10 Hendershot John A Fluid storage tank system
US5240046A (en) * 1989-03-03 1993-08-31 Eaton Corporation Fluid flow control method and apparatus for minimizing particle contamination
US5176187A (en) * 1989-06-27 1993-01-05 Ashland Oil, Inc. Flexible gas salvage containers and process for use
MX9205731A (es) * 1991-10-07 1993-11-01 Taknology Corp International Metodo para confirmar la presencia de una fuga en un tanque de almacenamiento de liquido.
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
DE4315165A1 (de) * 1993-05-07 1994-11-10 Leybold Ag Vakuumpumpe
US5450883A (en) * 1994-02-07 1995-09-19 Gilbarco, Inc. System and method for testing for error conditions in a fuel vapor recovery system
US5465765A (en) * 1994-04-15 1995-11-14 Martindale; Jack E. Vacuum apparatus for developing fingerprints
US5541520A (en) * 1994-10-31 1996-07-30 International Business Machines Corporation Filtering for electronic module test
SE507197C2 (sv) * 1996-08-26 1998-04-20 Getinge Skaerhamn Ab Metod att testa luftläckage
US6311621B1 (en) 1996-11-01 2001-11-06 The Ensign-Bickford Company Shock-resistant electronic circuit assembly
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
US5806575A (en) * 1997-04-11 1998-09-15 Tsay; Shiu Chu Vacuum extractor of a vacuum container
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6336479B1 (en) 2000-02-07 2002-01-08 Marconi Commerce Systems Inc. Determining vapor recovery in a fueling system
US20030202874A1 (en) * 2002-04-29 2003-10-30 Marsbed Hablanian Methods and apparatus for controlling power in vapor jet vacuum pumps
US7107820B2 (en) * 2003-05-02 2006-09-19 Praxair S.T. Technology, Inc. Integrated gas supply and leak detection system
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
ES2665764T3 (es) * 2009-11-20 2018-04-27 Packaging Technologies & Inspection Llc Estado de vacío en reposo para procedimiento y sistema de prueba de estanqueidad mediante medida de disminución del vacío
US10695953B2 (en) 2012-05-31 2020-06-30 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous carpet filament
US10532495B2 (en) 2012-05-31 2020-01-14 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from recycled PET
US10487422B2 (en) 2012-05-31 2019-11-26 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from colored recycled pet
US10538016B2 (en) 2012-05-31 2020-01-21 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous carpet filament
US9636860B2 (en) 2012-05-31 2017-05-02 Mohawk Industries, Inc. Method of manufacturing bulked continuous filament
US8597553B1 (en) 2012-05-31 2013-12-03 Mohawk Industries, Inc. Systems and methods for manufacturing bulked continuous filament
US9630353B2 (en) 2012-05-31 2017-04-25 Mohawk Industries, Inc. Method of manufacturing bulked continuous filament
US11045979B2 (en) 2012-05-31 2021-06-29 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from recycled PET
CN102829004B (zh) * 2012-09-05 2016-09-07 常州大成绿色镀膜科技有限公司 一种防爆油扩散泵真空系统及其防爆控制方法
JP6613402B2 (ja) * 2015-03-13 2019-12-04 Ｖｉｓｔａ株式会社 真空排気監視装置
CN104832398B (zh) * 2015-04-14 2018-02-06 山西南烨立碁光电有限公司 抽真空设备
US10751915B2 (en) 2016-11-10 2020-08-25 Aladdin Manufacturing Corporation Polyethylene terephthalate coloring systems and methods
EP4219114B1 (en) 2017-01-30 2024-10-30 Aladdin Manufacturing Corporation Systems and methods for manufacturing items from colored recycled pet
AU2018227587A1 (en) 2017-03-03 2019-08-22 Aladdin Manufacturing Corporation Method of manufacturing bulked continuous carpet filament
US11618973B2 (en) 2017-09-15 2023-04-04 Aladdin Manufacturing Corporation Polyethylene terephthalate coloring systems and methods
US11242622B2 (en) 2018-07-20 2022-02-08 Aladdin Manufacturing Corporation Bulked continuous carpet filament manufacturing from polytrimethylene terephthalate
EP3980587A1 (en) 2019-06-05 2022-04-13 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous carpet filament

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503708B1 (de) * 1965-10-27 1970-11-26 Alcatel Sa Vakuumpumpanlage
DE2015956A1 (de) * 1970-04-03 1971-10-21 Leybold Heraeus Gmbh & Co Kg Schaltverfahren fur Vakuumlecksucher

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2492075A (en) * 1945-10-30 1949-12-20 Kinney Mfg Company Vacuum pump
US2652188A (en) * 1948-07-08 1953-09-15 Cyr Rob Roy Automatic tank pump down
DE808870C (de) 1949-07-29 1951-07-19 Hans Ulbricht Steuerung fuer eine Hochvakuumpumpanlage
DE1059144B (de) 1956-11-20 1959-06-11 Jenoptik Jena Gmbh Automatisches Schutzventil fuer Vakuum- oder Hochvakuumanlagen
FR1264439A (fr) * 1960-08-05 1961-06-19 Balzers Hochvakuum Procédé d'emploi des installations de pompes à vide très poussé
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US3480200A (en) * 1968-02-19 1969-11-25 Varian Associates Vacuum actuator and vacuum system using same
CH470589A (de) 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US3818752A (en) * 1971-04-28 1974-06-25 N Lindeberg Method and apparatus for testing tightness

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503708B1 (de) * 1965-10-27 1970-11-26 Alcatel Sa Vakuumpumpanlage
DE2015956A1 (de) * 1970-04-03 1971-10-21 Leybold Heraeus Gmbh & Co Kg Schaltverfahren fur Vakuumlecksucher

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4648804A (en) * 1985-09-27 1987-03-10 Intel Corporation Aspirator pump device for use in semiconductor processing
US4725204A (en) * 1986-11-05 1988-02-16 Pennwalt Corporation Vacuum manifold pumping system
DE102004044077A1 (de) * 2004-05-06 2005-11-24 Andreas Oesterlein Verfahren zum Steuern einer Vakuumverpackungsmaschine sowie Vakuumverpackungsmaschine

Also Published As

Publication number Publication date
CH640311A5 (de) 1983-12-30
GB2001393B (en) 1982-02-17
US4172477A (en) 1979-10-30
FR2398199B1 (enExample) 1983-01-07
FR2398199A1 (fr) 1979-02-16
GB2001393A (en) 1979-01-31

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Legal Events

Date Code Title Description
OAM Search report available
OC Search report available
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: LEYBOLD AG, 6450 HANAU, DE

8139 Disposal/non-payment of the annual fee