DE2635660C2 - Absperrvorrichtung für Maschinen zum Schweißen mittels Elektronenbeschuß - Google Patents
Absperrvorrichtung für Maschinen zum Schweißen mittels ElektronenbeschußInfo
- Publication number
- DE2635660C2 DE2635660C2 DE2635660A DE2635660A DE2635660C2 DE 2635660 C2 DE2635660 C2 DE 2635660C2 DE 2635660 A DE2635660 A DE 2635660A DE 2635660 A DE2635660 A DE 2635660A DE 2635660 C2 DE2635660 C2 DE 2635660C2
- Authority
- DE
- Germany
- Prior art keywords
- shut
- slide
- bore
- chamber
- workpieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003466 welding Methods 0.000 title claims description 15
- 238000007789 sealing Methods 0.000 claims description 19
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000000007 visual effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 210000000056 organ Anatomy 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 108091034120 Epstein–Barr virus-encoded small RNA Proteins 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Lift Valve (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7526205A FR2321976A1 (fr) | 1975-08-26 | 1975-08-26 | Vanne d'isolement pour machine de soudage par bombardement electronique et machines munies d'une telle vanne |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2635660A1 DE2635660A1 (de) | 1977-03-10 |
| DE2635660C2 true DE2635660C2 (de) | 1983-09-01 |
Family
ID=9159335
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2635660A Expired DE2635660C2 (de) | 1975-08-26 | 1976-08-07 | Absperrvorrichtung für Maschinen zum Schweißen mittels Elektronenbeschuß |
| DE7624897U Expired DE7624897U1 (de) | 1975-08-26 | 1976-08-07 | Isolierventil für Maschinen zum Schweiften mittels Elektronenbeschuß |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE7624897U Expired DE7624897U1 (de) | 1975-08-26 | 1976-08-07 | Isolierventil für Maschinen zum Schweiften mittels Elektronenbeschuß |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4068112A (OSRAM) |
| JP (1) | JPS5227037A (OSRAM) |
| DE (2) | DE2635660C2 (OSRAM) |
| FR (1) | FR2321976A1 (OSRAM) |
| GB (1) | GB1505604A (OSRAM) |
| IT (1) | IT1066993B (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH077793B2 (ja) * | 1984-04-20 | 1995-01-30 | 日本電気株式会社 | 半導体装置の製造方法 |
| JPH0621164Y2 (ja) * | 1988-11-29 | 1994-06-01 | 神鋼電機株式会社 | 電子ビーム銃の制御装置 |
| JP2002257998A (ja) * | 2001-02-28 | 2002-09-11 | Sony Corp | 電子ビーム照射装置及び電子ビーム照射装置における真空シール方法 |
| WO2007101295A1 (en) * | 2006-03-07 | 2007-09-13 | Symutech Pty Limited | A valve |
| US11261982B2 (en) * | 2019-06-27 | 2022-03-01 | Proserv Gilmore Valve Llc | Pressure relief valve with bi-directional seat |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE874819C (de) * | 1934-12-14 | 1953-04-27 | Ernst Ruska Dr Ing | Vorrichtung zum Einbringen von einzuschleusenden Gegenstaenden in das Vakuum von Korpuskularstrahlapparaten |
| BE516357A (OSRAM) * | 1951-12-20 | |||
| BE634510A (OSRAM) * | 1962-07-05 | |||
| US3169183A (en) * | 1962-10-17 | 1965-02-09 | United Aircraft Corp | Optical viewing system for electron beam machine |
| US3426799A (en) * | 1964-10-07 | 1969-02-11 | Kinwell Dev Co | Automatic valve |
| FR1506308A (fr) * | 1966-04-15 | 1967-12-22 | Commissariat Energie Atomique | Procédé et dispositif de soudage par bombardement électronique |
| US3529123A (en) * | 1968-07-24 | 1970-09-15 | Smith Corp A O | Electron beam heating with controlled beam |
| US3635436A (en) * | 1970-04-27 | 1972-01-18 | Marotta Scientific Controls | Straight-through flow valve with restricting seals |
| US3773082A (en) * | 1971-01-05 | 1973-11-20 | Bio Logics Products | Fluid valve |
| US3887784A (en) * | 1971-12-27 | 1975-06-03 | Commissariat Energie Atomique | Welding guns |
| US3890991A (en) * | 1972-04-17 | 1975-06-24 | M & J Valve Co | Valve apparatus and method |
| US3985154A (en) * | 1975-10-24 | 1976-10-12 | Emerson Electric Co. | Four-way valve |
| SE419378B (sv) * | 1977-09-02 | 1981-07-27 | Inst Fiziki Vysokikh Davleny | Forfarande for kontroll av de mekaniska egenskaperna hos alster av ytterst harda material |
-
1975
- 1975-08-26 FR FR7526205A patent/FR2321976A1/fr active Granted
-
1976
- 1976-08-07 DE DE2635660A patent/DE2635660C2/de not_active Expired
- 1976-08-07 DE DE7624897U patent/DE7624897U1/de not_active Expired
- 1976-08-09 US US05/712,895 patent/US4068112A/en not_active Expired - Lifetime
- 1976-08-11 GB GB33431/76A patent/GB1505604A/en not_active Expired
- 1976-08-25 IT IT26540/76A patent/IT1066993B/it active
- 1976-08-26 JP JP51101190A patent/JPS5227037A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE7624897U1 (de) | 1976-12-30 |
| DE2635660A1 (de) | 1977-03-10 |
| IT1066993B (it) | 1985-03-12 |
| FR2321976A1 (fr) | 1977-03-25 |
| JPS5227037A (en) | 1977-03-01 |
| FR2321976B1 (OSRAM) | 1978-12-01 |
| GB1505604A (en) | 1978-03-30 |
| US4068112A (en) | 1978-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |