DE2607788C2 - Meßanordnung für Sekundärelektronen mit einer im Primärelektronen-Strahlengang eines Raster-Elektronenmikroskops angeordneten Sekundärelektronen-Kollektorkammer - Google Patents

Meßanordnung für Sekundärelektronen mit einer im Primärelektronen-Strahlengang eines Raster-Elektronenmikroskops angeordneten Sekundärelektronen-Kollektorkammer

Info

Publication number
DE2607788C2
DE2607788C2 DE2607788A DE2607788A DE2607788C2 DE 2607788 C2 DE2607788 C2 DE 2607788C2 DE 2607788 A DE2607788 A DE 2607788A DE 2607788 A DE2607788 A DE 2607788A DE 2607788 C2 DE2607788 C2 DE 2607788C2
Authority
DE
Germany
Prior art keywords
secondary electron
electron
chamber
secondary electrons
measuring arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2607788A
Other languages
German (de)
English (en)
Other versions
DE2607788A1 (de
Inventor
George Vasilievič Hopewell Junction N.Y. Lukianoff
Theodore Richard Poughkeepsie N.Y. Touw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2607788A1 publication Critical patent/DE2607788A1/de
Application granted granted Critical
Publication of DE2607788C2 publication Critical patent/DE2607788C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
DE2607788A 1975-03-06 1976-02-26 Meßanordnung für Sekundärelektronen mit einer im Primärelektronen-Strahlengang eines Raster-Elektronenmikroskops angeordneten Sekundärelektronen-Kollektorkammer Expired DE2607788C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/556,044 US3961190A (en) 1975-03-06 1975-03-06 Voltage contrast detector for a scanning electron beam instrument

Publications (2)

Publication Number Publication Date
DE2607788A1 DE2607788A1 (de) 1976-09-16
DE2607788C2 true DE2607788C2 (de) 1984-10-25

Family

ID=24219666

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2607788A Expired DE2607788C2 (de) 1975-03-06 1976-02-26 Meßanordnung für Sekundärelektronen mit einer im Primärelektronen-Strahlengang eines Raster-Elektronenmikroskops angeordneten Sekundärelektronen-Kollektorkammer

Country Status (6)

Country Link
US (1) US3961190A (Direct)
JP (1) JPS583587B2 (Direct)
DE (1) DE2607788C2 (Direct)
FR (1) FR2303285A1 (Direct)
GB (1) GB1514059A (Direct)
IT (1) IT1055303B (Direct)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
DE3235698A1 (de) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung
JPS59106681A (ja) * 1982-12-07 1984-06-20 トステム株式会社 建具枠コ−ナ−部の固定装置
JPS6090391U (ja) * 1983-11-28 1985-06-20 不二サッシ株式会社 サツシコ−ナの構造
EP0178431B1 (de) * 1984-09-18 1990-02-28 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Gegenfeld-Spektrometer für die Elektronenstrahl-Messtechnik
US4766372A (en) * 1987-02-10 1988-08-23 Intel Corporation Electron beam tester
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components
US6075245A (en) * 1998-01-12 2000-06-13 Toro-Lira; Guillermo L. High speed electron beam based system for testing large area flat panel displays
US6586736B1 (en) * 1999-09-10 2003-07-01 Kla-Tencor, Corporation Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
US6664546B1 (en) 2000-02-10 2003-12-16 Kla-Tencor In-situ probe for optimizing electron beam inspection and metrology based on surface potential
US6642726B2 (en) * 2001-06-29 2003-11-04 Kla-Tencor Corporation Apparatus and methods for reliable and efficient detection of voltage contrast defects
US6861666B1 (en) 2001-10-17 2005-03-01 Kla-Tencor Technologies Corporation Apparatus and methods for determining and localization of failures in test structures using voltage contrast
US7385197B2 (en) * 2004-07-08 2008-06-10 Ebara Corporation Electron beam apparatus and a device manufacturing method using the same apparatus
US7005652B1 (en) * 2004-10-04 2006-02-28 The United States Of America As Represented By National Security Agency Sample-stand for scanning electron microscope
JP6518442B2 (ja) * 2015-01-07 2019-05-22 日本電子株式会社 電子検出装置および走査電子顕微鏡

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
US3445708A (en) * 1967-02-06 1969-05-20 Gen Electric Electron diffraction unit
GB1304344A (Direct) * 1969-02-01 1973-01-24
US3641341A (en) * 1969-12-23 1972-02-08 Hughes Aircraft Co Ion beam image converter
DE2216821B1 (de) * 1972-04-07 1973-09-27 Siemens Ag, 1000 Berlin U. 8000 Muenchenss Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen
GB1447983A (en) * 1973-01-10 1976-09-02 Nat Res Dev Detector for electron microscopes

Also Published As

Publication number Publication date
JPS583587B2 (ja) 1983-01-21
FR2303285B1 (Direct) 1978-05-19
GB1514059A (en) 1978-06-14
IT1055303B (it) 1981-12-21
DE2607788A1 (de) 1976-09-16
JPS51110965A (Direct) 1976-09-30
FR2303285A1 (fr) 1976-10-01
US3961190A (en) 1976-06-01

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Legal Events

Date Code Title Description
OD Request for examination
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee