DE2557273A1 - Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheiben - Google Patents
Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheibenInfo
- Publication number
- DE2557273A1 DE2557273A1 DE19752557273 DE2557273A DE2557273A1 DE 2557273 A1 DE2557273 A1 DE 2557273A1 DE 19752557273 DE19752557273 DE 19752557273 DE 2557273 A DE2557273 A DE 2557273A DE 2557273 A1 DE2557273 A1 DE 2557273A1
- Authority
- DE
- Germany
- Prior art keywords
- bracket
- brackets
- elastic system
- discs
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 title claims description 26
- 235000012431 wafers Nutrition 0.000 claims description 27
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000003287 bathing Methods 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000000481 breast Anatomy 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18398575A DD120400A1 (enrdf_load_stackoverflow) | 1975-02-04 | 1975-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2557273A1 true DE2557273A1 (de) | 1976-08-05 |
Family
ID=5499041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752557273 Withdrawn DE2557273A1 (de) | 1975-02-04 | 1975-12-19 | Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheiben |
Country Status (6)
| Country | Link |
|---|---|
| CS (1) | CS181534B1 (enrdf_load_stackoverflow) |
| DD (1) | DD120400A1 (enrdf_load_stackoverflow) |
| DE (1) | DE2557273A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2300025A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1508748A (enrdf_load_stackoverflow) |
| SU (1) | SU618331A1 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0134621A1 (en) * | 1983-05-20 | 1985-03-20 | Proconics International Inc. | Apparatus for the automatic, precise transport of objects, e.g. semiconductor wafers |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2194500B (en) * | 1986-07-04 | 1991-01-23 | Canon Kk | A wafer handling apparatus |
| DE19907210A1 (de) * | 1999-02-23 | 2000-08-31 | Krauss Maffei Kunststofftech | Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen |
-
1975
- 1975-02-04 DD DD18398575A patent/DD120400A1/xx unknown
- 1975-12-19 DE DE19752557273 patent/DE2557273A1/de not_active Withdrawn
-
1976
- 1976-01-14 FR FR7600863A patent/FR2300025A1/fr active Granted
- 1976-01-26 SU SU762322601A patent/SU618331A1/ru active
- 1976-02-03 CS CS67576A patent/CS181534B1/cs unknown
- 1976-02-04 GB GB434876A patent/GB1508748A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0134621A1 (en) * | 1983-05-20 | 1985-03-20 | Proconics International Inc. | Apparatus for the automatic, precise transport of objects, e.g. semiconductor wafers |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1508748A (en) | 1978-04-26 |
| SU618331A1 (ru) | 1978-08-05 |
| CS181534B1 (en) | 1978-03-31 |
| FR2300025B3 (enrdf_load_stackoverflow) | 1978-10-06 |
| FR2300025A1 (fr) | 1976-09-03 |
| DD120400A1 (enrdf_load_stackoverflow) | 1976-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |