CS181534B1 - Transporting and transfering equipment for plates esp.for semiconducting ones - Google Patents

Transporting and transfering equipment for plates esp.for semiconducting ones

Info

Publication number
CS181534B1
CS181534B1 CS67576A CS67576A CS181534B1 CS 181534 B1 CS181534 B1 CS 181534B1 CS 67576 A CS67576 A CS 67576A CS 67576 A CS67576 A CS 67576A CS 181534 B1 CS181534 B1 CS 181534B1
Authority
CS
Czechoslovakia
Prior art keywords
esp
transporting
plates
transfering
equipment
Prior art date
Application number
CS67576A
Other languages
English (en)
Inventor
Kuno Schwarz
Paul Sauerbrei
Kurt Koch
Eberhard Sauer
Original Assignee
Kuno Schwarz
Paul Sauerbrei
Kurt Koch
Eberhard Sauer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuno Schwarz, Paul Sauerbrei, Kurt Koch, Eberhard Sauer filed Critical Kuno Schwarz
Publication of CS181534B1 publication Critical patent/CS181534B1/cs

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
CS67576A 1975-02-04 1976-02-03 Transporting and transfering equipment for plates esp.for semiconducting ones CS181534B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (cs) 1975-02-04 1975-02-04

Publications (1)

Publication Number Publication Date
CS181534B1 true CS181534B1 (en) 1978-03-31

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
CS67576A CS181534B1 (en) 1975-02-04 1976-02-03 Transporting and transfering equipment for plates esp.for semiconducting ones

Country Status (6)

Country Link
CS (1) CS181534B1 (cs)
DD (1) DD120400A1 (cs)
DE (1) DE2557273A1 (cs)
FR (1) FR2300025A1 (cs)
GB (1) GB1508748A (cs)
SU (1) SU618331A1 (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
DE19907210A1 (de) * 1999-02-23 2000-08-31 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen

Also Published As

Publication number Publication date
FR2300025B3 (cs) 1978-10-06
FR2300025A1 (fr) 1976-09-03
DE2557273A1 (de) 1976-08-05
SU618331A1 (ru) 1978-08-05
DD120400A1 (cs) 1976-06-12
GB1508748A (en) 1978-04-26

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