GB1508748A - Arrangement for picking up transferring and delivering disc-shaped objects - Google Patents

Arrangement for picking up transferring and delivering disc-shaped objects

Info

Publication number
GB1508748A
GB1508748A GB434876A GB434876A GB1508748A GB 1508748 A GB1508748 A GB 1508748A GB 434876 A GB434876 A GB 434876A GB 434876 A GB434876 A GB 434876A GB 1508748 A GB1508748 A GB 1508748A
Authority
GB
United Kingdom
Prior art keywords
lever
holders
carrier
transferring
feb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB434876A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of GB1508748A publication Critical patent/GB1508748A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
GB434876A 1975-02-04 1976-02-04 Arrangement for picking up transferring and delivering disc-shaped objects Expired GB1508748A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (cs) 1975-02-04 1975-02-04

Publications (1)

Publication Number Publication Date
GB1508748A true GB1508748A (en) 1978-04-26

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
GB434876A Expired GB1508748A (en) 1975-02-04 1976-02-04 Arrangement for picking up transferring and delivering disc-shaped objects

Country Status (6)

Country Link
CS (1) CS181534B1 (cs)
DD (1) DD120400A1 (cs)
DE (1) DE2557273A1 (cs)
FR (1) FR2300025A1 (cs)
GB (1) GB1508748A (cs)
SU (1) SU618331A1 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194500A (en) * 1986-07-04 1988-03-09 Canon Kk A wafer handling apparatus
WO2000050321A1 (de) * 1999-02-23 2000-08-31 Krauss-Maffei Kunststofftechnik Gmbh Vorrichtung zum transportieren und gleichzeitigen kühlen von substraten für informationsträgerscheiben wie cd, dvd oder dergleichen

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194500A (en) * 1986-07-04 1988-03-09 Canon Kk A wafer handling apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
US5015177A (en) * 1986-07-04 1991-05-14 Canon Kabushiki Kaisha Wafer handling apparatus
WO2000050321A1 (de) * 1999-02-23 2000-08-31 Krauss-Maffei Kunststofftechnik Gmbh Vorrichtung zum transportieren und gleichzeitigen kühlen von substraten für informationsträgerscheiben wie cd, dvd oder dergleichen

Also Published As

Publication number Publication date
CS181534B1 (en) 1978-03-31
FR2300025B3 (cs) 1978-10-06
DD120400A1 (cs) 1976-06-12
FR2300025A1 (fr) 1976-09-03
SU618331A1 (ru) 1978-08-05
DE2557273A1 (de) 1976-08-05

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee