DE2534540C3 - Phasenmaske far die Fouriertransformations-Holographie - Google Patents
Phasenmaske far die Fouriertransformations-HolographieInfo
- Publication number
- DE2534540C3 DE2534540C3 DE2534540A DE2534540A DE2534540C3 DE 2534540 C3 DE2534540 C3 DE 2534540C3 DE 2534540 A DE2534540 A DE 2534540A DE 2534540 A DE2534540 A DE 2534540A DE 2534540 C3 DE2534540 C3 DE 2534540C3
- Authority
- DE
- Germany
- Prior art keywords
- phase
- phase shift
- mask
- shifts
- mask according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001093 holography Methods 0.000 title claims 2
- 230000010363 phase shift Effects 0.000 claims description 101
- 238000009826 distribution Methods 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 11
- 101100180051 Danio rerio isl2a gene Proteins 0.000 claims 1
- 101100126318 Rattus norvegicus Isl2 gene Proteins 0.000 claims 1
- 230000001788 irregular Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 17
- 239000011521 glass Substances 0.000 description 11
- 238000000819 phase cycle Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 6
- 230000001427 coherent effect Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000009466 transformation Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 101100234408 Danio rerio kif7 gene Proteins 0.000 description 1
- 101100221620 Drosophila melanogaster cos gene Proteins 0.000 description 1
- 101100382264 Mus musculus Ca14 gene Proteins 0.000 description 1
- 101100112373 Mus musculus Ctsm gene Proteins 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- 101100094962 Salmo salar salarin gene Proteins 0.000 description 1
- 101100398237 Xenopus tropicalis kif11 gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/16—Processes or apparatus for producing holograms using Fourier transform
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
- G02B5/1871—Transmissive phase gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Holo Graphy (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49089248A JPS5117662A (en) | 1974-08-03 | 1974-08-03 | Gijirandamukakusanhoshiki |
| JP50049930A JPS51124440A (en) | 1975-04-23 | 1975-04-23 | Pseudo random diffusion plate |
| JP50049931A JPS51124441A (en) | 1975-04-23 | 1975-04-23 | Pseudo random diffusion plate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2534540A1 DE2534540A1 (de) | 1976-02-19 |
| DE2534540B2 DE2534540B2 (de) | 1980-04-10 |
| DE2534540C3 true DE2534540C3 (de) | 1981-01-08 |
Family
ID=27293786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2534540A Expired DE2534540C3 (de) | 1974-08-03 | 1975-08-01 | Phasenmaske far die Fouriertransformations-Holographie |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4037918A (enFirst) |
| CA (1) | CA1053042A (enFirst) |
| DE (1) | DE2534540C3 (enFirst) |
| FR (1) | FR2280910A1 (enFirst) |
| GB (1) | GB1523165A (enFirst) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2284889A1 (fr) * | 1974-09-14 | 1976-04-09 | Nippon Telegraph & Telephone | Dephaseur pour enregistrement par hologramme |
| JPS6034754B2 (ja) * | 1976-02-18 | 1985-08-10 | 松下電器産業株式会社 | ホログラム記録装置 |
| US4514059A (en) * | 1982-09-15 | 1985-04-30 | The United States Of America As Represented By The Secretary Of The Army | Incoherent optical heterodyne Fourier transformer |
| US4647154A (en) * | 1983-07-29 | 1987-03-03 | Quantum Diagnostics Ltd. | Optical image processor |
| GB8320629D0 (en) * | 1983-07-30 | 1983-09-01 | Pa Consulting Services | Displacement measuring apparatus |
| US5036546A (en) * | 1986-10-06 | 1991-07-30 | Grumman Aerospace Corporation | Pseudo-noise product coded aperture arrays and method for designing same |
| US4809340A (en) * | 1988-04-08 | 1989-02-28 | Battelle Memorial Institute | Optical correlation system |
| JP2710967B2 (ja) * | 1988-11-22 | 1998-02-10 | 株式会社日立製作所 | 集積回路装置の製造方法 |
| JP2634289B2 (ja) * | 1990-04-18 | 1997-07-23 | 三菱電機株式会社 | 位相シフトマスクの修正方法 |
| US5411824A (en) * | 1993-01-21 | 1995-05-02 | Sematech, Inc. | Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging |
| US5418095A (en) * | 1993-01-21 | 1995-05-23 | Sematech, Inc. | Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process |
| WO1994017449A1 (en) * | 1993-01-21 | 1994-08-04 | Sematech, Inc. | Phase shifting mask structure with multilayer optical coating for improved transmission |
| FR2715480B1 (fr) * | 1994-01-21 | 1996-03-08 | Georges Gaillard | Procédé et dispositif de répartition spatiale de l'énergie d'un faisceau de rayonnement cohérent. |
| US5627664A (en) * | 1994-06-29 | 1997-05-06 | Tamarack Storage Devices, Inc. | Holographic storage with combined orthogonal phase codes and random phase codes |
| IL118057A0 (en) * | 1996-04-29 | 1996-09-12 | Patir Research And Dev Limited | Optical phase element |
| US5940514A (en) * | 1996-04-30 | 1999-08-17 | The Board Of Trustees Of The Leland Stanford Junior University | Encrypted holographic data storage based on orthogonal phase code multiplexing |
| US6228539B1 (en) | 1996-09-18 | 2001-05-08 | Numerical Technologies, Inc. | Phase shifting circuit manufacture method and apparatus |
| US6163391A (en) * | 1998-07-10 | 2000-12-19 | Lucent Technologies Inc. | Method and apparatus for holographic data storage |
| JP3413138B2 (ja) | 1998-11-06 | 2003-06-03 | キヤノン株式会社 | 位相型計算機ホログラムの製造方法 |
| US7028285B2 (en) * | 2000-07-05 | 2006-04-11 | Synopsys, Inc. | Standard cell design incorporating phase information |
| US6978436B2 (en) | 2000-07-05 | 2005-12-20 | Synopsys, Inc. | Design data format and hierarchy management for phase processing |
| US6681379B2 (en) | 2000-07-05 | 2004-01-20 | Numerical Technologies, Inc. | Phase shifting design and layout for static random access memory |
| US7083879B2 (en) | 2001-06-08 | 2006-08-01 | Synopsys, Inc. | Phase conflict resolution for photolithographic masks |
| US6787271B2 (en) * | 2000-07-05 | 2004-09-07 | Numerical Technologies, Inc. | Design and layout of phase shifting photolithographic masks |
| US6541165B1 (en) | 2000-07-05 | 2003-04-01 | Numerical Technologies, Inc. | Phase shift mask sub-resolution assist features |
| US6524752B1 (en) | 2000-07-05 | 2003-02-25 | Numerical Technologies, Inc. | Phase shift masking for intersecting lines |
| US6503666B1 (en) | 2000-07-05 | 2003-01-07 | Numerical Technologies, Inc. | Phase shift masking for complex patterns |
| US6777141B2 (en) * | 2000-07-05 | 2004-08-17 | Numerical Technologies, Inc. | Phase shift mask including sub-resolution assist features for isolated spaces |
| US6539521B1 (en) | 2000-09-29 | 2003-03-25 | Numerical Technologies, Inc. | Dissection of corners in a fabrication layout for correcting proximity effects |
| US6622288B1 (en) | 2000-10-25 | 2003-09-16 | Numerical Technologies, Inc. | Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features |
| US6584610B1 (en) | 2000-10-25 | 2003-06-24 | Numerical Technologies, Inc. | Incrementally resolved phase-shift conflicts in layouts for phase-shifted features |
| US6653026B2 (en) | 2000-12-20 | 2003-11-25 | Numerical Technologies, Inc. | Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask |
| US6469304B2 (en) * | 2000-12-28 | 2002-10-22 | Raytheon Company | Pseudo-randomized infrared blurring array |
| US6551750B2 (en) | 2001-03-16 | 2003-04-22 | Numerical Technologies, Inc. | Self-aligned fabrication technique for tri-tone attenuated phase-shifting masks |
| US6635393B2 (en) | 2001-03-23 | 2003-10-21 | Numerical Technologies, Inc. | Blank for alternating PSM photomask with charge dissipation layer |
| JP2002298424A (ja) * | 2001-03-28 | 2002-10-11 | Sanyo Electric Co Ltd | 光ピックアップ装置 |
| US6566019B2 (en) | 2001-04-03 | 2003-05-20 | Numerical Technologies, Inc. | Using double exposure effects during phase shifting to control line end shortening |
| US6573010B2 (en) | 2001-04-03 | 2003-06-03 | Numerical Technologies, Inc. | Method and apparatus for reducing incidental exposure by using a phase shifter with a variable regulator |
| US6569583B2 (en) | 2001-05-04 | 2003-05-27 | Numerical Technologies, Inc. | Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts |
| US6852471B2 (en) * | 2001-06-08 | 2005-02-08 | Numerical Technologies, Inc. | Exposure control for phase shifting photolithographic masks |
| US6523165B2 (en) | 2001-07-13 | 2003-02-18 | Numerical Technologies, Inc. | Alternating phase shift mask design conflict resolution |
| US6664009B2 (en) | 2001-07-27 | 2003-12-16 | Numerical Technologies, Inc. | Method and apparatus for allowing phase conflicts in phase shifting mask and chromeless phase edges |
| US6684382B2 (en) | 2001-08-31 | 2004-01-27 | Numerical Technologies, Inc. | Microloading effect correction |
| US6735752B2 (en) | 2001-09-10 | 2004-05-11 | Numerical Technologies, Inc. | Modifying a hierarchical representation of a circuit to process features created by interactions between cells |
| US6738958B2 (en) | 2001-09-10 | 2004-05-18 | Numerical Technologies, Inc. | Modifying a hierarchical representation of a circuit to process composite gates |
| US6698007B2 (en) | 2001-10-09 | 2004-02-24 | Numerical Technologies, Inc. | Method and apparatus for resolving coloring conflicts between phase shifters |
| US6981240B2 (en) * | 2001-11-15 | 2005-12-27 | Synopsys, Inc. | Cutting patterns for full phase shifting masks |
| US7639422B2 (en) * | 2004-10-11 | 2009-12-29 | Koninklijke Philips Electronics N.V. | Device for generating an array of light spots |
| US7813017B2 (en) * | 2005-10-21 | 2010-10-12 | Inphase Technologies, Inc. | Method and system for increasing holographic data storage capacity using irradiance-tailoring element |
| JP4696890B2 (ja) * | 2005-12-12 | 2011-06-08 | 富士ゼロックス株式会社 | ホログラム記録方法及びホログラム記録装置 |
| US20070223554A1 (en) | 2006-03-09 | 2007-09-27 | Inphase Technologies, Inc. | External cavity laser |
| EP2107561A1 (en) * | 2008-04-04 | 2009-10-07 | Deutsche Thomson OHG | Data page for use in a holographic data storage system |
| US9509956B2 (en) * | 2011-11-07 | 2016-11-29 | The Regents Of The University Of Colorado, A Body Corporate | High-speed wavefront optimization |
| US9726818B1 (en) * | 2013-05-30 | 2017-08-08 | Hrl Laboratories, Llc | Multi-wavelength band optical phase and amplitude controller |
| CN113169507B (zh) * | 2019-01-23 | 2023-06-09 | 极光先进雷射株式会社 | 激光系统和电子器件的制造方法 |
| US11237059B1 (en) | 2020-12-14 | 2022-02-01 | Gerchberg Ophthalmic Dispensing, PLLC | Totagraphy: Coherent diffractive/digital information reconstruction by iterative phase recovery using special masks |
| WO2022187646A1 (en) * | 2021-03-05 | 2022-09-09 | Chan Zuckerberg Biohub, Inc. | Generation of a needleshaped beam for extended depth-of-focus optical coherence tomography |
| US12399461B1 (en) | 2021-12-08 | 2025-08-26 | Wavefront Analysis Systems Llc | Totagraphy: coherent diffractive/digital information reconstruction by iterative phase recovery using reference wave |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3604778A (en) * | 1969-10-22 | 1971-09-14 | Bell Telephone Labor Inc | Fourier transform recording with random phase shifting |
| US3744871A (en) * | 1970-02-25 | 1973-07-10 | Hitachi Ltd | Holographic memory system for recording digital information |
| JPS5166845A (en) * | 1972-03-13 | 1976-06-09 | Hitachi Ltd | Horoguramusakuseisochi |
| US3829193A (en) * | 1972-09-18 | 1974-08-13 | Hitachi Ltd | Improved random phase plate for fourier transform holography |
| FR2211714B1 (enFirst) * | 1972-12-25 | 1977-09-30 | Matsushita Electric Industrial Co Ltd |
-
1975
- 1975-07-24 GB GB30968/75A patent/GB1523165A/en not_active Expired
- 1975-07-31 US US05/600,589 patent/US4037918A/en not_active Expired - Lifetime
- 1975-08-01 CA CA232,701A patent/CA1053042A/en not_active Expired
- 1975-08-01 FR FR7524097A patent/FR2280910A1/fr active Granted
- 1975-08-01 DE DE2534540A patent/DE2534540C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2280910B1 (enFirst) | 1977-12-16 |
| DE2534540A1 (de) | 1976-02-19 |
| DE2534540B2 (de) | 1980-04-10 |
| FR2280910A1 (fr) | 1976-02-27 |
| CA1053042A (en) | 1979-04-24 |
| GB1523165A (en) | 1978-08-31 |
| US4037918A (en) | 1977-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |