DE2525317A1 - Verfahren und vorrichtung zur verschiebungsmessung mittels eines beugungsgitters - Google Patents

Verfahren und vorrichtung zur verschiebungsmessung mittels eines beugungsgitters

Info

Publication number
DE2525317A1
DE2525317A1 DE19752525317 DE2525317A DE2525317A1 DE 2525317 A1 DE2525317 A1 DE 2525317A1 DE 19752525317 DE19752525317 DE 19752525317 DE 2525317 A DE2525317 A DE 2525317A DE 2525317 A1 DE2525317 A1 DE 2525317A1
Authority
DE
Germany
Prior art keywords
incident
order
diffraction grating
rays
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19752525317
Other languages
German (de)
English (en)
Inventor
Olivier Fuchs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GENEVOISE INSTR PHYSIQUE
Societe Genevoise dInstruments de Physique
Original Assignee
GENEVOISE INSTR PHYSIQUE
Societe Genevoise dInstruments de Physique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GENEVOISE INSTR PHYSIQUE, Societe Genevoise dInstruments de Physique filed Critical GENEVOISE INSTR PHYSIQUE
Publication of DE2525317A1 publication Critical patent/DE2525317A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4255—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4261—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element with major polarization dependent properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19752525317 1974-06-07 1975-06-06 Verfahren und vorrichtung zur verschiebungsmessung mittels eines beugungsgitters Pending DE2525317A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH779174A CH581824A5 (OSRAM) 1974-06-07 1974-06-07

Publications (1)

Publication Number Publication Date
DE2525317A1 true DE2525317A1 (de) 1975-12-18

Family

ID=4330517

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752525317 Pending DE2525317A1 (de) 1974-06-07 1975-06-06 Verfahren und vorrichtung zur verschiebungsmessung mittels eines beugungsgitters

Country Status (3)

Country Link
CH (1) CH581824A5 (OSRAM)
DE (1) DE2525317A1 (OSRAM)
FR (1) FR2274023A1 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496872A1 (fr) * 1980-12-23 1982-06-25 Sopelem Dispositif de mesure des variations de la position angulaire d'un solide et procede d'utilisation de ce dispositif

Also Published As

Publication number Publication date
FR2274023A1 (fr) 1976-01-02
CH581824A5 (OSRAM) 1976-11-15

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Legal Events

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