DE2501894A1 - Elektrisches widerstandselement und verfahren zu seiner herstellung - Google Patents
Elektrisches widerstandselement und verfahren zu seiner herstellungInfo
- Publication number
- DE2501894A1 DE2501894A1 DE19752501894 DE2501894A DE2501894A1 DE 2501894 A1 DE2501894 A1 DE 2501894A1 DE 19752501894 DE19752501894 DE 19752501894 DE 2501894 A DE2501894 A DE 2501894A DE 2501894 A1 DE2501894 A1 DE 2501894A1
- Authority
- DE
- Germany
- Prior art keywords
- graphite
- silicon
- doping
- electrical resistance
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 51
- 229910002804 graphite Inorganic materials 0.000 claims description 34
- 239000010439 graphite Substances 0.000 claims description 34
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 33
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 32
- 239000000203 mixture Substances 0.000 claims description 28
- 238000005475 siliconizing Methods 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 239000012298 atmosphere Substances 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011233 carbonaceous binding agent Substances 0.000 claims description 3
- 230000035484 reaction time Effects 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000004040 coloring Methods 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 8
- 238000010304 firing Methods 0.000 description 7
- 239000012299 nitrogen atmosphere Substances 0.000 description 7
- 239000011230 binding agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000012300 argon atmosphere Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000007770 graphite material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000006188 syrup Substances 0.000 description 3
- 235000020357 syrup Nutrition 0.000 description 3
- 241000220317 Rosa Species 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 241000209149 Zea Species 0.000 description 2
- 235000005824 Zea mays ssp. parviglumis Nutrition 0.000 description 2
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 235000005822 corn Nutrition 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000003292 diminished effect Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000010285 flame spraying Methods 0.000 description 2
- 239000002737 fuel gas Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N nitrous oxide Inorganic materials [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241001315609 Pittosporum crassifolium Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- SNICXCGAKADSCV-UHFFFAOYSA-N nicotine Chemical compound CN1CCCC1C1=CC=CN=C1 SNICXCGAKADSCV-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000004460 silage Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
- F23Q7/22—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Resistance Heating (AREA)
- Non-Adjustable Resistors (AREA)
- Conductive Materials (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43535274A | 1974-01-21 | 1974-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2501894A1 true DE2501894A1 (de) | 1975-07-24 |
Family
ID=23728048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752501894 Pending DE2501894A1 (de) | 1974-01-21 | 1975-01-18 | Elektrisches widerstandselement und verfahren zu seiner herstellung |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5718682B2 (enExample) |
| DE (1) | DE2501894A1 (enExample) |
| FR (1) | FR2258695A1 (enExample) |
| GB (1) | GB1497871A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007198A1 (en) * | 1978-06-29 | 1980-01-23 | Morganite Electroheat Limited | Igniter |
| US6179609B1 (en) * | 1998-08-05 | 2001-01-30 | Persys Technology Ltd. | Compact external torch assembly for semiconductor processing |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2137975B (en) * | 1983-04-12 | 1986-09-17 | Atomic Energy Authority Uk | Joining silicon carbide bodies |
| DE19956767A1 (de) * | 1999-11-25 | 2001-05-31 | Nanogate Gmbh | Siliziumcarbid-Element |
| GB2404128B (en) | 2003-07-16 | 2005-08-24 | Kanthal Ltd | Silicon carbide furnace heating elements |
| JP5322055B2 (ja) * | 2009-08-18 | 2013-10-23 | 独立行政法人産業技術総合研究所 | 多孔質発熱装置とその製造方法 |
| JP7292573B2 (ja) * | 2018-12-07 | 2023-06-19 | 住友金属鉱山株式会社 | 炭化珪素多結晶基板およびその製造方法 |
-
1975
- 1975-01-14 GB GB161975A patent/GB1497871A/en not_active Expired
- 1975-01-18 DE DE19752501894 patent/DE2501894A1/de active Pending
- 1975-01-20 JP JP792275A patent/JPS5718682B2/ja not_active Expired
- 1975-01-20 FR FR7501683A patent/FR2258695A1/fr not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007198A1 (en) * | 1978-06-29 | 1980-01-23 | Morganite Electroheat Limited | Igniter |
| US6179609B1 (en) * | 1998-08-05 | 2001-01-30 | Persys Technology Ltd. | Compact external torch assembly for semiconductor processing |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1497871A (en) | 1978-01-12 |
| JPS5718682B2 (enExample) | 1982-04-17 |
| JPS50102892A (enExample) | 1975-08-14 |
| FR2258695A1 (enExample) | 1975-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE4204288C2 (de) | Elektrische Heizvorrichtung | |
| DE4433505C2 (de) | Keramikglühkerze | |
| DE1558662A1 (de) | Keramik-Verbund-Werkstoff | |
| DE112018004317B4 (de) | Elektrisch beheizter Katalysator | |
| DE2854071C2 (de) | Zündkerze | |
| DE2710628A1 (de) | Als zuendelement geeigneter koerper aus siliciumcarbid-teilchen und verfahren zu seiner herstellung | |
| DE19809976C2 (de) | Formkörper aus einer elektrisch leitfähigen Keramikverbindung sowie Verfahren zur Herstellung des Formkörpers | |
| DE4417645A1 (de) | Faserbrenner | |
| DE2501894A1 (de) | Elektrisches widerstandselement und verfahren zu seiner herstellung | |
| DE69129644T2 (de) | Hochhitzebeständiger metallischer Monolith und Verfahren zu seiner Herstellung | |
| DE69716336T2 (de) | Aluminium-Chrom-Legierung, Verfahren zu ihrer Herstellung, und ihre Anwendungen | |
| DE3843863C2 (enExample) | ||
| DE1440311A1 (de) | Feuerfeste Karbidkoerper und Verfahren zu ihrer Herstellung | |
| DE2909344C3 (de) | Keramischer Zünder | |
| DE2253411C3 (de) | Verfahren zum Herstellen von aus Halbleitermaterial bestehenden, direkt beheizbaren Hohlkörpern für Diffusionszwecke | |
| DE2310148C3 (de) | Verfahren zur Herstellung eines elektrischen Widerstandselementes | |
| EP1235760B1 (de) | Siliziumcarbid-element | |
| DE4325606A1 (de) | Keramisches Heizelement sowie Verfahren zur Herstellung eines solchen Heizelements | |
| DE1590215C3 (de) | Verfahren zur Herstellung einer elektrisch leitenden Oberflache auf einem im wesentlichen aus Aluminiumoxyd bestehenden Isolator | |
| DE2149764A1 (de) | Elektrisch leitende Heizelemente | |
| DE7821817U1 (de) | Kathode für Elektronenemission | |
| DE2604103C2 (de) | Verfahren zur Herstellung von Kontaktschichten auf keramischen Halbleiterkörpern u. Beschichtungsmaterial dafür | |
| DE1764670C (de) | Verfahren zum Herstellen einer Sekundäremissionselektrode | |
| DE3905315A1 (de) | Elektrisch leitende glaszusammensetzung | |
| DE2534468B2 (de) | Verfahren zum herstellen eines gitters fuer elektronenroehren |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |