DE2402728C3 - Vorrichtung zum Analysieren einer Oberflachenschicht durch Ionenzerstreuung - Google Patents
Vorrichtung zum Analysieren einer Oberflachenschicht durch IonenzerstreuungInfo
- Publication number
- DE2402728C3 DE2402728C3 DE19742402728 DE2402728A DE2402728C3 DE 2402728 C3 DE2402728 C3 DE 2402728C3 DE 19742402728 DE19742402728 DE 19742402728 DE 2402728 A DE2402728 A DE 2402728A DE 2402728 C3 DE2402728 C3 DE 2402728C3
- Authority
- DE
- Germany
- Prior art keywords
- analyzer
- surface layer
- ion beam
- ions
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002344 surface layer Substances 0.000 title claims description 19
- 238000004969 ion scattering spectroscopy Methods 0.000 title claims description 7
- 150000002500 ions Chemical class 0.000 claims description 38
- 238000010884 ion-beam technique Methods 0.000 claims description 18
- 230000005684 electric field Effects 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- -1 helium or neon ions Chemical class 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7301496A NL7301496A (enrdf_load_stackoverflow) | 1973-02-02 | 1973-02-02 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2402728A1 DE2402728A1 (de) | 1974-08-08 |
| DE2402728B2 DE2402728B2 (de) | 1980-04-30 |
| DE2402728C3 true DE2402728C3 (de) | 1981-01-15 |
Family
ID=19818135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19742402728 Expired DE2402728C3 (de) | 1973-02-02 | 1974-01-21 | Vorrichtung zum Analysieren einer Oberflachenschicht durch Ionenzerstreuung |
Country Status (5)
| Country | Link |
|---|---|
| CA (1) | CA995825A (enrdf_load_stackoverflow) |
| DE (1) | DE2402728C3 (enrdf_load_stackoverflow) |
| FR (1) | FR2216578B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1454641A (enrdf_load_stackoverflow) |
| NL (1) | NL7301496A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4107526A (en) * | 1976-03-22 | 1978-08-15 | Minnesota Mining And Manufacturing Company | Ion scattering spectrometer with modified bias |
| DE2856244A1 (de) * | 1978-12-27 | 1980-07-03 | Kernforschungsanlage Juelich | Elektronenstosspektrometer |
| DE2922128A1 (de) * | 1979-05-31 | 1980-12-11 | Strahlen Umweltforsch Gmbh | Ionenquelle fuer einen massenanalysator |
| JPS6037644A (ja) * | 1983-08-10 | 1985-02-27 | Anelva Corp | 表面分析装置 |
-
1973
- 1973-02-02 NL NL7301496A patent/NL7301496A/xx not_active Application Discontinuation
-
1974
- 1974-01-10 GB GB123174A patent/GB1454641A/en not_active Expired
- 1974-01-21 DE DE19742402728 patent/DE2402728C3/de not_active Expired
- 1974-01-29 FR FR7402881A patent/FR2216578B1/fr not_active Expired
- 1974-01-30 CA CA191,367A patent/CA995825A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7301496A (enrdf_load_stackoverflow) | 1974-08-06 |
| DE2402728A1 (de) | 1974-08-08 |
| FR2216578A1 (enrdf_load_stackoverflow) | 1974-08-30 |
| FR2216578B1 (enrdf_load_stackoverflow) | 1983-08-05 |
| CA995825A (en) | 1976-08-24 |
| GB1454641A (en) | 1976-11-03 |
| DE2402728B2 (de) | 1980-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |