DE2314284A1 - Ionenzerstaeuber-vakuumpumpe - Google Patents
Ionenzerstaeuber-vakuumpumpeInfo
- Publication number
- DE2314284A1 DE2314284A1 DE19732314284 DE2314284A DE2314284A1 DE 2314284 A1 DE2314284 A1 DE 2314284A1 DE 19732314284 DE19732314284 DE 19732314284 DE 2314284 A DE2314284 A DE 2314284A DE 2314284 A1 DE2314284 A1 DE 2314284A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- vapor pressure
- anode
- high vapor
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 31
- 238000004544 sputter deposition Methods 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 10
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000007772 electrode material Substances 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 239000011777 magnesium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052779 Neodymium Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 239000011575 calcium Substances 0.000 claims description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005086 pumping Methods 0.000 description 7
- 108010083687 Ion Pumps Proteins 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000000889 atomisation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 235000019013 Viburnum opulus Nutrition 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00240451A US3827829A (en) | 1972-04-03 | 1972-04-03 | Sputter-ion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2314284A1 true DE2314284A1 (de) | 1973-10-25 |
Family
ID=22906580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732314284 Pending DE2314284A1 (de) | 1972-04-03 | 1973-03-22 | Ionenzerstaeuber-vakuumpumpe |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3827829A (enExample) |
| JP (1) | JPS497807A (enExample) |
| DE (1) | DE2314284A1 (enExample) |
| FR (1) | FR2179397A6 (enExample) |
| IL (1) | IL41717A0 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6023280Y2 (ja) * | 1978-08-10 | 1985-07-10 | 日本ケ−ブル・システム株式会社 | 舶用機関の制御装置 |
| KR100216478B1 (ko) * | 1996-08-27 | 1999-08-16 | 정명세 | 이온드래그 진공펌프 |
| US7371051B2 (en) * | 2002-09-09 | 2008-05-13 | The Trustees Of The University Of Pennsylvania | Controlled magnetohydrodynamic fluidic networks and stirrers |
| KR100860274B1 (ko) * | 2007-06-29 | 2008-09-25 | 포항공과대학교 산학협력단 | 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법 |
| JP4835756B2 (ja) * | 2008-02-14 | 2011-12-14 | 独立行政法人情報通信研究機構 | イオンポンプシステム及び電磁場発生装置 |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| JP5855294B1 (ja) * | 2015-02-06 | 2016-02-09 | 株式会社日立製作所 | イオンポンプおよびそれを用いた荷電粒子線装置 |
| US10665437B2 (en) * | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| DE112015006910B4 (de) * | 2015-09-16 | 2023-03-30 | Hitachi High-Tech Corporation | Vakuumvorrichtung |
| GB2639524A (en) * | 2023-12-19 | 2025-10-01 | Edwards Vacuum Llc | Sputter ion pump cathode |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3112863A (en) * | 1960-10-06 | 1963-12-03 | Cons Vacuum Corp | Ion pump |
| US3141605A (en) * | 1961-08-18 | 1964-07-21 | Nippon Electric Co | Magnetron type getter ion pump |
| US3233823A (en) * | 1961-11-20 | 1966-02-08 | Nippon Electric Co | Electron-discharge vacuum apparatus |
| US3546510A (en) * | 1967-11-30 | 1970-12-08 | Philips Corp | Square cathode for ion getter pumps |
| US3542488A (en) * | 1968-10-28 | 1970-11-24 | Andar Iti Inc | Method and apparatus for producing alloyed getter films in sputter-ion pumps |
-
1972
- 1972-04-03 US US00240451A patent/US3827829A/en not_active Expired - Lifetime
-
1973
- 1973-03-07 IL IL41717A patent/IL41717A0/xx unknown
- 1973-03-22 DE DE19732314284 patent/DE2314284A1/de active Pending
- 1973-03-27 FR FR7310892A patent/FR2179397A6/fr not_active Expired
- 1973-04-03 JP JP48038175A patent/JPS497807A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IL41717A0 (en) | 1973-05-31 |
| US3827829A (en) | 1974-08-06 |
| FR2179397A6 (enExample) | 1973-11-16 |
| JPS497807A (enExample) | 1974-01-24 |
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