FR2179397A6 - - Google Patents

Info

Publication number
FR2179397A6
FR2179397A6 FR7310892A FR7310892A FR2179397A6 FR 2179397 A6 FR2179397 A6 FR 2179397A6 FR 7310892 A FR7310892 A FR 7310892A FR 7310892 A FR7310892 A FR 7310892A FR 2179397 A6 FR2179397 A6 FR 2179397A6
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7310892A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Application granted granted Critical
Publication of FR2179397A6 publication Critical patent/FR2179397A6/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR7310892A 1972-04-03 1973-03-27 Expired FR2179397A6 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00240451A US3827829A (en) 1972-04-03 1972-04-03 Sputter-ion pump

Publications (1)

Publication Number Publication Date
FR2179397A6 true FR2179397A6 (fr) 1973-11-16

Family

ID=22906580

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7310892A Expired FR2179397A6 (fr) 1972-04-03 1973-03-27

Country Status (5)

Country Link
US (1) US3827829A (fr)
JP (1) JPS497807A (fr)
DE (1) DE2314284A1 (fr)
FR (1) FR2179397A6 (fr)
IL (1) IL41717A0 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023280Y2 (ja) * 1978-08-10 1985-07-10 日本ケ−ブル・システム株式会社 舶用機関の制御装置
KR100216478B1 (ko) * 1996-08-27 1999-08-16 정명세 이온드래그 진공펌프
US7371051B2 (en) * 2002-09-09 2008-05-13 The Trustees Of The University Of Pennsylvania Controlled magnetohydrodynamic fluidic networks and stirrers
KR100860274B1 (ko) * 2007-06-29 2008-09-25 포항공과대학교 산학협력단 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법
WO2009101814A1 (fr) * 2008-02-14 2009-08-20 National Institute Of Information And Communications Technology Système de pompe ionique et générateur de champ électromagnétique
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
JP5855294B1 (ja) * 2015-02-06 2016-02-09 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
WO2017046886A1 (fr) * 2015-09-16 2017-03-23 株式会社日立ハイテクノロジーズ Dispositif à vide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3112863A (en) * 1960-10-06 1963-12-03 Cons Vacuum Corp Ion pump
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump
US3233823A (en) * 1961-11-20 1966-02-08 Nippon Electric Co Electron-discharge vacuum apparatus
US3546510A (en) * 1967-11-30 1970-12-08 Philips Corp Square cathode for ion getter pumps
US3542488A (en) * 1968-10-28 1970-11-24 Andar Iti Inc Method and apparatus for producing alloyed getter films in sputter-ion pumps

Also Published As

Publication number Publication date
IL41717A0 (en) 1973-05-31
US3827829A (en) 1974-08-06
DE2314284A1 (de) 1973-10-25
JPS497807A (fr) 1974-01-24

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