IL41717A0 - Improvements in sputter ion pumps - Google Patents

Improvements in sputter ion pumps

Info

Publication number
IL41717A0
IL41717A0 IL41717A IL4171773A IL41717A0 IL 41717 A0 IL41717 A0 IL 41717A0 IL 41717 A IL41717 A IL 41717A IL 4171773 A IL4171773 A IL 4171773A IL 41717 A0 IL41717 A0 IL 41717A0
Authority
IL
Israel
Prior art keywords
sputter ion
ion pumps
pumps
sputter
ion
Prior art date
Application number
IL41717A
Other languages
English (en)
Original Assignee
Veeco Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instr Inc filed Critical Veeco Instr Inc
Publication of IL41717A0 publication Critical patent/IL41717A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
IL41717A 1972-04-03 1973-03-07 Improvements in sputter ion pumps IL41717A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00240451A US3827829A (en) 1972-04-03 1972-04-03 Sputter-ion pump

Publications (1)

Publication Number Publication Date
IL41717A0 true IL41717A0 (en) 1973-05-31

Family

ID=22906580

Family Applications (1)

Application Number Title Priority Date Filing Date
IL41717A IL41717A0 (en) 1972-04-03 1973-03-07 Improvements in sputter ion pumps

Country Status (5)

Country Link
US (1) US3827829A (xx)
JP (1) JPS497807A (xx)
DE (1) DE2314284A1 (xx)
FR (1) FR2179397A6 (xx)
IL (1) IL41717A0 (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023280Y2 (ja) * 1978-08-10 1985-07-10 日本ケ−ブル・システム株式会社 舶用機関の制御装置
KR100216478B1 (ko) * 1996-08-27 1999-08-16 정명세 이온드래그 진공펌프
US7371051B2 (en) * 2002-09-09 2008-05-13 The Trustees Of The University Of Pennsylvania Controlled magnetohydrodynamic fluidic networks and stirrers
KR100860274B1 (ko) * 2007-06-29 2008-09-25 포항공과대학교 산학협력단 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법
JP4835756B2 (ja) * 2008-02-14 2011-12-14 独立行政法人情報通信研究機構 イオンポンプシステム及び電磁場発生装置
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
JP5855294B1 (ja) * 2015-02-06 2016-02-09 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10804084B2 (en) * 2015-09-16 2020-10-13 Hitachi High-Tech Corporation Vacuum apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3112863A (en) * 1960-10-06 1963-12-03 Cons Vacuum Corp Ion pump
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump
US3233823A (en) * 1961-11-20 1966-02-08 Nippon Electric Co Electron-discharge vacuum apparatus
US3546510A (en) * 1967-11-30 1970-12-08 Philips Corp Square cathode for ion getter pumps
US3542488A (en) * 1968-10-28 1970-11-24 Andar Iti Inc Method and apparatus for producing alloyed getter films in sputter-ion pumps

Also Published As

Publication number Publication date
DE2314284A1 (de) 1973-10-25
FR2179397A6 (xx) 1973-11-16
JPS497807A (xx) 1974-01-24
US3827829A (en) 1974-08-06

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