JPS497807A - - Google Patents
Info
- Publication number
- JPS497807A JPS497807A JP48038175A JP3817573A JPS497807A JP S497807 A JPS497807 A JP S497807A JP 48038175 A JP48038175 A JP 48038175A JP 3817573 A JP3817573 A JP 3817573A JP S497807 A JPS497807 A JP S497807A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00240451A US3827829A (en) | 1972-04-03 | 1972-04-03 | Sputter-ion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS497807A true JPS497807A (fr) | 1974-01-24 |
Family
ID=22906580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48038175A Pending JPS497807A (fr) | 1972-04-03 | 1973-04-03 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3827829A (fr) |
| JP (1) | JPS497807A (fr) |
| DE (1) | DE2314284A1 (fr) |
| FR (1) | FR2179397A6 (fr) |
| IL (1) | IL41717A0 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5527141U (fr) * | 1978-08-10 | 1980-02-21 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100216478B1 (ko) * | 1996-08-27 | 1999-08-16 | 정명세 | 이온드래그 진공펌프 |
| US7371051B2 (en) * | 2002-09-09 | 2008-05-13 | The Trustees Of The University Of Pennsylvania | Controlled magnetohydrodynamic fluidic networks and stirrers |
| KR100860274B1 (ko) * | 2007-06-29 | 2008-09-25 | 포항공과대학교 산학협력단 | 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법 |
| EP2249373B1 (fr) * | 2008-02-14 | 2017-08-02 | National Institute of Information and Communications Technology | Système de pompe ionique et générateur de champ électromagnétique |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| JP5855294B1 (ja) * | 2015-02-06 | 2016-02-09 | 株式会社日立製作所 | イオンポンプおよびそれを用いた荷電粒子線装置 |
| US10665437B2 (en) * | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10804084B2 (en) * | 2015-09-16 | 2020-10-13 | Hitachi High-Tech Corporation | Vacuum apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3112863A (en) * | 1960-10-06 | 1963-12-03 | Cons Vacuum Corp | Ion pump |
| US3141605A (en) * | 1961-08-18 | 1964-07-21 | Nippon Electric Co | Magnetron type getter ion pump |
| US3233823A (en) * | 1961-11-20 | 1966-02-08 | Nippon Electric Co | Electron-discharge vacuum apparatus |
| US3546510A (en) * | 1967-11-30 | 1970-12-08 | Philips Corp | Square cathode for ion getter pumps |
| US3542488A (en) * | 1968-10-28 | 1970-11-24 | Andar Iti Inc | Method and apparatus for producing alloyed getter films in sputter-ion pumps |
-
1972
- 1972-04-03 US US00240451A patent/US3827829A/en not_active Expired - Lifetime
-
1973
- 1973-03-07 IL IL41717A patent/IL41717A0/xx unknown
- 1973-03-22 DE DE19732314284 patent/DE2314284A1/de active Pending
- 1973-03-27 FR FR7310892A patent/FR2179397A6/fr not_active Expired
- 1973-04-03 JP JP48038175A patent/JPS497807A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5527141U (fr) * | 1978-08-10 | 1980-02-21 | ||
| JPS6023280Y2 (ja) * | 1978-08-10 | 1985-07-10 | 日本ケ−ブル・システム株式会社 | 舶用機関の制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US3827829A (en) | 1974-08-06 |
| DE2314284A1 (de) | 1973-10-25 |
| FR2179397A6 (fr) | 1973-11-16 |
| IL41717A0 (en) | 1973-05-31 |