JPS497807A - - Google Patents

Info

Publication number
JPS497807A
JPS497807A JP48038175A JP3817573A JPS497807A JP S497807 A JPS497807 A JP S497807A JP 48038175 A JP48038175 A JP 48038175A JP 3817573 A JP3817573 A JP 3817573A JP S497807 A JPS497807 A JP S497807A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48038175A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS497807A publication Critical patent/JPS497807A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
JP48038175A 1972-04-03 1973-04-03 Pending JPS497807A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00240451A US3827829A (en) 1972-04-03 1972-04-03 Sputter-ion pump

Publications (1)

Publication Number Publication Date
JPS497807A true JPS497807A (fr) 1974-01-24

Family

ID=22906580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48038175A Pending JPS497807A (fr) 1972-04-03 1973-04-03

Country Status (5)

Country Link
US (1) US3827829A (fr)
JP (1) JPS497807A (fr)
DE (1) DE2314284A1 (fr)
FR (1) FR2179397A6 (fr)
IL (1) IL41717A0 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527141U (fr) * 1978-08-10 1980-02-21

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100216478B1 (ko) * 1996-08-27 1999-08-16 정명세 이온드래그 진공펌프
US7371051B2 (en) * 2002-09-09 2008-05-13 The Trustees Of The University Of Pennsylvania Controlled magnetohydrodynamic fluidic networks and stirrers
KR100860274B1 (ko) * 2007-06-29 2008-09-25 포항공과대학교 산학협력단 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법
EP2249373B1 (fr) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Système de pompe ionique et générateur de champ électromagnétique
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
JP5855294B1 (ja) * 2015-02-06 2016-02-09 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10804084B2 (en) * 2015-09-16 2020-10-13 Hitachi High-Tech Corporation Vacuum apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3112863A (en) * 1960-10-06 1963-12-03 Cons Vacuum Corp Ion pump
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump
US3233823A (en) * 1961-11-20 1966-02-08 Nippon Electric Co Electron-discharge vacuum apparatus
US3546510A (en) * 1967-11-30 1970-12-08 Philips Corp Square cathode for ion getter pumps
US3542488A (en) * 1968-10-28 1970-11-24 Andar Iti Inc Method and apparatus for producing alloyed getter films in sputter-ion pumps

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527141U (fr) * 1978-08-10 1980-02-21
JPS6023280Y2 (ja) * 1978-08-10 1985-07-10 日本ケ−ブル・システム株式会社 舶用機関の制御装置

Also Published As

Publication number Publication date
US3827829A (en) 1974-08-06
DE2314284A1 (de) 1973-10-25
FR2179397A6 (fr) 1973-11-16
IL41717A0 (en) 1973-05-31

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